A compact optical polarization converter (PC) based on slot waveguide has been proposed in this study. Utilizing the high refractive index contrast between a Si waveguide and SiO2 cladding on the silicon-on-insulator platform, the light beam can be strongly confined in a slot waveguide structure. The proposed PC consists of a square waveguide and an L-shape cover waveguide. Since the overall structure is symmetrically distributed along the axis rotated 45-degree from the horizontal direction, the optical axis of this PC lies in the direction with equi-angle from two orthogonally polarized modes of the input and output ends, which leads to a high polarization conversion efficiency (PCE). 3D FDTD simulation results illustrate that a TE-to-TM mode conversion is achieved with a device length of 8.2 µm, and the PCE exceeds 99.8%. The structural tolerance and wavelength dependence of the PC have also been discussed in detail.

Horizontal slot waveguides enable light to be strongly confined in thin regions. The strong confinement of light in the slot region offers the advantages of enhancing the interaction of light with matter and providing highly sensitive sensing devices. We theoretically investigated fundamental characteristics of horizontal slot waveguides using Nb2O5. The coupling coefficient between SiO2 slot and air slot waveguides was calculated. Characteristics of bending loss in slot waveguide were also analyzed. The etching conditions in reactive ion etching needed to obtain a sidewall with high verticality were studied. We propose a process for fabricating horizontal slot waveguides using Nb2O5 thin film deposition and selective etching of SiO2. Horizontal slot waveguides were fabricated that had an SiO2 slot of less than 30 nm SiO2. The propagated light passing through the slot waveguides was also obtained.