Toshio NOJIMA Shoichi NARAHASHI Tetsuya MIMURA Kei SATOH Yasunori SUZUKI
An ultra low-noise and highly selective, experimental 2-GHz band cryogenic receiver front end (CRFE) has been newly developed for cellular base stations. It utilizes a high-Q superconducting filter, a very low noise cryogenic amplifier, and a highly reliable cooler that is very compact. Fundamental design of the CRFE is investigated. First, the equivalent noise temperature of the CRFE and the effect of improving CRFE sensitivity on base station reception are discussed. Next, essential technologies and fundamental characteristics of each component are described. Finally, influence of antenna noise, such as ground noise and man-made noise, is estimated through field tests both in urban and suburban areas.
Takeiki AIZONO Masahiro OHASHI Makoto KOGURE Tohru KIKUNO
High accuracy, high reliability, and high performance have to be simultaneously satisfied to achieve high productivity of the latest processing equipment. High flexibility is also required because many options are available and processing equipment is modified frequently. A high-assurance-system (HAS) model for processing equipment has been developed according to the concept of an Autonomous Decentralized System (ADS). Heterogeneous devices, that have same function and diverse qualities, are utilized to assure the different requirements of high accuracy, high reliability, and high performance simultaneously. The Data Property (DP) and Assurance Manager (AM) are proposed in this model. Different accuracy, reliability, and performance indices characterize each device, and the DP describes the differences of the properties of the data transmitted from these heterogeneous devices. The AM assures not only high reliability but also high performance and high accuracy by utilizing the heterogeneity of data described by the DP. The HAS model was applied to a device-level system used in processing equipment, and its effectiveness was verified by simulating a pressure-control system.
Equipment simulation can provide valuable support in reactor design and process optimization. This article describes the physical and chemical models used in this technique and the current state of the art of the available software tools is reviewed. Moreover, the potential of equipment simulation will be highlighted by means of three recent examples from advanced quarter micron silicon process development. These include a vertical batch reactor for LPCVD of arsenic doped silicon oxide, a multi station tungsten CVD reactor, and a plasma reactor for silicon etching.
Norio NAKAZATO Shigeki HIRASAWA Takanori MATO
A simulation model for natural convection was developed for determining the surface temperature distribution in base plates with rectangular vertical fins in communication equipment. An estimated velocity derived from the buoyancy and pressure drop equations in a duct was used for laminar forced convection cooling simulations in parallel plates. Temperature distributions in finned plates were calculated by numerical integration of the heat conduction equation. An experimental study was also performed, to check these simulation results, by changing the height of fins, the pitch of fins, and the heat generation conditions. Experimental results and analytical results were found to agree well. Also, this simulation method was extended to analyze natural convection cooling in vertical base plates with inclined parallel fins. We placed alternately on the plates the sections without fins and the sections with fins on the plates. Using the inclined fins, air flow rate between fins was large and fresh air flew into the fins from the side of the plates. The natural convective heat-transfer rate for inclined fins was found to be 14% higher than that for vertical fins.
Kazuo HOGARI Shin-ichi FURUKAWA Kanemitsu TOMIYAMA Yoshinori NAKATSUJI
This paper describes the fiber unit blowing length of an optical fiber distribution system for business buildings which employs pipe cable, fiber units and the fiber unit blowing technique. The relationship between the applied force and the length of a fiber unit blown into a straight pipe is investigated theoretically and experimentally and the fiber unit blowing length is estimated. Moreover, the pipe bending radius which has a small bending resistance force is clarified. Cables, fiber units and unit blowing equipment are manufactured based on the results and their transmission and mechanical characteristics are confirmed to be stable.
Hiroaki KOGURE Hideki NAKANO Kohji KOSHIJI Eimei SHU
This paper presents a method of analyzing the electromagnetic field inside an equipment housing. The electromagnetic field is assumed to be coming from outside and coupled into the housing through an aperture on the housing surface. The analysis is based on the transmission-line modeling method. Results of the analysis show a good agreement with the results of measurement. Also, it is found that the coupling through the aperture shows peaks at some frequencies that depend almost only on the structure of the housing and aperture and, therefore, can be estimated at the time of equipment design.
