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IEICE TRANSACTIONS on Fundamentals

Statistical Modeling of Device Characteristics with Systematic Variability

Kenichi OKADA, Hidetoshi ONODERA

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Summary :

The variabilities of device characteristics are usually regarded as a normal distribution. If we consider the variabilities over the whole wafer, however, they cannot be expressed as a normal distribution due to the existence of global systematic component. We propose a statistical model, characterizing the global systematic component according to the distance from the center of the wafer, which can express the variabilities over the whole wafer statistically.

Publication
IEICE TRANSACTIONS on Fundamentals Vol.E84-A No.2 pp.529-536
Publication Date
2001/02/01
Publicized
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DOI
Type of Manuscript
Special Section PAPER (Special Section on Analog Circuit Techniques Supporting the System LSI Era)
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