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Thermodynamical Calculation of Transport Rate of GaSb in a Closed Tube Vapor Phase Growth System

Noboru KITAMURA, Takao WADA

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Summary :

Transport rate of GaSb in a closed tube vapor phase growth system with iodine as a transport agent was calculated thermodynamically. The calculated maximum transport rate was obtained at iodine density of 0.01-0.02 mg/cm3 in the growth temperature range of 550-600. The calculation was compared with the experimental result of GaSb. The calculated iodine density at which the maximum transport rate was obtained showed a good agreement with the experiment.

Publication
IEICE TRANSACTIONS on transactions Vol.E73-E No.8 pp.1335-1337
Publication Date
1990/08/25
Publicized
Online ISSN
DOI
Type of Manuscript
LETTER
Category
Semiconductor Materials and Devices

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