Toshinori MORI Kaoru SHINOZAKI
This paper proposes a method to predict and control noise voltage caused by electrostatic discharge (ESD) to electronic equipment. The relationship of grounding system configurations for a typical set of equipment to ESD immunity has been derived using a mechanism of ground potential variations. The equivalent circuit representing ground elements as lumped constants enables us to predict the transient ground potential differences between PCB (Printed Circuit Board) ground planes connected via signal cables and induced noise voltage at the receiving end. The calculation shows that the contribution of ground potential differences to noise voltage is comparable to that of the electromagnetic coupling between the discharge current on the enclosure and the circuit loops. The calculation also shows some characteristic results, such as; the induced noise voltage is remarkably dependent on the unbalance in ground cable lengths and on the impedance of ground conductors connecting PCBs, especially when the equipment uses a single-point grounding system. These characteristics were confirmed by measurements of induced ground potential differences, noise voltage and immunity levels. Thus the proposed method is shown to be very effective to analyze the dependency of grounding conditions on ESD immunity and to improve ESD immunity in equipment design.
Masamitsu TOKUDA Ryoichi OKAYASU Yoshiharu AKIYAMA Kusuo TAKAGI Fujio AMEMIYA
Based on the test method proposed by Sub-Committee G of the International Special Committee on Radio Interference, most telephone receivers in Japan have insufficient immunity to acoustic noise caused by radio-frequency fields. This is because the modulation depth of the RF signal used is too high to accurately simulate the audio-frequency components of TV video signals. Reducing the modulation depth from 80% to 5% produces a more realistic simulation.
Yukiko ITO Hajime OGAWA Hiromichi TANI
A new cost model CPO (Cost of Process Ownership) has been proposed. We have already the well known cost model CEO (Cost of Equipment Ownership) [1] which is a cost index assigned independently to individual equipment. However, CPO is basically a cost index assigned to process step in processing flow chart of actual product in a Fab line. Therefore, it is essentially more effective to evaluate the Fab performance such as cost analysis of process steps, estimation of the whole wafer processing cost for specific product, identification of the bottle neck process step or equipment in a Fab line. Further, in designing a high cost-performance factory or in modifying existing factory, it affords important guide such as optimal scales for both factory and equipments with their investment efficiency.
Hisaya HADAMA Tsutomu IZAKI Ikuo TOKIZAWA
In order to pave the way to B-ISDN, one of the most important issues for network providers is to identify the most efficient B-ISDN introduction strategy. This paper focuses on the costs of introducing ATM transmission systems into backbone transport networks which must provide highly reliable broad band transmission capability. In this context, the main rival to ATM is Synchronous Transfer Mode (STM); recent Synchronous Digital Hierarchy (SDH) equipment supports the establishment of advanced STM-based high speed transport networks. This paper offers a cost comparison of ATM and STM based backbone transport networks. A digital path network in STM has a hierarchical structure determined by the hierarchical multiplexing scheme employed. The minimum cost STM path network can only be determined by developing a path design method that considers all hierarchical path levels and yields the optimum balance of link cost and node cost. Virtual paths have desirable features such as non-deterministic path bandwidth and non-hierarchical and direct multiplexing capability into high speed optical transmission links. These features make it possible to implement a non-hierarchical VP network with ATM cross connect systems which can handle any bandwidth VP with a universal cell switching function. This paper shows that the non-hierarchical VP routing, which strongly minimizes link cost, can be implemented without significantly increasing node cost. Network design simulations show that the virtual path scheme, possible only in an ATM network, yields the most cost effective path network configuration.
