Theoretical and Experimental Analysis of the Spurious Modes and Quality Factors for Dual-Mode AlN Lamb-Wave Resonators

Haiyan SUN; Xingyu WANG; Zheng ZHU; Jicong ZHAO

doi:10.1587/transele.2022ECP5019

IEICE TRANSACTIONS on Electronics

Theoretical and Experimental Analysis of the Spurious Modes and Quality Factors for Dual-Mode AlN Lamb-Wave Resonators

Haiyan SUN, Xingyu WANG, Zheng ZHU, Jicong ZHAO

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In this paper, the spurious modes and quality-factor (Q) values of the one-port dual-mode AlN lamb-wave resonators at 500-1000 MHz were studied by theoretical analysis and experimental verification. Through finite element analysis, we found that optimizing the width of the lateral reflection boundary at both ends of the resonator to reach the quarter wavelength (λ/4), which can improve its spectral purity and shift its resonant frequency. The designed resonators were micro-fabricated by using lithography processes on a 6-inch wafer. The measured results show that the spurious mode can be converted and dissipated, splitting into several longitudinal modes by optimizing the width of the lateral reflection boundary, which are consistent well with the theoretical analysis. Similarly, optimizing the interdigital transducer (IDT) width and number of IDT fingers can also suppress the resonator's spurious modes. In addition, it is found that there is no significant difference in the Q_s value for the two modes of the dual-mode resonator with the narrow anchor and full anchor. The acoustic wave leaked from the anchor into the substrate produces a small displacement, and the energy is limited in the resonator. Compared to the resonator with Au IDTs, the resonator with Al IDTs can achieve a higher Q value due to its lower thermo-elastic damping loss. The measured results show the optimized dual-mode lamb-wave resonator can obtain Q_s value of 2946.3 and 2881.4 at 730.6 MHz and 859.5 MHz, Q_p values of 632.5 and 1407.6, effective electromechanical coupling coefficient (k²_eff) of 0.73% and 0.11% respectively, and has excellent spectral purity simultaneously.

Publication: IEICE TRANSACTIONS on Electronics Vol.E106-C No.3 pp.76-83

Publication Date: 2023/03/01

Publicized: 2022/08/10

Online ISSN: 1745-1353

DOI: 10.1587/transele.2022ECP5019

Type of Manuscript: PAPER

Category: Ultrasonic Electronics

Authors

Haiyan SUN
  Nantong University,State Key Laboratories of Transducer Technology
Xingyu WANG
  Nantong University
Zheng ZHU
  Nantong University
Jicong ZHAO
  Nantong University,State Key Laboratories of Transducer Technology

Keyword

AlN lamb wave resonators, dual-mode, reflection boundary, spurious modes, quality factor

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Haiyan SUN, Xingyu WANG, Zheng ZHU, Jicong ZHAO, "Theoretical and Experimental Analysis of the Spurious Modes and Quality Factors for Dual-Mode AlN Lamb-Wave Resonators" in IEICE TRANSACTIONS on Electronics, vol. E106-C, no. 3, pp. 76-83, March 2023, doi: 10.1587/transele.2022ECP5019.
Abstract: In this paper, the spurious modes and quality-factor (Q) values of the one-port dual-mode AlN lamb-wave resonators at 500-1000 MHz were studied by theoretical analysis and experimental verification. Through finite element analysis, we found that optimizing the width of the lateral reflection boundary at both ends of the resonator to reach the quarter wavelength (λ/4), which can improve its spectral purity and shift its resonant frequency. The designed resonators were micro-fabricated by using lithography processes on a 6-inch wafer. The measured results show that the spurious mode can be converted and dissipated, splitting into several longitudinal modes by optimizing the width of the lateral reflection boundary, which are consistent well with the theoretical analysis. Similarly, optimizing the interdigital transducer (IDT) width and number of IDT fingers can also suppress the resonator's spurious modes. In addition, it is found that there is no significant difference in the Q_s value for the two modes of the dual-mode resonator with the narrow anchor and full anchor. The acoustic wave leaked from the anchor into the substrate produces a small displacement, and the energy is limited in the resonator. Compared to the resonator with Au IDTs, the resonator with Al IDTs can achieve a higher Q value due to its lower thermo-elastic damping loss. The measured results show the optimized dual-mode lamb-wave resonator can obtain Q_s value of 2946.3 and 2881.4 at 730.6 MHz and 859.5 MHz, Q_p values of 632.5 and 1407.6, effective electromechanical coupling coefficient (k²_eff) of 0.73% and 0.11% respectively, and has excellent spectral purity simultaneously.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/transele.2022ECP5019/_p

