A new effect of barrier metal laid under 1st aluminum layer on electromigration has been found in interconnect vias. This effect can be explained by Si nodules at vias. Stress induced open failure occurred at viaholes and depends on the size of the vias. Stress-migration at vias can be prevented by TiN barrier metal between 1st and 2nd metals. Reliability of electro- and stress-migration at interconnect vias can be explosively improved by using TiN barrier metal.

Via electromigration (EM) performance of aluminum based metallization (AL) systems has been investigated for vias chains of 1500-4000 vias of 1.0 micron diameter. The results show that via EM lifetime can not be enhanced by a simple increase of M2 step coverage in AL/AL vias because the EM induced voids are formed at AL/AL via interface where electrons flow from Ml to M2 even in the case of very poor M2 step coverage. The voids are induced by the boundary layer in AL/AL vias, where a temperature gradient causes discontinuity of aluminum atoms flux. The failure location is not moved though via EM lifetime can be improved by controlling stress in passivation, sputter etch removal thickness and grain size of the first metal. Next, the effect of the boundary layer are eliminated by depositing titanium under the second aluminum or depositing WSi on the first aluminum. In the both cases, via EM lifetime are improved and the failure locations are changed. Especially WSi layer suppresses the voids formation rather than titanium. Models for the failure mechanism in each metallization system are further discussed.

This letter shows that VEPs can be easily measured by using color cards as the color stimulus, and that the responses evoked by a difference in chroma could be described largely by the value of the first principal component in principal component analysis.

When used for automotive applications, microcomputers have to meet two requirements more demanding than those for general use. One of these requirements is to respond to external events within a time scale of microseconds; the other is the high quality and high reliability necessary for the severe environmental operating conditions and the ambitious market requirements inherent to automotive applications. These needs especially the latter one have been responded to by further elaboration of each basic technology involved in semiconductor manufacturing. At the same time, various logic parts have been built into the microcomputer. This paper deals with several design approaches to the high quality and high reliability objective. First, testability improvement by the logical separation method focusing on the logic simulation model for generating test vectors, which enables us to reduce the time required for test vector development in half. Next, noise suppression methods to gain electromagnetic compatibility (EMC). Then, simplified memory transistor's analysis to evaluate the V/I-characteristics directly via external pins without opening the model seal, removing the passivation and placing a probe needle on the chip. Finally, increased reliability of on-chip EPROM using a special circuit raising the threshold value by approximately 1(V) compared to EPROM's without such a circuit.

The method to optimize redundancy scheme for memory devices is proposed. Yield for new generation memories is predicted by failure mode analysis of previous generation memories. Fabrication line improvement and chip area penalty by the redundancy are taken into account for this yield prediction. The actual data of 16 Mbit EPROM failure analysis indicate the effectiveness of the prediction.

For analyzing the transient electromagnetic fields caused by electrostatic discharge (ESD), a new ESD model is presented here. Numerical calculation is also given to explain the distinctive phenomenon being well-recognized in the ESD event.

This paper focuses on two areas in our effort to synthesize speech from neuromotor input using neural network models that effect transforms between cognitive intentions to speak, their physiological effects on vocal tract structures, and subsequent realization as acoustic signals. The first area concerns the biomechanical transform between motor commands to muscles and the ensuing articulator behavior. Using physiological data of muscle EMG (electromyography) and articulator movements during natural English speech utterances, three articulator-specific neural networks learn the forward dynamics that relate motor commands to the muscles and motion of the tongue, jaw, ant lips. Compared to a fully-connected network, mapping muscle EMG and motion for all three sets of articulators at once, this modular approach has improved performance by reducing network complexity and has eliminated some of the confounding influence of functional coupling among articulators. Network independence has also allowed us to identify and assess the effects of technical and empirical limitations on an articulator-by-articulator basis. This is particularly important for modeling the tongue whose complex structure is very difficult to examine empirically. The second area of progress concerns the transform between articulator motion and the speech acoustics. From the articulatory movement trajectories, a second neural network generates PARCOR (partial correlation) coefficients which are then used to synthesize the speech acoustics. In the current implementation, articulator velocities have been added as the inputs to the network. As a result, the model now follows the fast changes of the coefficients for consonants generated by relatively slow articulatory movements during natural English utterances. Although much work still needs to be done, progress in these areas brings us closer to our goal of emulating speech production processes computationally.

