Novel Roll-to-Roll Deposition and Patterning of ITO on Ultra-Thin Glass for Flexible OLEDs

Tadahiro FURUKAWA; Mitsuhiro KODEN

doi:10.1587/transele.E100.C.949

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Novel Roll-to-Roll Deposition and Patterning of ITO on Ultra-Thin Glass for Flexible OLEDs

Tadahiro FURUKAWA, Mitsuhiro KODEN

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Summary :

Novel roll-to-roll (R2R) deposition and patterning of ITO on ultra-thin glass were developed with no photolithography and applied to flexible organic light emitting diodes (OLEDs). The developed deposition consists of low temperature sputtering and annealing. The developed patterning utilizes an etching paste printed by novel R2R screen printing.

Publication: IEICE TRANSACTIONS on Electronics Vol.E100-C No.11 pp.949-954

Publication Date: 2017/11/01

Publicized

Online ISSN: 1745-1353

DOI: 10.1587/transele.E100.C.949

Type of Manuscript: Special Section INVITED PAPER (Special Section on Electronic Displays)

Category

Authors

Tadahiro FURUKAWA
Yamagata University
Mitsuhiro KODEN
Yamagata University

Keyword

roll-to-roll, ITO, ultra-thin glass, OLED, flexible, photolithography-free

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Tadahiro FURUKAWA, Mitsuhiro KODEN, "Novel Roll-to-Roll Deposition and Patterning of ITO on Ultra-Thin Glass for Flexible OLEDs" in IEICE TRANSACTIONS on Electronics, vol. E100-C, no. 11, pp. 949-954, November 2017, doi: 10.1587/transele.E100.C.949.
Abstract: Novel roll-to-roll (R2R) deposition and patterning of ITO on ultra-thin glass were developed with no photolithography and applied to flexible organic light emitting diodes (OLEDs). The developed deposition consists of low temperature sputtering and annealing. The developed patterning utilizes an etching paste printed by novel R2R screen printing.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/transele.E100.C.949/_p

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@ARTICLE{e100-c_11_949,
author={Tadahiro FURUKAWA, Mitsuhiro KODEN, },
journal={IEICE TRANSACTIONS on Electronics},
title={Novel Roll-to-Roll Deposition and Patterning of ITO on Ultra-Thin Glass for Flexible OLEDs},
year={2017},
volume={E100-C},
number={11},
pages={949-954},
abstract={Novel roll-to-roll (R2R) deposition and patterning of ITO on ultra-thin glass were developed with no photolithography and applied to flexible organic light emitting diodes (OLEDs). The developed deposition consists of low temperature sputtering and annealing. The developed patterning utilizes an etching paste printed by novel R2R screen printing.},
keywords={},
doi={10.1587/transele.E100.C.949},
ISSN={1745-1353},
month={November},}

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TY - JOUR
TI - Novel Roll-to-Roll Deposition and Patterning of ITO on Ultra-Thin Glass for Flexible OLEDs
T2 - IEICE TRANSACTIONS on Electronics
SP - 949
EP - 954
AU - Tadahiro FURUKAWA
AU - Mitsuhiro KODEN
PY - 2017
DO - 10.1587/transele.E100.C.949
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E100-C
IS - 11
JA - IEICE TRANSACTIONS on Electronics
Y1 - November 2017
AB - Novel roll-to-roll (R2R) deposition and patterning of ITO on ultra-thin glass were developed with no photolithography and applied to flexible organic light emitting diodes (OLEDs). The developed deposition consists of low temperature sputtering and annealing. The developed patterning utilizes an etching paste printed by novel R2R screen printing.
ER -