We have been investigating reversible quantum-flux-parametron (RQFP), which is a reversible logic gate using adiabatic quantum-flux-parametron (AQFP), toward realizing superconductor reversible computing. In this paper, we review the recent progress of RQFP. Followed by a brief explanation on AQFP, we first review the difference between irreversible logic gates and RQFP in light of time evolution and energy dissipation, based on our previous studies. Numerical calculation results reveal that the logic state of RQFP can be changed quasi-statically and adiabatically, or thermodynamically reversibly, and that the energy dissipation required for RQFP to perform a logic operation can be arbitrarily reduced. Lastly, we show recent experimental results of an RQFP cell, which was newly designed for the latest cell library. We observed the wide operation margins of more than 4.7dB with respect to excitation currents.

We have studied ultra-low-power superconductor circuits using adiabatic quantum flux parametron (AQFP) logic. Latches, which store logic data in logic circuits, are indispensable logic elements in the realization of AQFP computing systems. Among them, feedback latches, which hold data by using a feedback loop, have advantages in terms of their wide operation margins and high stability. Their drawbacks are their large junction counts and long latency. In this paper, we propose a majority gate-based feedback latch for AQFP logic with a reduced number of junctions. We designed and fabricated the proposed AQFP latches using a standard National Institute of Advanced Industrial Science and Technology (AIST) process. The measurement results showed that the feedback latches operate with wide operation margins that are comparable with circuit simulation results.

A single flux quantum (SFQ) logic cell library has been developed for the 10 kA/cm2 Nb multi-layer fabrication process to efficiently design large-scale SFQ digital circuits. In the new cell library, the critical current density of Josephson junctions is increased from 2.5 kA/cm2 to 10 kA/cm2 compared to our conventional cell library, and the McCumber-Stwart parameter of each Josephson junction is increased to 2 in order to increase the circuit operation speed. More than 300 cells have been designed, including fundamental logic cells and wiring cells for passive interconnects. We have measured all cells and confirmed they stably operate with wide operating margins. On-chip high-speed test of the toggle flip-flop (TFF) cell has been performed by measuring the input and output voltages. The TFF cell at the input frequency of up to 400 GHz was confirmed to operate correctly. Also, several fundamental digital circuits, a 4-bit concurrent-flow shift register and a bit-serial adder have been designed using the new cell library, and the correct operations of the circuits have been demonstrated at high clock frequencies of more than 100 GHz.

We have been developing a superconducting time-of-flight mass spectrometry (TOF-MS) system, which utilizes a superconductive strip ion detector (SSID) and a single-flux-quantum (SFQ) multi-stop time-to-digital converter (TDC). The SFQ multi-stop TDC can measure the time intervals between multiple input signals and directly convert them into binary data. In this study, we designed and implemented 24-bit SFQ multi-stop TDCs with a 3×24-bit FIFO buffer using the AIST Nb standard process (STP2), whose time resolution and dynamic range are 100ps and 1.6ms, respectively. The timing jitter of the TDC was investigated by comparing two types of TDCs: one uses an on-chip SFQ clock generator (CG) and the other uses a microwave oscillator at room temperature. We confirmed the correct operation of both TDCs and evaluated their timing jitter. The experimentally-obtained timing jitter is about 40ns and 700ps for the TDCs with and without the on-chip SFQ CG, respectively, for the measured time interval of 50µs, which linearly increases with increase of the measured time interval.

We are developing a fast Fourier transform (FFT) processor using high-speed and low-power single-flux-quantum (SFQ) circuits. Our main concern is the development of an SFQ butterfly processing circuit, which is the core processing circuit in the FFT processor. In our previous study, we have confirmed the complete operation of an integer-type butterfly processing circuit using the AIST 2.5 kA/cm$^{2}$ Nb standard process at the frequency of 25 GHz. In this study, we have designed an integer-type butterfly processing circuit using the AIST 10,kA/cm$^{2}$,Nb advanced process and confirmed its high-speed operation at the maximum frequency of 50,GHz.

We describe the development of single-flux-quantum (SFQ) microprocessors and the related technologies such as designing, circuit architecture, microarchitecture, etc. Since the microprocessors studied here aim for a general-purpose computing system, we employ the complexity-reduced (CORE) architecture in which the high-speed nature of the SFQ circuits is used not for increasing processor performance but for reducing the circuit complexity. The bit-serial processing is the most suitable way to realize the CORE architecture. We assembled all the best technologies concerning SFQ integrated circuits and designed the SFQ microprocessors, CORE1α, CORE1β, and CORE1γ. The CORE1β was made up of about 11000 Josephson junctions and successfully demonstrated. The peak performance reached 1400 million operations per second with a power consumption of 3.4 mW. We showed that the SFQ microprocessors had an advantage in a performance density to semiconductor's ones, which lead to the potential for constructing a high performance SFQ-circuit-based computing system.

A single-flux-quantum (SFQ) arithmetic logic unit (ALU) was designed and tested to evaluate the effectiveness of introducing dynamically reconfigurable logic gates in the design of a superconducting logic circuit. We designed and tested a bit-serial SFQ ALU that can perform six arithmetic/logic functions by using a dynamically reconfigurable AND/OR gate. To ensure stable operation of the ALU, we improved the operating margin of the SFQ AND/OR gate by employing a partially shielded structure where the circuit is partially surrounded by under- and over-ground layers to reduce parasitic inductances. Owing to the introduction of the partially shielded structure, the operating margin of the dynamically reconfigurable AND/OR gate can be improved without increasing the circuit area. This ALU can be designed with a smaller circuit area compared with the conventional ALU by using the dynamically reconfigurable AND/OR gate. We implemented the SFQ ALU using the AIST 2.5kA/cm2 Nb standard process 2. We confirmed high-speed operation and correct reconfiguration of the SFQ ALU by a high-speed test. The measured maximum operation frequency was 30GHz.