High performances of CMOS/SOI inverter by simulations of analytical model, reducing the poly-Si gate thickness (tm), and experiments are verified and proposed. It is shown that the tm and gate oxide thickness(tox) are correlated to gate fringing capacitance, which largely influences on the Propagation Delay Time(TPD). Contributions of gate fringing capacitance to CMOS/SIMOX inverter time delay in deep submicrometer gate devices are propounded. Measurements of the fifty-one stage ring oscillator's TPDs are completed for comparison with analytical model. Simulation results by the analytical model, including Time-Dependent Gate Capacitance (TDGC) model, agree well with the experimental results at the same conditions. Simulation results are also predicted that SOI technology is promising for speed enhancement by reducing the poly-Si gate thickness, while the tox remains constant. It is concluded that the TPDs by reducing the tm to zero are improved up to about two times faster than typically fabricated ring oscillator at 350 nm of the tm in deep-submicrometer gate CMOS/SIMOX inverters at room temperature.

The characteristics of an open-boundary Cherenkov laser for an electromagnetic wave with a continuous frequency spectrum are numerically analyzed. A given power spectral density for the input wave is found to get concentrated around the frequency where the spatial growth rate is maximum, as it grows along the electron beam. In addition, the frequency for the maximum growth rate is found to shift gradually to higher values. Furthermore, by gradually increasing the permittivity of the dielectric waveguide along it, we can always get the maximum power spectral density at the frequency where the spatial growth rate initially becomes maximum at the input.

Scattering characteristics of a stratified chiral slab, which is composed of dielectric chiral layers of different material properties and thicknesses, are extensively explored. Design considerations for optical filters are also presented for both the cases of normal and oblique incidence. In the analysis, the incident field is assumed to be a plane monochromatic wave of any arbitrary polarization. The transmitted and reflected electric fields are obtained by noting the fact that the electric field inside a chiral medium is expressed as a sum of the left- and right-circularly polarized plane waves of different phase velocities. Then one can describe the power densities and the Stokes parameters of the transmitted and reflected waves in terms of their field components. As is well known,the Stokes parameters characterize every possible state of polarization of a plane wave. Numerical examples are presented to show the effects of chirality on polarization conversion properties of the stratified chiral slab. The cross- and co-polarized powers and the Stokes parameters of the transmitted and reflected waves are computed for the incident wave of perpendicular polarization. The numerical results demonstrate novel depolarization properties of the slab with application to the design of efficient filters active at the optical region. It is seen from the results that the stratified chiral slab acts as a polarization-conversion transmission filter that passes only a cross-polarized component of the transmitted wave at some frequency band. Furthermore, the slab may be utilized as an antireflection filter for both the cross- and co-po1arized components of the reflected wave at the band region.

This paper describes a noise resistant algorithm for recovering the three-dimensional motion of a rigid object from optical flow. First, it is shown that in the absence of noise three-demensional motion can be obtained exactly by a linear algorithm except in the special case in which the surface of the object is on a general quadratic surface passing through the viewpoint, and the normal vector of the surface at the viewpoint is perpendicular to the translation velocity vector. In the presence of noise, an evaluation function is introduced based on the least squares method. It is shown, however, that the solution which minimizes the evaluation function is not always optimal due to statistical bias. To deal with this problem, a method to eliminate the statistical bias in the evaluation function is proposed for zero mean white noise. Once the statistical bias is eliminated, the solution of the linear algorithm coincides with the correct solution by means of expectation. In this linear algorithm, only the eigenvector corresponding to the zero eigenvalue of a 33 matrix is necessary to find the translational velocity. Once the translational velocity is obtained, the rotational velocity can be computed directly. This method is also shown to be noise resistant by computer simulation.

A fiber-optic transmission system for linking radio base stations to the mobile communication center is developed, and its performance is evaluated. The introduction of this system yields two main improvements: optimum zone allocation to increase radio frequency utilization efficiency and the elimination of service quality issues such as dead zones and traffic imbalance. Being optical, the system suffers from the interferometric noise and distortion created by multiple reflections within the fiber. Moreover, because system response is much different from that of optical CATV systems, we clarify the optical parameter selection criteria and hypothetical return loss model for an embedded fiber infrastructure. An optical multiplexing method is also introduced that reduces the quantity of fiber and connectors, as well as splicing and cable installation costs. A new ternary optical multiplexing architecture combined with a cost-effective self-tuning type WDM technique and a high isolation type circulator are proposed for the 1.3µm wavelength region. The performance of low distortion high power common amplifiers is measured with the aim of reducing the size and weight of back-up batteries, and to improve the packaging density of the typical base station.

