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Statistical Memory Yield Analysis and Redundancy Design Considering Fabrication Line Improvement

Ken-ichi IMAMIYA, Jun-ichi MIYAMOTO, Nobuaki OHTSUKA, Naoto TOMITA, Yumiko IYAMA

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Summary :

The method to optimize redundancy scheme for memory devices is proposed. Yield for new generation memories is predicted by failure mode analysis of previous generation memories. Fabrication line improvement and chip area penalty by the redundancy are taken into account for this yield prediction. The actual data of 16 Mbit EPROM failure analysis indicate the effectiveness of the prediction.

Publication
IEICE TRANSACTIONS on Electronics Vol.E76-C No.11 pp.1626-1631
Publication Date
1993/11/25
Publicized
Online ISSN
DOI
Type of Manuscript
Special Section PAPER (Special Issue on LSI Memories)
Category
Non-volatile Memory

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