We developed a Nb 4-layer process for fabricating superconducting integrated circuits that involves using caldera planarization to increase the flexibility and reliability of the fabrication process. We call this process the planarized high-speed standard process (PHSTP). Planarization enables us to flexibly adjust most of the Nb and SiO2 film thicknesses; we can select reduced film thicknesses to obtain larger mutual coupling depending on the application. It also reduces the risk of intra-layer shorts due to etching residues at the step-edge regions. We describe the detailed process flows of the planarization for the Josephson junction layer and the evaluation of devices fabricated with PHSTP. The results indicated no short defects or degradation in junction characteristics and good agreement between designed and measured inductances and resistances. We also developed single-flux-quantum (SFQ) and adiabatic quantum-flux-parametron (AQFP) logic cell libraries and tested circuits fabricated with PHSTP. We found that the designed circuits operated correctly. The SFQ shift-registers fabricated using PHSTP showed a high yield. Numerical simulation results indicate that the AQFP gates with increased mutual coupling by the planarized layer structure increase the maximum interconnect length between gates.

Superconducting nanowire single-photon detectors(SSPDs or SNSPDs) can detect single photons in a wide spectrum range from ultraviolet to mid-infrared wavelengths. We developed SSPDs for the light wavelength of 900-1100 nm, where it is difficult to achieve high detection efficiency by either Si or InGaAs avalanche photodiodes. We designed and fabricated the SSPD with non-periodic dielectric multilayers (DMLs) composed of SiO2 and TiO2 to enhance the optical absorptance in the wavelength range of 900-1100 nm. We measured the detection efficiency (DE) in the wavelength range of 800-1360 nm using a supercontinuum light source and found that the wavelength dependence of DE was in good agreement with the simulated spectrum of the optical absorptance of the nanowire device on the designed DML. The highest system DE was 81.0% for the wavelength of 980 nm.

The adiabatic quantum flux parametron (AQFP) is an energy-efficient, high-speed superconducting logic device. To observe the tiny output currents from the AQFP in experiments, high-speed voltage drivers are indispensable. In the present study, we develop a compact voltage driver for AQFP logic based on a Josephson latching driver (JLD), which has been used as a high-speed driver for rapid single-flux-quantum (RSFQ) logic. In the JLD-based voltage driver, the signal currents of AQFP gates are converted into gap-voltage-level signals via an AQFP/RSFQ interface and a four-junction logic gate. Furthermore, this voltage driver includes only 15 Josephson junctions, which is much fewer than in the case for the previously designed driver based on dc superconducting quantum interference devices (60 junctions). In measurement, we successfully operate the JLD-based voltage driver up to 4 GHz. We also evaluate the bit error rate (BER) of the driver and find that the BER is 7.92×10-10 and 2.67×10-3 at 1GHz and 4GHz, respectively.