This paper describes a new evaluation technique for Si surfaces. A laser/microwave method using two lasers of different wavelengths for carrier injection is proposed to evaluate Si surfaces. With this evaluation system, the effect of impedance mismatching between the microwave probe and the Si wafer can be eliminated. These lasers used in this experiment are He-Ne (wavelength
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Akira USAMI, Hideki FUJIWARA, Noboru YAMADA, Kazunori MATSUKI, Tsutomu TAKEUCHI, Takao WADA, "Improvement of Contactless Evaluation for Surface Contamination Using Two Lasers of Different Wavelengths to Exclude the Effect of Impedance Mismatching" in IEICE TRANSACTIONS on Electronics,
vol. E75-C, no. 5, pp. 595-603, May 1992, doi: .
Abstract: This paper describes a new evaluation technique for Si surfaces. A laser/microwave method using two lasers of different wavelengths for carrier injection is proposed to evaluate Si surfaces. With this evaluation system, the effect of impedance mismatching between the microwave probe and the Si wafer can be eliminated. These lasers used in this experiment are He-Ne (wavelength
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e75-c_5_595/_p
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@ARTICLE{e75-c_5_595,
author={Akira USAMI, Hideki FUJIWARA, Noboru YAMADA, Kazunori MATSUKI, Tsutomu TAKEUCHI, Takao WADA, },
journal={IEICE TRANSACTIONS on Electronics},
title={Improvement of Contactless Evaluation for Surface Contamination Using Two Lasers of Different Wavelengths to Exclude the Effect of Impedance Mismatching},
year={1992},
volume={E75-C},
number={5},
pages={595-603},
abstract={This paper describes a new evaluation technique for Si surfaces. A laser/microwave method using two lasers of different wavelengths for carrier injection is proposed to evaluate Si surfaces. With this evaluation system, the effect of impedance mismatching between the microwave probe and the Si wafer can be eliminated. These lasers used in this experiment are He-Ne (wavelength
keywords={},
doi={},
ISSN={},
month={May},}
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TY - JOUR
TI - Improvement of Contactless Evaluation for Surface Contamination Using Two Lasers of Different Wavelengths to Exclude the Effect of Impedance Mismatching
T2 - IEICE TRANSACTIONS on Electronics
SP - 595
EP - 603
AU - Akira USAMI
AU - Hideki FUJIWARA
AU - Noboru YAMADA
AU - Kazunori MATSUKI
AU - Tsutomu TAKEUCHI
AU - Takao WADA
PY - 1992
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E75-C
IS - 5
JA - IEICE TRANSACTIONS on Electronics
Y1 - May 1992
AB - This paper describes a new evaluation technique for Si surfaces. A laser/microwave method using two lasers of different wavelengths for carrier injection is proposed to evaluate Si surfaces. With this evaluation system, the effect of impedance mismatching between the microwave probe and the Si wafer can be eliminated. These lasers used in this experiment are He-Ne (wavelength
ER -