Application of Technology CAD in Process Development for High Performance Logic and System-on-Chip in IC Foundry

Boon-Khim LIEW; Chih-Chiang WANG; Carlos H. DIAZ; Shien-Yang WU; Jack Yuan-Chen SUN; Yai-Fen LIN; Di-Son KUO; Hua-Tai LIN; Anthony YEN

Application of Technology CAD in Process Development for High Performance Logic and System-on-Chip in IC Foundry

Boon-Khim LIEW, Chih-Chiang WANG, Carlos H. DIAZ, Shien-Yang WU, Jack Yuan-Chen SUN, Yai-Fen LIN, Di-Son KUO, Hua-Tai LIN, Anthony YEN

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The application of Technology CAD simulations for development of IC processes in foundry is presented. Examples include device design, Flash cell design and optical proximity correction for SRAM cell. The challenges of using TCAD tools in the IC foundry is also discussed.

Publication: IEICE TRANSACTIONS on Electronics Vol.E83-C No.8 pp.1275-1280

Publication Date: 2000/08/25

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Type of Manuscript: Special Section INVITED PAPER (Special Issue on 1999 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD'99))

Category: Simulation Methodology and Environment

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Boon-Khim LIEW, Chih-Chiang WANG, Carlos H. DIAZ, Shien-Yang WU, Jack Yuan-Chen SUN, Yai-Fen LIN, Di-Son KUO, Hua-Tai LIN, Anthony YEN, "Application of Technology CAD in Process Development for High Performance Logic and System-on-Chip in IC Foundry" in IEICE TRANSACTIONS on Electronics, vol. E83-C, no. 8, pp. 1275-1280, August 2000, doi: .
Abstract: The application of Technology CAD simulations for development of IC processes in foundry is presented. Examples include device design, Flash cell design and optical proximity correction for SRAM cell. The challenges of using TCAD tools in the IC foundry is also discussed.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e83-c_8_1275/_p

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@ARTICLE{e83-c_8_1275,
author={Boon-Khim LIEW, Chih-Chiang WANG, Carlos H. DIAZ, Shien-Yang WU, Jack Yuan-Chen SUN, Yai-Fen LIN, Di-Son KUO, Hua-Tai LIN, Anthony YEN, },
journal={IEICE TRANSACTIONS on Electronics},
title={Application of Technology CAD in Process Development for High Performance Logic and System-on-Chip in IC Foundry},
year={2000},
volume={E83-C},
number={8},
pages={1275-1280},
abstract={The application of Technology CAD simulations for development of IC processes in foundry is presented. Examples include device design, Flash cell design and optical proximity correction for SRAM cell. The challenges of using TCAD tools in the IC foundry is also discussed.},
keywords={},
doi={},
ISSN={},
month={August},}

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TY - JOUR
TI - Application of Technology CAD in Process Development for High Performance Logic and System-on-Chip in IC Foundry
T2 - IEICE TRANSACTIONS on Electronics
SP - 1275
EP - 1280
AU - Boon-Khim LIEW
AU - Chih-Chiang WANG
AU - Carlos H. DIAZ
AU - Shien-Yang WU
AU - Jack Yuan-Chen SUN
AU - Yai-Fen LIN
AU - Di-Son KUO
AU - Hua-Tai LIN
AU - Anthony YEN
PY - 2000
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E83-C
IS - 8
JA - IEICE TRANSACTIONS on Electronics
Y1 - August 2000
AB - The application of Technology CAD simulations for development of IC processes in foundry is presented. Examples include device design, Flash cell design and optical proximity correction for SRAM cell. The challenges of using TCAD tools in the IC foundry is also discussed.
ER -