This paper describes the design and evaluation of fully scannable embedded memory arrays. A memory array, such as a register file, is made scannable by adding a small auxiliary circuit including a counter and multiplexers. Plural memory arrays can be chained into a single scan path along with ordinary flip-flops. Detailed configuration and implementation of the scannable CMOS and bipolar LCML register file macros are discussed. The overhead ratio of the CMOS register file macro with 16-word by 16-bit results in an 8.6% transistor count and a 6.4% die area. The access time overhaead is 7.8% and the set-up time increases by about 50ps. Bipolar LCML register file macros have been applied to gate array LSIs which have successfully achieved average stuck-at fault coverage of 99.2%.