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Ricky W. CHUANG Mao-Teng HSU Shen-Horng CHOU Yao-Jen LEE
Silicon Mach-Zehnder interferometric (MZI) waveguide modulator incorporating the n-channel junction field-effect transistor (JFET) as a signal modulation unit was designed, fabricated, and analyzed. The proposed MZI with JFET was designed to operate based on the plasma dispersion effect in the infrared wavelength of 1550 nm. The three different modulation lengths (ML) of 500, 1000, and 2000 µm while keeping the overall MZI length constant at 1.5 cm were set as a general design rule for these 10 µm-wide MZIs under study. When the JFET was operated in an active mode by injecting approximately 50 mA current (Is) to achieve a π phase shift, the modulation efficiency of the device was measured to be η = π /(Is· L) 40π/A-mm. The temporal and frequency response measurements also demonstrate that the respectively rise and fall times measured using a high-speed photoreceiver were in the neighborhood of 8.5 and 7.5 µsec and the 3 dB roll-off frequency (f3 dB) measured was in the excess of 400 kHz.
Masamichi TANABE Hiromi SHIMAMOTO Takahiro ONAI Katsuyoshi WASHIO
A simplified distribution base resistance model (SDM) is proposed to identify each component of the base resistance and determine the dominant. This model divides the parasitic base resistance into one straight path and two surrounding paths. It is clarified that the link base resistance is dominant in a short emitter and the surrounding polysilicon base electrode resistance is dominant in a long emitter. In the SDM, the distance of the link base is reduced to half; with metal silicide as the extrinsic base electrode, the base resistance will be reduced to 75%.