In this paper, we propose a DOA (Direction Of Arrival) estimation method of speech signal using three microphones. The angular resolution of the method is almost uniform with respect to DOA. Our previous DOA estimation method using the frequency-domain array data for a pair of microphones achieves high precision estimation. However, its resolution degrades as the propagating direction being apart from the array broadside. In the method presented here, we utilize three microphones located at vertices of equilateral triangle and integrate the frequency-domain array data for three pairs of microphones. For the estimation scheme, the subspace analysis for the integrated frequency array data is proposed. Through both computer simulations and experiments in a real acoustical environment, we show the efficiency of the proposed method.

Using the finite-difference time-domain method, we evaluated the performance of apertured near-field fiber probes with a double-tapered structure, which have exhibited, in recent experiments, a much higher collection efficiency of localized light in comparison with single-tapered probes. We clarified that this high collection efficiency could be attributed to the shortening of the cutoff region, and the efficient coupling to the guiding mode of the optical fiber. By reproducing the experimental results in terms of the spatial resolution and the collection efficiency as a function of the aperture diameter, our calculation was confirmed to be valid and useful for the design of probes in a variety of applications.

We introduce stepwise resonant excitation by two-color optical near fields in order to detect Rb atoms with a slit-type detector. Blue fluorescence of the second D2 line is monitored for background-free detection. Feasibility of the method is shown from an experiment with a Rb vapor cell, where a sub-Doppler spectrum with the FWHM of 80 MHz is obtained. The detection efficiency is estimated at about 3% for cold Rb atoms.

An effective spatial resolution enhancement method for distributed strain measurement by BOTDR is proposed. An optical fiber is glued to a structure by a length less than the spatial resolution defined by the pulse width, and the Brillouin spectrum of the light scattered from the glued optical fiber is investigated theoretically. The apparent strain xp observed in the fiber is found to be proportional to the accurate strain a. The ratio r=xp/a coincides with the ratio of the glued length to the spatial resolution. Spatial resolution as small as 0.2 m is demonstrated experimentally for small strains of less than 10-3.

We have developed and demonstrated a novel technique for electrical inspection and electrical failure analysis, which can detect open, high-resistance, and short circuits without the need for electrical contact with the outside of the LSI chip or the board on which the LSI chip is mounted. The basic idea of the technique is the detection of the magnetic field produced by OBIC (optical beam induced current) or photo current. A DC-SQUID (superconducting quantum interference device) magnetometer is used to detect the magnetic field. This scanning laser-SQUID microscopy ("laser-SQUID" for short) has a spatial resolution of about 1.3 µm. It can be used to distinguish defective chips before bonding pad patterning or after bonding without pin-selection. It can localize any defective site in the chip to within a few square microns.

We summarize recent studies on performance improvement in the correlation-based continuous-wave technique for optical fiber distributed strain measurement using Brillouin scattering, that had been proposed previously. The correlation-based technique enables the spatial resolution of 1 cm, which is difficult for conventional sensing techniques using Brillouin scattering to achieve. Though the correlation-based technique left a problem with measurement range, we have proposed methods to overcome it with keeping high spatial resolution. In addition, we verified usefulness of the technique for smart materials by measuring strain distribution along surface of a ring structure.

A quantitative study is made on performance of neutron penumbral imaging with a toroidal-segment aperture, and it focused on isoplanaticity of aperture point spread function and effect of the non-isoplanaticity on the reconstructed images. The results show that the aperture point spread function is satisfactorily isoplanatic for a small field of view, while for a large field of view the point spread function is not satisfactorily isoplanatic resulting in some distortion in the reconstructed image and reduction of resolution.

A new electron-beam wafer inspection system has been developed. The system has a resolution of 5 nm or better, and is applicable to quarter-micron devices such as 256 Mbit DRAMs. The most remarkable feature of this system is that a specimen stage is built in the objective lens and allows a working distance (WD) of 0. "WD=0"minimizes the effect of lens aberrations, and maximizes the resolving power. Innovative designs to achieve WD=0 are as follows: (1)A large objective lens of 730-mm width 730-mm depth 620-mm height that serves as a specimen chamber, has been developed. (2)A hollow specimen stage made of non-magnetic materials has been developed.It allows the lower pole piece and magnetic coile of the objective lens inside it. (3)Acoustic motors made of non-magnetic materials are em-ployed for use in vacuum.

This paper describes the imaging method for a human forearm in the microwave transmission CT at 3GHz. To improve the spatial resolution, the correction method of the diffraction effects is adopted and the high directivity antennas are used. A cross-sectional image of the human forearm is obtained in vivo.