Analysis of Resonant Frequency of Fast Scanning Micromirror with Vertical Combdrives
Summary :
The relation between resonant frequency of micromirror with vertical combdrives and applied voltage between the upper and lower comb teeth was analyzed. Resonant frequency of the micromirror was controlled by stiffness of the torsion hinge. Resonant frequency of the mirror was proportional to the applied voltage between the upper and lower comb teeth at the same tilt angle.
- Publication
- IEICE TRANSACTIONS on Electronics Vol.E87-C No.11 pp.2006-2008
- Publication Date
- 2004/11/01
- Publicized
- Online ISSN
- DOI
- Type of Manuscript
- LETTER
- Category
- Electromechanical Devices and Components
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Hiroyuki WADA, Daesung LEE, Stefan ZAPPE, Olav SOLGAARD, "Analysis of Resonant Frequency of Fast Scanning Micromirror with Vertical Combdrives" in IEICE TRANSACTIONS on Electronics,
vol. E87-C, no. 11, pp. 2006-2008, November 2004, doi: .
Abstract: The relation between resonant frequency of micromirror with vertical combdrives and applied voltage between the upper and lower comb teeth was analyzed. Resonant frequency of the micromirror was controlled by stiffness of the torsion hinge. Resonant frequency of the mirror was proportional to the applied voltage between the upper and lower comb teeth at the same tilt angle.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e87-c_11_2006/_p
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@ARTICLE{e87-c_11_2006,
author={Hiroyuki WADA, Daesung LEE, Stefan ZAPPE, Olav SOLGAARD, },
journal={IEICE TRANSACTIONS on Electronics},
title={Analysis of Resonant Frequency of Fast Scanning Micromirror with Vertical Combdrives},
year={2004},
volume={E87-C},
number={11},
pages={2006-2008},
abstract={The relation between resonant frequency of micromirror with vertical combdrives and applied voltage between the upper and lower comb teeth was analyzed. Resonant frequency of the micromirror was controlled by stiffness of the torsion hinge. Resonant frequency of the mirror was proportional to the applied voltage between the upper and lower comb teeth at the same tilt angle.},
keywords={},
doi={},
ISSN={},
month={November},}
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TY - JOUR
TI - Analysis of Resonant Frequency of Fast Scanning Micromirror with Vertical Combdrives
T2 - IEICE TRANSACTIONS on Electronics
SP - 2006
EP - 2008
AU - Hiroyuki WADA
AU - Daesung LEE
AU - Stefan ZAPPE
AU - Olav SOLGAARD
PY - 2004
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E87-C
IS - 11
JA - IEICE TRANSACTIONS on Electronics
Y1 - November 2004
AB - The relation between resonant frequency of micromirror with vertical combdrives and applied voltage between the upper and lower comb teeth was analyzed. Resonant frequency of the micromirror was controlled by stiffness of the torsion hinge. Resonant frequency of the mirror was proportional to the applied voltage between the upper and lower comb teeth at the same tilt angle.
ER -
English
