A novel interconnect design concept named "ASIS (Appilication-specific Interconnect Structure)" is presented for 45 nm CMOS performance maximization. Basic scheme of ASIS is that corresponding to applications, such as high-performance, low-power, or high reliability, interconnect structure as well as metal thickness is individually optimized in order to maximize chip-level performance matched to the application. Our investigation shows that for low-power application, the increased resistivity of scaled-down Cu-wire is not a main issue, so that thinner wire is more advantageous. For high-performance application, partially double pitch structure for local and intermediate layers is advantageous. For high-reliability requirement, Cu-Al alloy or CoWP cap-metal is quite effective for boosting reliability.
Noriaki ODA
Hironori IMURA
Naoyoshi KAWAHARA
Masayoshi TAGAMI
Hiroyuki KUNISHIMA
Shuji SONE
Sadayuki OHNISHI
Kenta YAMADA
Yumi KAKUHARA
Makoto SEKINE
Yoshihiro HAYASHI
Kazuyoshi UENO
The copyright of the original papers published on this site belongs to IEICE. Unauthorized use of the original or translated papers is prohibited. See IEICE Provisions on Copyright for details.
Copy
Noriaki ODA, Hironori IMURA, Naoyoshi KAWAHARA, Masayoshi TAGAMI, Hiroyuki KUNISHIMA, Shuji SONE, Sadayuki OHNISHI, Kenta YAMADA, Yumi KAKUHARA, Makoto SEKINE, Yoshihiro HAYASHI, Kazuyoshi UENO, "Chip-Level Performance Maximization Using ASIS (Application-Specific Interconnect Structure) Wiring Design Concept for 45 nm CMOS Generation" in IEICE TRANSACTIONS on Electronics,
vol. E90-C, no. 4, pp. 848-855, April 2007, doi: 10.1093/ietele/e90-c.4.848.
Abstract: A novel interconnect design concept named "ASIS (Appilication-specific Interconnect Structure)" is presented for 45 nm CMOS performance maximization. Basic scheme of ASIS is that corresponding to applications, such as high-performance, low-power, or high reliability, interconnect structure as well as metal thickness is individually optimized in order to maximize chip-level performance matched to the application. Our investigation shows that for low-power application, the increased resistivity of scaled-down Cu-wire is not a main issue, so that thinner wire is more advantageous. For high-performance application, partially double pitch structure for local and intermediate layers is advantageous. For high-reliability requirement, Cu-Al alloy or CoWP cap-metal is quite effective for boosting reliability.
URL: https://global.ieice.org/en_transactions/electronics/10.1093/ietele/e90-c.4.848/_p
Copy
@ARTICLE{e90-c_4_848,
author={Noriaki ODA, Hironori IMURA, Naoyoshi KAWAHARA, Masayoshi TAGAMI, Hiroyuki KUNISHIMA, Shuji SONE, Sadayuki OHNISHI, Kenta YAMADA, Yumi KAKUHARA, Makoto SEKINE, Yoshihiro HAYASHI, Kazuyoshi UENO, },
journal={IEICE TRANSACTIONS on Electronics},
title={Chip-Level Performance Maximization Using ASIS (Application-Specific Interconnect Structure) Wiring Design Concept for 45 nm CMOS Generation},
year={2007},
volume={E90-C},
number={4},
pages={848-855},
abstract={A novel interconnect design concept named "ASIS (Appilication-specific Interconnect Structure)" is presented for 45 nm CMOS performance maximization. Basic scheme of ASIS is that corresponding to applications, such as high-performance, low-power, or high reliability, interconnect structure as well as metal thickness is individually optimized in order to maximize chip-level performance matched to the application. Our investigation shows that for low-power application, the increased resistivity of scaled-down Cu-wire is not a main issue, so that thinner wire is more advantageous. For high-performance application, partially double pitch structure for local and intermediate layers is advantageous. For high-reliability requirement, Cu-Al alloy or CoWP cap-metal is quite effective for boosting reliability.},
keywords={},
doi={10.1093/ietele/e90-c.4.848},
ISSN={1745-1353},
month={April},}
Copy
TY - JOUR
TI - Chip-Level Performance Maximization Using ASIS (Application-Specific Interconnect Structure) Wiring Design Concept for 45 nm CMOS Generation
T2 - IEICE TRANSACTIONS on Electronics
SP - 848
EP - 855
AU - Noriaki ODA
AU - Hironori IMURA
AU - Naoyoshi KAWAHARA
AU - Masayoshi TAGAMI
AU - Hiroyuki KUNISHIMA
AU - Shuji SONE
AU - Sadayuki OHNISHI
AU - Kenta YAMADA
AU - Yumi KAKUHARA
AU - Makoto SEKINE
AU - Yoshihiro HAYASHI
AU - Kazuyoshi UENO
PY - 2007
DO - 10.1093/ietele/e90-c.4.848
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E90-C
IS - 4
JA - IEICE TRANSACTIONS on Electronics
Y1 - April 2007
AB - A novel interconnect design concept named "ASIS (Appilication-specific Interconnect Structure)" is presented for 45 nm CMOS performance maximization. Basic scheme of ASIS is that corresponding to applications, such as high-performance, low-power, or high reliability, interconnect structure as well as metal thickness is individually optimized in order to maximize chip-level performance matched to the application. Our investigation shows that for low-power application, the increased resistivity of scaled-down Cu-wire is not a main issue, so that thinner wire is more advantageous. For high-performance application, partially double pitch structure for local and intermediate layers is advantageous. For high-reliability requirement, Cu-Al alloy or CoWP cap-metal is quite effective for boosting reliability.
ER -