Sputtering Conditions and Properties of In-Plane-Aligned Y-Ba-Cu-O Films for Devices Application

Lan ZHANG, Masataka MORIYA, Tadayuki KOBAYASHI, Masashi MUKAIDA, Toshinari GOTO

Summary :

In-plane-aligned a-axis-oriented YBa₂Cu₃O_7-δ (YBCO) thin films are attractive for the formation of planar intrinsic Josephson devices. In this study, these films were deposited by dc sputtering on LaSrGaO₄ (LSGO) (100) substrates and the dependence of the characteristics on the deposition conditions was investigated. In-plane-aligned a-axis-oriented YBCO thin films were successfully grown in the substrate temperature range of 555-615. With the temperature gradient method, it was seen that the critical temperature of the film increased to 81 K. The current-voltage characteristic along the c-axis exhibited clear multibranch structures. These results indicate that ion-cleaning of the substrate surface broadens the growth temperature range of these films and planar intrinsic Josephson devices can be fabricated from these films.

• Publication: IEICE TRANSACTIONS on Electronics Vol.E87-C No.2 pp.202-205
• Publication Date: 2004/02/01
• Type of Manuscript: Special Section PAPER (Special Section on Recent Progress in Oxide Thin Films by Sputtering)

Authors

Lan ZHANG
Masataka MORIYA
Tadayuki KOBAYASHI
Masashi MUKAIDA
Toshinari GOTO

Keyword

YBCO films,  LSGO substrates,  in-plane alignment,  intrinsic Josephson junctions