1-1hit |
Shin-ichi KOBAYASHI Hiroaki NAKAI Yuichi KUNORI Takeshi NAKAYAMA Yoshikazu MIYAWAKI Yasushi TERADA Hiroshi ONODA Natsuo AJIKA Masahiro HATANAKA Hirokazu MIYOSHI Tsutomu YOSHIHARA
A memory array architecture and row decoding scheme for a 3 V only DINOR (divided bit line NOR) flash memory has been designed. A new sector organization realizes one word line driver per two word lines, which is conformable to tight word line pitch. A hierarchical negative voltage switching row decoder and a compact source line driver have been developed for 1 K byte sector erase without increasing the chip size. A bit-by-bit programming control and a low threshold voltage detection circuit provide a high speed random access time at low Vcc and a narrow program threshold voltage distribution. A 4 Mb DINOR flash memory test device was fabricated from 0.5 µm, double-layer metal, triple polysilicon, triple well CMOS process. The cell measures 1.81.6 µm2 and the chip measures 5.85.0 mm2. The divided bit line structure realizes a small NOR type memory cell.