1-1hit |
Yasue YAMAMOTO Takeshi HIDAKA Hiroki NAKAMURA Hiroshi SAKURABA Fujio MASUOKA
This paper shows that the Surrounding Gate Transistor (SGT) can be scaled down to decananometer gate lengths by using an intrinsically-doped body and gate work function engineering. Strong gate controllability is an essential characteristics of the SGT. However, by using an intrinsically-doped body, the SGT can realize a higher carrier mobility and stronger gate controllability of the silicon body. Then, in order to adjust the threshold voltage, it is necessary to adopt gate work function engineering in which a metal or metal silicide gate is used. Using a three-dimensional (3D) device simulator, we analyze the short-channel effects and current characteristics of the SGT. We compare the device characteristics of the SGT to those of the Tri-gate transistor and Double-Gate (DG) MOSFET. When the silicon pillar diameter (or silicon body thickness) is 10 nm, the gate length is 20 nm, and the oxide thickness is 1 nm, the SGT shows a subthreshold swing of 63 mV/dec and a DIBL of -17 mV, whereas the Tri-gate transistor and the DG MOSFET show a subthreshold swing of 71 mV/dec and 77 mV/dec, respectively, and a DIBL of -47 mV and -75 mV, respectively. By adjusting the value of the gate work function, we define the off current at VG = 0 V and VD = 1 V. When the off current is set at 1 pA/µm, the SGT can realize a high on current of 1020 µA/µm at VG = 1 V and VD = 1 V. Moreover, the on current of the SGT is 21% larger than that of the Tri-gate transistor and 52% larger than that of the DG MOSFET. Therefore, the SGT can be scaled reliably toward the decananometer gate length for high-speed and low-power ULSI.