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[Keyword] electron spectroscopy(7hit)

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  • X-Ray Photoemission Study of SiO2/Si/Si0.55Ge0.45/Si Heterostructures

    Akio OHTA  Katsunori MAKIHARA  Seiichi MIYAZAKI  Masao SAKURABA  Junichi MUROTA  

     
    PAPER

      Vol:
    E96-C No:5
      Page(s):
    680-685

    An SiO2/Si-cap/Si0.55Ge0.45 heterostructure was fabricated on p-type Si(100) and strained silicon on insulator (SOI) substrates by low pressure chemical vapor deposition (LPCVD) and subsequent thermal oxidation in an O2 + H2 gas mixture. Chemical bonding features and valence band offsets in the heterostructures were evaluated by using high-resolution x-ray photoelectron spectroscopy (XPS) measurements and thinning the stack layers with a wet chemical solution.

  • Control of Interfacial Reaction of HfO2/Ge Structure by Insertion of Ta Oxide Layer

    Kuniaki HASHIMOTO  Akio OHTA  Hideki MURAKAMI  Seiichiro HIGASHI  Seiichi MIYAZAKI  

     
    PAPER

      Vol:
    E96-C No:5
      Page(s):
    674-679

    As means to control interface reactions between HfO2 and Ge(100), chemical vapor deposition (CVD) of ultrathin Ta-rich oxide using Tri (tert-butoxy) (tert-butylimido) tantalum (Ta-TTT) on chemically-cleaned Ge(100) has been conducted prior to atomic-layer controlled CVD of HfO2 using tetrakis (ethylmethylamino) hafnium (TEMA-Hf) and O3. The XPS analysis of chemical bonding features of the samples after the post deposition N2 annealing at 300 confirms the formation of TaGexOy and the suppression of the interfacial GeO2 layer growth. The energy band structure of HfO2/TaGexOy/Ge was determined by the combination of the energy bandgaps of HfO2 and TaGexOy measured from energy loss signals of O 1s photoelectrons and from optical absorption spectra and the valence band offsets at each interface measured from valence band spectra. From the capacitance-voltage (C-V) curves of Pt-gate MIS capacitors with different HfO2 thicknesses, the thickness reduction of TaGexOy with a relative dielectric constant of 9 is a key to obtain an equivalent SiO2 thickness (EOT) below 0.7 nm.

  • Characterization of Resistive Switching of Pt/Si-Rich Oxide/TiN System

    Motoki FUKUSIMA  Akio OHTA  Katsunori MAKIHARA  Seiichi MIYAZAKI  

     
    PAPER

      Vol:
    E96-C No:5
      Page(s):
    708-713

    We have fabricated Pt/Si-rich oxide (SiOx)/TiN stacked MIM diodes and studied an impact of the structural asymmetry on their resistive switching characteristics. XPS analyses show that a TiON interfacial layer was formed during the SiOx deposition on TiN by RF-sputtering in an Ar + O2 gas mixture. After the fabrication of Pt top electrodes on the SiOx layer, and followed by an electro-forming process, distinct bi-polar type resistive switching was confirmed. For the resistive switching from high to low resistance states so called SET process, there is no need to set the current compliance. Considering higher dielectric constant of TiON than SiOx, the interfacial TiON layer can contribute to regulate the current flow through the diode. The clockwise resistive switching, in which the reduction and oxidation (Red-Ox) reactions can occur near the TiN bottom electrode, shows lower RESET voltages and better switching endurance than the counter-clockwise switching where the Red-Ox reaction can take place near the top Pt electrode. The result implies a good repeatable nature of Red-Ox reactions at the interface between SiOx and TiON/TiN in consideration of relatively high diffusibility of oxygen atoms through Pt.

  • In-situ Measurement of Photoelectron Spectroscopy in Air of Polypyrrole during Electrochemical Undoping

    Kazuya TADA  Yoshinori MIYOSHI  Mitsuyoshi ONODA  

     
    LETTER-Materials & Devices

      Vol:
    E91-C No:12
      Page(s):
    1885-1886

    In-situ measurement of photoelectron spectra of polypyrrole during electrochemical undoping/doping cycles has been carried out by using an open-type electrochemical cell. It has been observed that the ionization potential decreases with decreased electrochemical potential. This result seems to be reasonable because the decreased electrochemical potential corresponds to the undoping or recovery of electrons into vacant state of valence band.

  • Quantitative Characterization of Surface Amino Groups of Plasma-Polymerized Films Prepared from Nitrogen-Containing Monomers for Bioelectronic Applications

    Hitoshi MUGURUMA  

     
    PAPER-Organic Molecular Electronics

      Vol:
    E91-C No:6
      Page(s):
    963-967

    The surface amino groups of plasma-polymerized films prepared from various nitrogen-containing monomers were quantitatively characterized for bioelectronic and biomedical applications. X-ray photoelectron spectroscopy (XPS) measurements were conducted on two kinds of surfaces: pristine surfaces of plasma-polymerized film prepared using various nitrogen-containing monomers, and theirs surfaces whose amino groups had been derivatized by a primary-amine-selective reagent carrying an XPS label. The XPS data showed that the maximum surface density of amino groups for this film was 8.41013 cm-2. Amino groups constituted 14-64% of all surface nitrogen atoms (NH/N), depending on the monomer used.

  • Prospects of Electron Spectroscopy of Working Organic Electronic Device Structures

    Toshihiro SHIMADA  Atsushi KOMA  

     
    LETTER-Fabrication and Characterization of Thin Films

      Vol:
    E85-C No:6
      Page(s):
    1330-1331

    The prospects of electron spectroscopy of working organic electronic device structures are discussed. The experimental consideration and the result of actual measurement are presented.

  • Increase in Contact Resistance of Hard Gold Plating during Thermal Aging -- Nickel-Hardened Gold and Cobalt-Hardened Gold --

    Hisao KUMAKURA  Makoto SEKIGUCHI  

     
    PAPER

      Vol:
    E82-C No:1
      Page(s):
    13-18

    Contact resistance of nickel hardened gold electroplate (NiHG) deposited on nickel-underplated phosphor bronze disk coupons (substrate) after thermal aging was measured with a hard gold-plated beryllium copper alloy pin probe by means of a four-point probe technique, compared to that of cobalt-hardened gold electroplate (CoHG). Surface of NiHG plated coupons after aging was analyzed by X-ray photoelectron spectroscopy (XPS) to investigate the influence of the oxide film formation during thermal aging on contact resistance of NiHG electroplate, compared to that of CoHG. Initial contact resistance of the NiHG coupons was less than 10 mΩ at a contact forces more than 0.05 N, increased to 10 mΩ at a contact force of 0.05 N after 100 hours aging at 200. In contrast, contact resistance of the CoHG coupons progressively increased with increase in aging time, reached 1000 mΩ even at a contact force of 0.05 N after 52 hours aging. XPS analysis for the NiHG coupons demonstrated that nickel oxide film was formed on the NiHG surface in conformity with parabolic growth kinetics, as cobalt oxide film formed on CoHG surface. However, a thickness of the latter film was approximately 4-fold larger than that of former after 100 hours aging at 200. The small increase in contact resistance of NiHG coupons after aging suggested to be due to inhibitory of nickel oxide film growth on the surface. The cause of relatively low and steady contact resistance of NiHG during thermal aging was discussed.