In this study, a well-shaped microelectrode array (MEA) for fabricating a high-density complementary metal-oxide semiconductor amperometric electrochemical sensor array was designed and verified. By integrating an auxiliary electrode with the well-shaped structure of the MEA, the footprint was reduced and high density and high resolution were also achieved. The results of three-dimensional electrochemical simulations confirmed the effectiveness of the proposed MEA structure and possibility of increasing the density to four times than that achieved by the conventional two-dimensional structure.

A novel fabrication approach for electrochemical sensing of nicotinamide adenine dinucleotide (NADH) using neutral red (NR) functinalized carbon nanotube/plasma-polymerized film composite electrode is reported. The configuration of sensing electrode was NR-functionalized CNTs sandwiched between two acetonitrile PPFs on sputtered gold thin film. The NR as an electron transfer mediator shuttles the electron from the CNT to gold electrode. Due to the synergistic effect between NR and CNT, the resulting electrode showed the lower detection potential and the larger sensitivity (current) than that of NR or CNT alone. The sensor revealed a sensitivity of 29 µA mM-1 cm-2 at +0.15 V vs. Ag/AgCl, linear dynamic range of 0.08–4.2 mM, a detection limit of 18 µM at S/N=3, and a response time of 7 s.

Chemical sensors are one of the oldest fields of research closely related to the semiconductor technology. From the Ion-Sensitive Field-Effect Transistors (ISFET) in the 70's, through Micro-Electro-Mechanical-System (MEMS) sensors from the end of the 80's, chemical sensors are combining in the 90's MEMS technology with LSI intelligence to devise more selective, sensitive and autonomous devices to analyse complex mixtures. A brief history of chemical sensors from the ISFET to the nowadays LSI integrated sensors is first detailed. Then the states-of-the-art of LSI integrated chemical sensors and their wide range of applications are discussed. Finally the authors propose a brand-new usage of integrated wireless MEMS sensors for remote surveillance of chemical substances, such as food-industry or pharmaceutical products, that are stored in closed environment like a bottle, for a long period. In such environment, in-situ analyse is necessary, and electrical cables, for energy supply or data transfer, cannot be used. Thanks to integrated MEMS, an autonomous long-term in-situ quality deterioration tracking system is possible.

Chemical sensor which can be used for a multi-purpose chemical measurement to detect various chemical substances with a small number of a sensor array was investigated. It was confirmed that chemical compounds adsorbed strongly and irreversibly on a platinum surface using conventional electrochemical methods and an instrumental surface analysis. The adsorbates were also analyzed by means of an electrochemical impedance spectroscopy under dynamic potential scan; measured impedance reflects CPE (constant phase element) properties of the electrode surface. The method provides a convenient technique for the surface analysis of adsorbing chemicals. The CPE response profile was modified through chemical adsorption/desorption and the interaction between the polarized surface and chemical substances. Consequently, various profiles depending on chemical substances were obtained and it had quantitative and qualitative information about chemicals interacting with the surface. The present method which does not require a specific electrochemical reaction can be applied for multi-purpose chemical sensors and also simple chemical analyses.

A novel chemical sensor for sulfate detection was proposed in this study, utilizing sulfate binding protein (SBP) derived from Escherichia coli as sulfate recognition element. Purified SBP was immobilized on a gold electrode modified with cysteamine and glutaraldehyde. In this study the surface potential change of the SBP modified electrode to sulfate and various ions were investigated. In order to evaluate nonspecific interaction with ionic species, proteins with various isoelectric point were immobilized on the surface of gold electrode and response to ions were measured and compared to sulfate binding protein modified electrode. We made clear that the protein modified electrode shows the potential change to ions and these potential change was effected by the isoelectric point of the protein molecule, and BSA, whose isoelectric point is closest to that of SBP, showed the similar response to ions except sulfate. With use BSA modified electrode as a reference electrode, this sensing system showed selective response to sulfate, probably because of the selective binding sulfate by SBP. This potential change difference between the SBP modified electrode and the BSA modified electrode depended on the concentration of sulfate with in the range of 5 - 150 mM.

Two types of biomimetic chemical sensing systems are reviewed. One is an electronic nose and tongue which can recognize odor or taste from the output pattern of arrayed chemical sensors with different but overlapped specificities. The other is a chemical plume tracing system which has been developed to mimic the moth behavior in tracing the sexual pheromone from a female. We have created an odor/gas tracing robot and a compass, both of which can detect the direction from which an odor/gas is issuing.