Optical I/O core based on silicon photonics technology and optical/electrical assembly was developed as a fingertip-size optical module with high bandwidth density, low power consumption, and high temperature operation. The advantages of the optical I/O core, including hybrid integration of quantum dot laser diode and optical pin, allow us to achieve 300-m transmission at 25Gbps per channel when optical I/O core is mounted around field-programmable gate array without clock data recovery.

Low-loss optical coupling structures between photonic crystal waveguides and channel waveguides were investigated. It was emphasized that impedance matching of guided modes of those waveguides, as well as field-profile matching, was essential to achieving the low-loss optical coupling. We developed an impedance matching theory for Bloch waves, and applied it to designing the low-loss optical coupling structures. It was demonstrated that the optical coupling loss between a photonic crystal waveguide and a Si-channel waveguide was reduced to as low as 0.7 dB by introducing an interface structure for impedance matching between the two waveguides.

LSI on-chip optical interconnections are discussed from the viewpoint of a comparison between optical and electrical interconnections. Based on a practical prediction of our optical device development, optical interconnects will have an advantage over electrical interconnects within a chip that has an interconnect length less than about 10 mm at the hp32-22 nm technology node. Fundamental optical devices and components used in interconnections have also been introduced that are small enough to be placed on top of a Si LSI and that can be fabricated using methods compatible with CMOS processes. A SiON waveguide showed a low propagation loss around 0.3 dB/cm at a wavelength of 850 nm, and excellent branching characteristics were achieved for MMI (multimode interference) branch structures. A Si nano-photodiode showed highly enhanced speed and efficiency with a surface plasmon antenna. By combining our Si nano-photonic devices with the advanced TIA-less optical clock distribution circuits, clock distribution above 10 GHz can be achieved with a small footprint on an LSI chip.

We report on a channel drop filter with a mode gap in the propagating mode of a photonic crystal slab that was fabricated on silicon on an insulator wafer. The results, simulated with the 3-dimensional finite-difference time-domain and plane-wave methods, demonstrated that an index-guiding mode for the line defect waveguide of a photonic crystal slab has a band gap at wave vector k = 0.5 for a mainly TM-like light-wave. The mode gap works as a distributed Bragg grating reflector that propagates the light-wave through the line defect waveguide, and can be used as an optical filter. The filter bandwidth was varied from 1-8 nm with an r/a (r: hole radius, a: lattice constant) variation around the wavelength range of 1550-1600 nm. We fabricated a Bragg reflector with a photonic crystal line-defect waveguide and Si-channel waveguides and by measuring the transmittance spectrum found that the Bragg reflector caused abrupt dips in transmittance. These experimental results are consistent with the results of the theoretical analysis described above. Utilizing the Bragg reflector, we fabricated channel dropping filters with photonic crystal slabs connected between channel waveguides and demonstrated their transmittance characteristics. They were highly drop efficient, with a flat-top drop-out spectrum at a wavelength of 1.56 µm and a drop bandwidth of 5.8 nm. Results showed that an optical add-drop multiplexer with a 2-D photonic crystal will be available for application in WDM devices for photonic networks and for LSIs in the near future.