Shoji HORIGUCHI Tsuneo TSUKAHARA Hideki FUKUDA
This paper surveys trends in and prospects for low power LSI circuits technologies for portable terminal equipment, in which low-voltage operation of LSIs will be emphasized because this equipment will be battery-powered. Since this brings about serious operation speed degradation of LSIs, however, it will become more and more important how to operate them faster under low-supply voltage. We propose two new circuit techniques that make it possible to operate LSIs at high speed even when the supply voltage is very low (1-2 V corresponding to one or two battery cells). The new low-voltage RF LSI circuit technique, developed using silicon bipolar technology and using a novel current-folded mixer architecture for the modulator, result in a highly linear modulator that operates at 2 V. Its power consumption is less than 2/3 that of previously reported ICs. And for a low voltage baseband LSI we propose the multi-threshold CMOS (MTCMOS) technique, which uses two sets of threshold-voltage levels so that the LSI can operate at high speed when driven by a 1-V power supply. The multi-threshold CMOS architecture enabled us to create LSIs that operate faster than conventional CMOS circuits using high-threshold-voltage MOSFETs. When operating with a 1-V power supply, our LSIs are three times faster than the conventional ones.
Hisaya HADAMA Ken-ichi SATO Ikuo TOKIZAWA
This paper presents a newly developed analytical method which evaluates the virtual path bandwidth control effects for a general topology ATM (Asynchronous Transfer Mode) transport network. The virtual path concept can enhance the controllability of path bandwidth. Required link capacity to attain a specified call blocking probability can be reduced by applying virtual path bandwidth control. This paper proposes an analytical method to evaluate the call blocking probability of a general topology ATM network, which includes many virtual paths, that is using virtual path bandwidth control. A method for the designing link capacities of the network is also proposed. These methods make it possible to design an optimum transport network with path bandwidth control. Finally, a newly developed approximation technique is used to develop some analytical results on the effects of dynamic path bandwidth control are provided to demonstrate its effectiveness.
Makoto KURIKI Kazutake UEHIRA Hitoshi ARAI Shigenobu SAKAI
We developed an eye-contact technique using a blazed half-transparent mirror (BHM), which is a micro-HM array arranged on the display surface, to make a compact eye-contact videophone. This paper describes a new BHM structure that eliminates ghosts and improves image quality. In the new BHM, the reflection and transmission areas are separated to exclude ghosts from appearing in the captured image. We evaluated the characteristics of the captured and displayed images. The results show that the contrast ratio of the captured image and the brightness of both captured and displayed images are much better than with the previous BHM.
Hiroshi YAMANE Masaji SATO Tsuyoshi IDEGUCHI Masamitsu TOKUDA
It has become very important to study the lightning surges that were induced in subscriber telecommunication equipment because of the increase of susceptible circuits to the over voltage. The test generator is desire to be developed evaluating the resistibility of equipments against lightning surges. This paper proposes a new lightning-test method for subscriber telecommunication equipment. The waveform of the test generator simulates that of the induced lightning surge voltage caused by a nearby return stroke. The output impedance of the surge generator is determined to match the common-mode impedance of telecommunication lines. The damaged condition of circuit parts and the trouble occurrence rate estimated by using this method agree well with actual observations.
A system for measuring the low frequency amplitude and phase noises was set-up, with employing a phase sensitive detector and phase-shifter. It is noted that both noises were partly correlated. The phase noise was explained by the transit time fluctuation due to the fluctuating diffusion coefficient. The amplitude noise reduction was demonstrated by applying the inverted output of the phase noise to the amplitude noise.
