An ultra low noise 50-GHz-Band amplifier (LNA) MMIC has been developed using an AlGaAs/InGaAs pseudomorphic HEMT. A noise figure of 1.8 dB with an associated gain of 8.1 dB is achieved at 50 GHz. The noise figure is less than 2.0 dB from 50 GHz to 52.5 GHz. This is the state-of-the-art noise figure for low noise amplifiers around 50 GHz. The success of this LNA development came from the excellent HEMT and MMIC technologies and the accurate modeling of active and passive elements. Good agreement between measured and simulated data over the band from 40 GHz to 60 GHz is obtained.

Focused Ion Beam (FIB) trimming techniques for circuit optimization for GaAs MMICs by adjusting the parameters of IC components such as resistors, capacitors, microstrip lines, and FETs have been developed. The adjustment is performed by etching of the components and depositing of metal films for micro-strip lines. This technology turned out to be in need of only half a day to optimize the circuit pattern without any further wafer processes, while a conventional method that is comprised of revising mask pattern and following several cycles of wafer process has needed 0.5-1.0 year requiring huge amount of development cost. This technology has been successfully applied to optimization of an X-band low dissipation current single stage MMIC amplifier, and has shown its great feasibility for shortening the turn around time.

A Q-band high gain and low noise Variable Gain Amplifier (VGA) module using dual gate AlGaAs/InGaAs pseudomorphic HEMTs has been developed. The dual gate HEMT can be fabricated by the same process of the single gate HEMT which has the gate length of 0.15 µm. The Q-band VGA module consists of a 1-stage low noise amplifier (LNA) MMIC using a single gate HEMT and a 2-stage VGA MMIC using dual gate HEMTs. During the design, an accurate noise modeling is introduced to achieve low noise performance. A fully passivated film is employed to achieve reliability. The VGA module has a gain of more than 20 dB from 41 GHz to 52 GHz and a maximum gain of 24.5 dB at 50 GHz. A gain control range of more than 30 dB is achieved in the same frequency range. A phase deviation is less than 10 degrees in 10 dB gain control range. A minimum noise figure of 1.8 dB with an associated gain of 22 dB is achieved at 43 GHz and the noise figure is less than 2.5 dB with associated gain of more than 20 dB from 41 GHz to 46 GHz when biased for low noise figure. This performance is comparable with the best data ever reported for LNAs at Q-band including both GaAs based HEMTs and InP based HEMTs.