Numerical Techniques on Enhancing Robustness for Stress-Dependent Oxidation Simulation Using Finite Element Method in SUPREM-IV
Summary :
In this paper, a three part algorithm is employed to obtain stable convergence during stress dependent oxidation simulation using the finite element method is presented. By introducing (1) a reduced integration formulation, (2) an averaging procedure for the mid-side node velocities at the Si/SiO2 interface, and (3) a three-node element to discretize the oxidant diffusion equation, major improvements in achieving stable convergence are realized during stress dependent oxidation simulation. This technique is generally applicable for an oxidation simulator using the finite element method.
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- IEICE TRANSACTIONS on Electronics Vol.E75-C No.2 pp.150-155
- Publication Date
- 1992/02/25
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- Online ISSN
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- Type of Manuscript
- Special Section PAPER (Special Issue on Selected Papers from '91 VPAD)
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Yoshinori ODA, Kaung-Shia YU, Thye-Lai TUNG, Arthur RAEFSKY, Donald L. SCHARFETTER, Robert W. DUTTON, "Numerical Techniques on Enhancing Robustness for Stress-Dependent Oxidation Simulation Using Finite Element Method in SUPREM-IV" in IEICE TRANSACTIONS on Electronics,
vol. E75-C, no. 2, pp. 150-155, February 1992, doi: .
Abstract: In this paper, a three part algorithm is employed to obtain stable convergence during stress dependent oxidation simulation using the finite element method is presented. By introducing (1) a reduced integration formulation, (2) an averaging procedure for the mid-side node velocities at the Si/SiO2 interface, and (3) a three-node element to discretize the oxidant diffusion equation, major improvements in achieving stable convergence are realized during stress dependent oxidation simulation. This technique is generally applicable for an oxidation simulator using the finite element method.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e75-c_2_150/_p
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@ARTICLE{e75-c_2_150,
author={Yoshinori ODA, Kaung-Shia YU, Thye-Lai TUNG, Arthur RAEFSKY, Donald L. SCHARFETTER, Robert W. DUTTON, },
journal={IEICE TRANSACTIONS on Electronics},
title={Numerical Techniques on Enhancing Robustness for Stress-Dependent Oxidation Simulation Using Finite Element Method in SUPREM-IV},
year={1992},
volume={E75-C},
number={2},
pages={150-155},
abstract={In this paper, a three part algorithm is employed to obtain stable convergence during stress dependent oxidation simulation using the finite element method is presented. By introducing (1) a reduced integration formulation, (2) an averaging procedure for the mid-side node velocities at the Si/SiO2 interface, and (3) a three-node element to discretize the oxidant diffusion equation, major improvements in achieving stable convergence are realized during stress dependent oxidation simulation. This technique is generally applicable for an oxidation simulator using the finite element method.},
keywords={},
doi={},
ISSN={},
month={February},}
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TY - JOUR
TI - Numerical Techniques on Enhancing Robustness for Stress-Dependent Oxidation Simulation Using Finite Element Method in SUPREM-IV
T2 - IEICE TRANSACTIONS on Electronics
SP - 150
EP - 155
AU - Yoshinori ODA
AU - Kaung-Shia YU
AU - Thye-Lai TUNG
AU - Arthur RAEFSKY
AU - Donald L. SCHARFETTER
AU - Robert W. DUTTON
PY - 1992
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E75-C
IS - 2
JA - IEICE TRANSACTIONS on Electronics
Y1 - February 1992
AB - In this paper, a three part algorithm is employed to obtain stable convergence during stress dependent oxidation simulation using the finite element method is presented. By introducing (1) a reduced integration formulation, (2) an averaging procedure for the mid-side node velocities at the Si/SiO2 interface, and (3) a three-node element to discretize the oxidant diffusion equation, major improvements in achieving stable convergence are realized during stress dependent oxidation simulation. This technique is generally applicable for an oxidation simulator using the finite element method.
ER -
English