Long term phase noises are characterized for network synchronization using two time domain measurement techniques: the Maximum Time Interval Error (MTIE) and Time Variance (TVAR). First, the characteristics of previously measured fiber delay variations are evaluated. The diurnal and annual delay variations and the long term noise feature of random walk phase modulation are well represented by the TVAR technique. The delay variation due to the AU pointer operation is then measured using commercial SDH demultiplexing equipment and compared with the simulation result; the simulation result agrees well with the experimental result. The delay variation in the SDH equipment is simulated using the thermal fiber delay variation measured in the actual network as the input phase of the equipment. It is shown that the SDH equipment sometimes generates delay steps of 617ns, which are larger than the normal pointer operations of 154ns. The long term delay variation, periods over 107s, due to the threshold spacing between the positive and negative stuffing is described. We also show that TVAR is suitable for evaluating the phase noise feature and MTIE can clearly show the peak value of phase noise. The long term phase noises evaluated in this paper are the dominant sources that degrade network synchronous performance. The results of this paper will be useful in designing the equipment synchronous specification.
Kenji MINATO Ikuo YODA Nobuo FUJII
ISO and ITU-T have developed the standard concept of the Telecommunications Management Network (TMN). This standard does not, however, specify interface implementation. The user requires an Application Programming Interface (API) that bridges user application and the TMN concept to construct a TMN-based application. This paper proposes an object oriented API (OOAPI) that is suitable for TMN-based operations system implementation. OOAPI is one interface of the Common Management Information Service Element (CMISE), and uses the Common Management Information Protocol (CMIP). OOAPI is composed of two C++ programming language constructs: Data Object and Interface object "M_User". The Data Object makes it easier for the user to access management information. The M_User provides a connection-less CMISE interface because the OOAPI handles CMIP association automatically. The M_User also provides MO location-transparency by using the OSI Directory Service. This paper compares the existing MO location-transparency schemes with the OOAPI method, and clarifies the advantages of OOAPI. This paper also indicates results from OOAPI trials, and confirms that OOAPI has sufficient performance to implement highly effective TMN operations system.
Kiyoshi KOBAYASHI Tomoaki KUMAGAI Shuzo KATO
This paper proposes a group demodulator that employs multi-symbol chirp Fourier transform to demodulate pulse shaped and time asynchronous signals without degradation; this is not possible with conventional group demodulators based on chirp Fourier transform. Computer simulation results show that the bit error rate degradation of the proposed group demodulator at BER=10-3 is less than 0.3dB even when a root Nyquist (α=0.5) filter is used as the transmission pulse shaping filter and the symbol timing offset between the desired channel and the chirp sweep is half the symbol period.
Yoshimasa TAKII Nobuo AOI Yuichi HIROFUJI
Today, defect sources of LSI device mainly lie in the process equipments. The particles generating in these equipments are introduced onto the wafer, and form the defects resulting in functional failures of LSI device. Thus, reducing these particles is acquired for increasing production yield and higher productivity, and it is important to identify the particle source in the equipment. In this study, we discussed new two methods to identify this source in the equipment used in the production line. The important point of identifing is to estimate the particle generation with short time and high accuracy, and to minimize long time stop of the equipment requiring disassembly. First, we illustrated "particle distribution analysis method." In this method, we showed the procedure to express the particle distribution mathematically. We applied this method to our etching equipment, and could identify the particle source without stopping this etching equipment. Secondly, we illustrated the method of "in-situ particle monitoring method," and applied this method to our AP-CVD equipment. As a result, it was clear the main particle source of this equipment and the procedure for decreasing these particles. By using this method, we could estimate the particle generation at real time in process without stopping this equipment. Thus, both methods shown in this study could estimate the particle generation and identify the particle source with short time and high accuracy. Furthermore, they do not require long time stop of the process equipment and interrupting the production line. Therefore, these methods are concluded to be very useful and effective in LSI manufacturing process.
Makoto KURIKI Hitoshi ARAI Kazutake UEHIRA Shigenobu SAKAI
An eye-contact technique using a blazed half-transparent mirror (BHM) is developed. This half-transparent mirror (HM) consists of an in-line array of many slanting micro-HMs. We fabricated a prototype system and confirmed the principle of this technique. The resolution of an image reflected by a BHM was simulated to determine how to improve the image quality and the factors degrading the resolution were clarified.