We developed a Nb 4-layer process for fabricating superconducting integrated circuits that involves using caldera planarization to increase the flexibility and reliability of the fabrication process. We call this process the planarized high-speed standard process (PHSTP). Planarization enables us to flexibly adjust most of the Nb and SiO2 film thicknesses; we can select reduced film thicknesses to obtain larger mutual coupling depending on the application. It also reduces the risk of intra-layer shorts due to etching residues at the step-edge regions. We describe the detailed process flows of the planarization for the Josephson junction layer and the evaluation of devices fabricated with PHSTP. The results indicated no short defects or degradation in junction characteristics and good agreement between designed and measured inductances and resistances. We also developed single-flux-quantum (SFQ) and adiabatic quantum-flux-parametron (AQFP) logic cell libraries and tested circuits fabricated with PHSTP. We found that the designed circuits operated correctly. The SFQ shift-registers fabricated using PHSTP showed a high yield. Numerical simulation results indicate that the AQFP gates with increased mutual coupling by the planarized layer structure increase the maximum interconnect length between gates.

Recently, we proposed a new data-path architecture, named a large-scale reconfigurable data-path (LSRDP), based on single-flux-quantum (SFQ) circuits, to establish a fundamental technology for future high-end computers. In this architecture, a large number of SFQ floating-point units (FPUs) are used as core components, and their high performance and low power consumption are essential. In this research, we implemented an SFQ half-precision bit-serial floating-point multiplier (FPM) with a target clock frequency of 50GHz, using the AIST 10kA/cm2 Nb process. The FPM was designed, based on a systolic-array architecture. It contains 11,066 Josephson junctions, including on-chip high-speed test circuits. The size and power consumption of the FPM are 6.66mm × 1.92mm and 2.83mW, respectively. Its correct operation was confirmed at a maximum frequency of 93.4GHz for the exponent part and of 72.0GHz for the significand part by on-chip high-speed tests.

The adiabatic quantum flux parametron (AQFP) is an energy-efficient, high-speed superconducting logic device. To observe the tiny output currents from the AQFP in experiments, high-speed voltage drivers are indispensable. In the present study, we develop a compact voltage driver for AQFP logic based on a Josephson latching driver (JLD), which has been used as a high-speed driver for rapid single-flux-quantum (RSFQ) logic. In the JLD-based voltage driver, the signal currents of AQFP gates are converted into gap-voltage-level signals via an AQFP/RSFQ interface and a four-junction logic gate. Furthermore, this voltage driver includes only 15 Josephson junctions, which is much fewer than in the case for the previously designed driver based on dc superconducting quantum interference devices (60 junctions). In measurement, we successfully operate the JLD-based voltage driver up to 4 GHz. We also evaluate the bit error rate (BER) of the driver and find that the BER is 7.92×10-10 and 2.67×10-3 at 1GHz and 4GHz, respectively.

A physical random number generator, which generates truly random number trains by using the randomness of physical phenomena, is widely used in the field of cryptographic applications. We have developed an ultra high-speed superconductive physical random number generator that can generate random numbers at a frequency of more than 10 GHz by utilizing the high-speed operation and high-sensitivity of superconductive integrated circuits. In this study, we have statistically evaluated the quality of the random number trains generated by the superconductive physical random number generator. The performances of the statistical tests were based on a test method provided by National Institute of Standards and Technology (NIST). These statistical tests comprised several fundamental tests that were performed to evaluate the random number trains for their utilization in practical cryptographic applications. We have generated 230 random number trains consisting of 20,000-bits by using the superconductive physical random number generator fabricated by the SRL 2.5 kA/cm2 Nb standard process. The generated random number trains passed all the fundamental statistical tests. This result indicates that the superconductive random number generator can be sufficiently utilized in practical applications.

We have been studying a superconducting quantum-computing system where superconducting qubits are controlled and read out by rapid single-flux- quantum (RSFQ) circuits. In this study, we designed and fabricated an RSFQ microwave chopper, which turns on and off an externally applied microwave to control qubit states with the time resolution of sub-nanosecond. The chopper is implemented in a microwave module and mounted in a dilution refrigerator. We tested the microwave chopper at 4.2 K. The amplitude of the output microwave was approximately 100 µV which is much larger than that of previously designed chopper. We also confirmed that the irradiation time can be controlled by RSFQ control circuits.

A promising application of a single-flux quantum (SFQ) circuit is read-out circuitry for a multi-channel superconductive sensor array. In such applications, the SFQ read-out circuit is expected to operate outside a magnetic shield. We investigated an SFQ circuit structure, which is tolerant to an external magnetic field, using the AIST 2.5kA/cm2 Nb standard 2 process, which has four Nb wiring layers including the ground plane. By covering the entire circuit using an upper Nb wiring layer called the control (CTL) layer, the influences of the external magnetic field on the SFQ circuit operation can be avoided. We experimentally evaluated the sheet inductance of the wiring layer underneath the CTL shielding layer to design a magnetic-field-tolerant SFQ circuit. We implemented and measured test circuits comprising toggle flip-flops (TFFs) to evaluate their magnetic field tolerances. The operating margin and maximum operating frequency of the designed TFF did not deteriorate with increases in the magnetic field applied to the test circuit, whereas the operating margin of the conventional TFF was reduced by applying the magnetic field. We have also demonstrated the high-speed operation of the designed TFF operated in an unshielded environment at a frequency of up to 120GHz with a wide operating margin.