The relation between resonant frequency of micromirror with vertical combdrives and applied voltage between the upper and lower comb teeth was analyzed. Resonant frequency of the micromirror was controlled by stiffness of the torsion hinge. Resonant frequency of the mirror was proportional to the applied voltage between the upper and lower comb teeth at the same tilt angle.

The lithography process on the deep trench pattern above the large cavity is proposed to fabricate the MEMS structure. Generally, bubbles generated on the trench patterns when it was baked after coating resist. The probability of the generation of bubbles was reduced by decreasing the backing rate. The fast scanning micromirror with 50.8 kHz resonant frequency was fabricated by controlling the backing rate.

Multi-projector technology has been under consideration in recent years. This technology allows the generation of wide field of view and high-resolution images in a cost-effective manner. It is expected to be applied extensively to training simulators where vivid immersive sensations and precision are required. However, in many systems the viewing frustums cannot be automatically assigned for distributed rendering, and the required manual setup is complicated and difficult. This is because the camera should be coincide exactly with a desired eye point to avoid perspective distortions. For the actual applications, the camera is seldom able to be set up at the desired eye point because of physical constraints, e.g., a narrow cockpit with many instruments. To resolve this issue, we have developed a "virtual camera method" that yields high-precision calibration regardless of the camera position. This method takes advantage of the quadratic nature of the display surface. We developed a practical real-time multi-projector display system for applications such as training simulators, that require high-accuracy in geometry and rapid response time.

The reliability of a 266 nm cw (continuous-wave) solid-state laser under the influence of purge gas was considered. Scatterers on a mirror during long-term operation were ammonium sulfate (NH4SO4). The synthesis of ammonium sulfate was related to the amount of water in the purge gas. UV power decreased by scatterers when the purge was not conducted.

Copper sulfide nanoparticles were successfully prepared by laser ablation in liquid. CuS powders in deionized water were irradiated with nanosecond-pulsed laser (Nd:YAG, SHG) to prepare nanoparticles. Prepared nanoparticles were investigated by scanning electron microscopy (SEM), dynamic light scattering (DLS) and fluorospectrometer. According to the results of SEM and DLS, the primary and secondary particle size was decreased with the increase in laser fluence of laser ablation in liquid. The ratio of Cu and S of prepared nanoparticles were not changed. The absorbance of prepared copper sulfide nanoparticles in water was increased with the increase in laser fluence.