We have devised and implemented a new low-loss microstrip transmission structure on LTCC substrate by including void cavities in the dielectric layer between conductor strip and ground plane. Measurements of λ/4 T-resonators with the novel microstrip structure reveal total loss of 0.0126dB/mm and Q-factor of 267 at 15.85GHz. The dielectric loss is analyzed as small as 0.0005dB/mm at the frequency, and that is equivalent to an improvement of a factor of 18 compared to the conventional LTCC microstrip structure. The proposed microstrip structure with the embedded void cavities is suited for low loss LTCC based RF-MCM applications.

Fully embedded spiral inductors in a low loss dielectric multi-layer were designed and fabricated using a low temperature co-fired ceramics (LTCC) technology for RF SIP (system in package) integrations. The line width/space and the number of spiral layers were optimized within five layers of LTCC dielectric for high Q-factor, high self-resonant frequency (SRF), process easiness, and compact size. The embedded multi-layer spiral inductors reveal better performance in terms of Q-factor, SRF and the effective inductance Leff than planar spiral inductors of the same dimension and number of turns. The optimized multi-layer spiral inductor shows maximum Q of 56, Leff of 6.6 nH at Qmax and SRF of 3.6 GHz while planar spiral inductors have maximum Q of 49, Leff of 5.8 nH at Qmax and SRF of 3.0 GHz.