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@ARTICLE{e106-c_3_76,
author={Haiyan SUN, Xingyu WANG, Zheng ZHU, Jicong ZHAO, },
journal={IEICE TRANSACTIONS on Electronics},
title={Theoretical and Experimental Analysis of the Spurious Modes and Quality Factors for Dual-Mode AlN Lamb-Wave Resonators},
year={2023},
volume={E106-C},
number={3},
pages={76-83},
abstract={In this paper, the spurious modes and quality-factor (Q) values of the one-port dual-mode AlN lamb-wave resonators at 500-1000 MHz were studied by theoretical analysis and experimental verification. Through finite element analysis, we found that optimizing the width of the lateral reflection boundary at both ends of the resonator to reach the quarter wavelength (λ/4), which can improve its spectral purity and shift its resonant frequency. The designed resonators were micro-fabricated by using lithography processes on a 6-inch wafer. The measured results show that the spurious mode can be converted and dissipated, splitting into several longitudinal modes by optimizing the width of the lateral reflection boundary, which are consistent well with the theoretical analysis. Similarly, optimizing the interdigital transducer (IDT) width and number of IDT fingers can also suppress the resonator's spurious modes. In addition, it is found that there is no significant difference in the Q_s value for the two modes of the dual-mode resonator with the narrow anchor and full anchor. The acoustic wave leaked from the anchor into the substrate produces a small displacement, and the energy is limited in the resonator. Compared to the resonator with Au IDTs, the resonator with Al IDTs can achieve a higher Q value due to its lower thermo-elastic damping loss. The measured results show the optimized dual-mode lamb-wave resonator can obtain Q_s value of 2946.3 and 2881.4 at 730.6 MHz and 859.5 MHz, Q_p values of 632.5 and 1407.6, effective electromechanical coupling coefficient (k²_eff) of 0.73% and 0.11% respectively, and has excellent spectral purity simultaneously.},
keywords={},
doi={10.1587/transele.2022ECP5019},
ISSN={1745-1353},
month={March},}

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TY - JOUR
TI - Theoretical and Experimental Analysis of the Spurious Modes and Quality Factors for Dual-Mode AlN Lamb-Wave Resonators
T2 - IEICE TRANSACTIONS on Electronics
SP - 76
EP - 83
AU - Haiyan SUN
AU - Xingyu WANG
AU - Zheng ZHU
AU - Jicong ZHAO
PY - 2023
DO - 10.1587/transele.2022ECP5019
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E106-C
IS - 3
JA - IEICE TRANSACTIONS on Electronics
Y1 - March 2023
AB - In this paper, the spurious modes and quality-factor (Q) values of the one-port dual-mode AlN lamb-wave resonators at 500-1000 MHz were studied by theoretical analysis and experimental verification. Through finite element analysis, we found that optimizing the width of the lateral reflection boundary at both ends of the resonator to reach the quarter wavelength (λ/4), which can improve its spectral purity and shift its resonant frequency. The designed resonators were micro-fabricated by using lithography processes on a 6-inch wafer. The measured results show that the spurious mode can be converted and dissipated, splitting into several longitudinal modes by optimizing the width of the lateral reflection boundary, which are consistent well with the theoretical analysis. Similarly, optimizing the interdigital transducer (IDT) width and number of IDT fingers can also suppress the resonator's spurious modes. In addition, it is found that there is no significant difference in the Q_s value for the two modes of the dual-mode resonator with the narrow anchor and full anchor. The acoustic wave leaked from the anchor into the substrate produces a small displacement, and the energy is limited in the resonator. Compared to the resonator with Au IDTs, the resonator with Al IDTs can achieve a higher Q value due to its lower thermo-elastic damping loss. The measured results show the optimized dual-mode lamb-wave resonator can obtain Q_s value of 2946.3 and 2881.4 at 730.6 MHz and 859.5 MHz, Q_p values of 632.5 and 1407.6, effective electromechanical coupling coefficient (k²_eff) of 0.73% and 0.11% respectively, and has excellent spectral purity simultaneously.
ER -

IEICE TRANSACTIONS on Electronics