Present Status and Prospect of Graphene Interconnect Applications
Summary :
Graphene has been expected as an alternative material for copper interconnects in which resistance increases and reliability deteriorates in nanoscale. While the principle advantages are verified by simulations and experiments, they have not been put into practical use due to the immaturity of the manufacturing process leading to mass production. On the other hand, recent steady progress in the fabrication process has increased the possibility of practical application. In this paper, I will review the recent advances and the latest prospects for conductor applications of graphene centered on interconnects. The possibility of further application utilizing the unique characteristics of graphene is discussed.
- Publication
- IEICE TRANSACTIONS on Electronics Vol.E105-C No.10 pp.572-577
- Publication Date
- 2022/10/01
- Publicized
- 2022/04/21
- Online ISSN
- 1745-1353
- DOI
- 10.1587/transele.2021FUP0008
- Type of Manuscript
- Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
- Category
Authors
Kazuyoshi UENO
Shibaura Institute of Technology
Keyword
Latest Issue
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Kazuyoshi UENO, "Present Status and Prospect of Graphene Interconnect Applications" in IEICE TRANSACTIONS on Electronics,
vol. E105-C, no. 10, pp. 572-577, October 2022, doi: 10.1587/transele.2021FUP0008.
Abstract: Graphene has been expected as an alternative material for copper interconnects in which resistance increases and reliability deteriorates in nanoscale. While the principle advantages are verified by simulations and experiments, they have not been put into practical use due to the immaturity of the manufacturing process leading to mass production. On the other hand, recent steady progress in the fabrication process has increased the possibility of practical application. In this paper, I will review the recent advances and the latest prospects for conductor applications of graphene centered on interconnects. The possibility of further application utilizing the unique characteristics of graphene is discussed.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/transele.2021FUP0008/_p
Copy
@ARTICLE{e105-c_10_572,
author={Kazuyoshi UENO, },
journal={IEICE TRANSACTIONS on Electronics},
title={Present Status and Prospect of Graphene Interconnect Applications},
year={2022},
volume={E105-C},
number={10},
pages={572-577},
abstract={Graphene has been expected as an alternative material for copper interconnects in which resistance increases and reliability deteriorates in nanoscale. While the principle advantages are verified by simulations and experiments, they have not been put into practical use due to the immaturity of the manufacturing process leading to mass production. On the other hand, recent steady progress in the fabrication process has increased the possibility of practical application. In this paper, I will review the recent advances and the latest prospects for conductor applications of graphene centered on interconnects. The possibility of further application utilizing the unique characteristics of graphene is discussed.},
keywords={},
doi={10.1587/transele.2021FUP0008},
ISSN={1745-1353},
month={October},}
Copy
TY - JOUR
TI - Present Status and Prospect of Graphene Interconnect Applications
T2 - IEICE TRANSACTIONS on Electronics
SP - 572
EP - 577
AU - Kazuyoshi UENO
PY - 2022
DO - 10.1587/transele.2021FUP0008
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E105-C
IS - 10
JA - IEICE TRANSACTIONS on Electronics
Y1 - October 2022
AB - Graphene has been expected as an alternative material for copper interconnects in which resistance increases and reliability deteriorates in nanoscale. While the principle advantages are verified by simulations and experiments, they have not been put into practical use due to the immaturity of the manufacturing process leading to mass production. On the other hand, recent steady progress in the fabrication process has increased the possibility of practical application. In this paper, I will review the recent advances and the latest prospects for conductor applications of graphene centered on interconnects. The possibility of further application utilizing the unique characteristics of graphene is discussed.
ER -
English
