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Hiroyuki WADA Daesung LEE Stefan ZAPPE Olav SOLGAARD
The relation between resonant frequency of micromirror with vertical combdrives and applied voltage between the upper and lower comb teeth was analyzed. Resonant frequency of the micromirror was controlled by stiffness of the torsion hinge. Resonant frequency of the mirror was proportional to the applied voltage between the upper and lower comb teeth at the same tilt angle.