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Study on Electron Emission from Phosphorus δ-Doped Si-QDs/Undoped Si-QDs Multiple-Stacked Structures

Katsunori MAKIHARA, Tatsuya TAKEMOTO, Shuji OBAYASHI, Akio OHTA, Noriyuki TAOKA, Seiichi MIYAZAKI

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Summary :

We have fabricated two-tiered heterostructures consisting of phosphorus δ-doped Si quantum dots (Si-QDs) and undoped Si-QDs and studied their electron field emission properties. Electron emission was observed from the P-doped Si-QDs stack formed on the undoped Si-QDs stack by applying a forward bias of ∼6 V, which was lower than that for pure Si-QDs stack. This result is attributed to electric field concentration on the upper P-doped Si-QD layers beneath the layers of the undoped Si-QDs stack due to the introduction of phosphorus atom into the Si-QDs, which was positively charged due to the ionized P donor. The results lead to the development of planar-type electron emission devices with a low-voltage operation.

Publication
IEICE TRANSACTIONS on Electronics Vol.E105-C No.10 pp.610-615
Publication Date
2022/10/01
Publicized
2022/04/26
Online ISSN
1745-1353
DOI
10.1587/transele.2021FUP0006
Type of Manuscript
Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category

Authors

Katsunori MAKIHARA
  Nagoya University
Tatsuya TAKEMOTO
  Nagoya University
Shuji OBAYASHI
  Nagoya University
Akio OHTA
  Nagoya University
Noriyuki TAOKA
  Nagoya University
Seiichi MIYAZAKI
  Nagoya University

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