The adiabatic quantum-flux-parametron (AQFP) is an energy-efficient superconductor logic element based on the quantum flux parametron. AQFP circuits can operate with energy dissipation near the thermodynamic and quantum limits by maximizing the energy efficiency of adiabatic switching. We have established the design methodology for AQFP logic and developed various energy-efficient systems using AQFP logic, such as a low-power microprocessor, reversible computer, single-photon image sensor, and stochastic electronics. We have thus demonstrated the feasibility of the wide application of AQFP logic in future information and communications technology. In this paper, we present a tutorial review on AQFP logic to provide insights into AQFP circuit technology as an introduction to this research field. We describe the historical background, operating principle, design methodology, and recent progress of AQFP logic.

The adiabatic quantum-flux-parametron (AQFP) is an energy-efficient superconductor logic device. In a previous study, we proposed a low-latency clocking scheme called delay-line clocking, and several low-latency AQFP logic gates have been demonstrated. In delay-line clocking, the latency between adjacent excitation phases is determined by the propagation delay of excitation currents, and thus the rising time of excitation currents should be sufficiently small; otherwise, an AQFP gate can switch before the previous gate is fully excited. This means that delay-line clocking needs high clock frequencies, because typical excitation currents are sinusoidal and the rising time depends on the frequency. However, AQFP circuits need to be tested in a wide frequency range experimentally. Hence, in the present study, we investigate AQFP circuits adopting delay-line clocking with square excitation currents to apply delay-line clocking in a low frequency range. Square excitation currents have shorter rising time than sinusoidal excitation currents and thus enable low frequency operation. We demonstrate an AQFP buffer chain with delay-line clocking using square excitation currents, in which the latency is approximately 20ps per gate, and confirm that the operating margin for the buffer chain is kept sufficiently wide at clock frequencies below 1GHz, whereas in the sinusoidal case the operating margin shrinks below 500MHz. These results indicate that AQFP circuits adopting delay-line clocking can operate in a low frequency range by using square excitation currents.

We developed a Nb 4-layer process for fabricating superconducting integrated circuits that involves using caldera planarization to increase the flexibility and reliability of the fabrication process. We call this process the planarized high-speed standard process (PHSTP). Planarization enables us to flexibly adjust most of the Nb and SiO2 film thicknesses; we can select reduced film thicknesses to obtain larger mutual coupling depending on the application. It also reduces the risk of intra-layer shorts due to etching residues at the step-edge regions. We describe the detailed process flows of the planarization for the Josephson junction layer and the evaluation of devices fabricated with PHSTP. The results indicated no short defects or degradation in junction characteristics and good agreement between designed and measured inductances and resistances. We also developed single-flux-quantum (SFQ) and adiabatic quantum-flux-parametron (AQFP) logic cell libraries and tested circuits fabricated with PHSTP. We found that the designed circuits operated correctly. The SFQ shift-registers fabricated using PHSTP showed a high yield. Numerical simulation results indicate that the AQFP gates with increased mutual coupling by the planarized layer structure increase the maximum interconnect length between gates.