IEICE TRANSACTIONS on Electronics
Resonant Power Supply Noise Reduction by STO Capacitors Fabricated on Interposer
Summary :
This paper demonstrates the resonant power supply noise reduction effects of STO thin film decoupling capacitors, which are embedded in interposers. The on-interposer STO capacitor consists of SrTiO2 whose dielectric constant is about 20 and is sandwitched by Cu films in an interposer. The on-interposer STO capacitors are directly connected to the LSI PADs so that they provide large decoupling capacitance without package leadframe/bonding wire inductance, resulting in the reduction of the resonant power supply noise. The measured power supply waveforms show significant reduction of the power supply noise, and the Shmoo plots also show the contribution of the STO capacitors to the robust operations of LSIs.
- Publication
- IEICE TRANSACTIONS on Electronics Vol.E98-C No.7 pp.734-740
- Publication Date
- 2015/07/01
- Publicized
- Online ISSN
- 1745-1353
- DOI
- 10.1587/transele.E98.C.734
- Type of Manuscript
- PAPER
- Category
- Electronic Circuits
Authors
Toru NAKURA
The University of Tokyo
Masahiro KANO
The University of Tokyo
Masamitsu YOSHIZAWA
Noda Screen Co. Ltd.
Atsunori HATTORI
Noda Screen Co. Ltd.
Kunihiro ASADA
The University of Tokyo
Keyword
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Toru NAKURA, Masahiro KANO, Masamitsu YOSHIZAWA, Atsunori HATTORI, Kunihiro ASADA, "Resonant Power Supply Noise Reduction by STO Capacitors Fabricated on Interposer" in IEICE TRANSACTIONS on Electronics,
vol. E98-C, no. 7, pp. 734-740, July 2015, doi: 10.1587/transele.E98.C.734.
Abstract: This paper demonstrates the resonant power supply noise reduction effects of STO thin film decoupling capacitors, which are embedded in interposers. The on-interposer STO capacitor consists of SrTiO2 whose dielectric constant is about 20 and is sandwitched by Cu films in an interposer. The on-interposer STO capacitors are directly connected to the LSI PADs so that they provide large decoupling capacitance without package leadframe/bonding wire inductance, resulting in the reduction of the resonant power supply noise. The measured power supply waveforms show significant reduction of the power supply noise, and the Shmoo plots also show the contribution of the STO capacitors to the robust operations of LSIs.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/transele.E98.C.734/_p
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@ARTICLE{e98-c_7_734,
author={Toru NAKURA, Masahiro KANO, Masamitsu YOSHIZAWA, Atsunori HATTORI, Kunihiro ASADA, },
journal={IEICE TRANSACTIONS on Electronics},
title={Resonant Power Supply Noise Reduction by STO Capacitors Fabricated on Interposer},
year={2015},
volume={E98-C},
number={7},
pages={734-740},
abstract={This paper demonstrates the resonant power supply noise reduction effects of STO thin film decoupling capacitors, which are embedded in interposers. The on-interposer STO capacitor consists of SrTiO2 whose dielectric constant is about 20 and is sandwitched by Cu films in an interposer. The on-interposer STO capacitors are directly connected to the LSI PADs so that they provide large decoupling capacitance without package leadframe/bonding wire inductance, resulting in the reduction of the resonant power supply noise. The measured power supply waveforms show significant reduction of the power supply noise, and the Shmoo plots also show the contribution of the STO capacitors to the robust operations of LSIs.},
keywords={},
doi={10.1587/transele.E98.C.734},
ISSN={1745-1353},
month={July},}
Copy
TY - JOUR
TI - Resonant Power Supply Noise Reduction by STO Capacitors Fabricated on Interposer
T2 - IEICE TRANSACTIONS on Electronics
SP - 734
EP - 740
AU - Toru NAKURA
AU - Masahiro KANO
AU - Masamitsu YOSHIZAWA
AU - Atsunori HATTORI
AU - Kunihiro ASADA
PY - 2015
DO - 10.1587/transele.E98.C.734
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E98-C
IS - 7
JA - IEICE TRANSACTIONS on Electronics
Y1 - July 2015
AB - This paper demonstrates the resonant power supply noise reduction effects of STO thin film decoupling capacitors, which are embedded in interposers. The on-interposer STO capacitor consists of SrTiO2 whose dielectric constant is about 20 and is sandwitched by Cu films in an interposer. The on-interposer STO capacitors are directly connected to the LSI PADs so that they provide large decoupling capacitance without package leadframe/bonding wire inductance, resulting in the reduction of the resonant power supply noise. The measured power supply waveforms show significant reduction of the power supply noise, and the Shmoo plots also show the contribution of the STO capacitors to the robust operations of LSIs.
ER -
English
