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IEICE TRANSACTIONS on transactions

Three-Dimensional Simulation of Hot Carrier Effects in Submicron MOSFETs

Naoyuki SHIGYO, Shinji ONGA, Makoto YOSHIMI, Kenji TANIGUCHI

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Summary :

Hot carrier effects in narrow-channel MOSETs are investigated. With decreasing channel width below 1µm, the ratio of substrate to channel currents show marked increase. By using the newly developed full three-dimensional process/device simulation system, two significant causes of the hot carrier effects are clarified.

Publication
IEICE TRANSACTIONS on transactions Vol.E69-E No.4 pp.248-250
Publication Date
1986/04/25
Publicized
Online ISSN
DOI
Type of Manuscript
Special Section LETTER (Special Issue: Papers from 1986 National Convention IECE Japan)
Category
Silicon Devices and Integrated Circuits

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