A strictly nonblocking 88 matrix switch was designed and fabricated using silica-based planar lightwave circuits (PLC) on a silicon substrate. The average insertion loss was 11 dB in the TE mode and 11.3 dB in the TM mode. The average switch element extinction ratio was 16.7 dB in the TE mode and 17.7 dB in the TM mode. The accumulated crosstalk was estimated to be 7.4 dB in the TE mode and 7.6 dB in the TM mode. The driving power of the phase shifter required for switching was about 0.5 W and the polarization dependence of the switching power was 4%. The switching response time was 1.3 msec. The wavelength range with a switch extinction ratio of over 15 dB was 1.31 µm30 nm.

The authors developed new measuring system (Holographic Pattern Measuring System [HPMS]), which is composed of both techniques of holography and graphic image processing, was used to measure the vibrations of a printed circuit board (PCB) due to operation of a mounted electromagnetic relay on it. The clear vibration patterns were obtained. By using pattern analysis processor, quantitative vibration patterns of the PCB surface were observed. Both the vibration patterns and displacements were changed by edge fixing way of the PCB.

We describe an approach for modelling a person's face for model-based coding. The goal is to estimate the 3D shape by combining the contour analysis and shading analysis of the human face image in order to increase the quality of the estimated 3D shape. The motivation for combining contour and shading cues comes from the observation that the shading cue leads to severe errors near the occluding boundary, while the occluding contour cue provides incomplete surface information in regions away from contours. Towards this, we use the deformable model as the common level of integration such that a higher-quality measurement will dominate the depth estimate. The feasibility of our approach is demonstrated using a real facial image.

This paper describes a monolithic 10-b A/D converter that realized a maximum conversion frequency of 300 MHz. Through the development of the interpolated-parallel scheme, the severe requirement for the transistor Vbe matching can be alleviated drastically, which improves differential nonlinearity (DNL) significantly to within 0.4 LSB. Furthermore, an extremely small input capacitance of 8 pF can be attained, which translates into better dynamic performance such as SNR of 56 dB and THD of 59 dB for an input frequency of 10 MHz. Additionally, the folded differential logic circuit has been developed to reduce the number of elements, power dissipation, and die area drastically. Consequently, the A/D converter has been implemented as a 9.0 4.2-mm2 chip integrating 36K elements, which consumes 4.0 W using a 1.0-µm-rule, 25-GHz ft, double-polysilicon self-aligned bipolar technology.

The performance of copper interconnects formed by the low-kinetic-energy ion bombardment process has been investigated. The copper films formed on SiO2 by this technology under a sufficient amount of ion energy deposition exhibit perfect orientation conversion from Cu (111) to Cu (100) upon post-metallization thermal annealing. We have discovered such crystal orientation conversion is always accompanied by a giant-grain growth as large as 100 µm. The copper film resistivity decreases due to the decrease in the grain boundary scattering, when the giant-grain growth occurs in the film. The resistivity of giant-grain copper film at a room temperature is 1.76 µΩcm which is almost equal to the bulk resistivity of copper. Furthermore, a new-accelerated electromigration life-test method has been developed to evaluate copper interconnects having large electromigration resistance within a very short period of test time. The essence of the new method is the acceleration by a large-current-stress of more than 107 A/cm2 and to utilize the self heating of test interconnect for giving temperature stress. In order to avoid uncontrollable thermal runaway and resultant interconnect melting, we adopted a very efficient cooling system that immediately removes Joule heat and keeps the interconnect temperature constant. As a result, copper interconnects formed by the low-kinetic-energy ion bombardment process exhibit three orders of magnitude longer lifetime at 300 K than Al alloy interconnects.

It is shown from a computer analysis that there exists a resonant mode of a surface wave which propagates along Goubau line, and that the attenuation of such a mode is very low. The approximate formula for obtaining the resonant frequency is also given.

When we study time-domain electromagnetic fields, we frequently use the finite-difference time-domain (FD-TD) method. In this paper, we discuss errors of the FD-TD method and present the optimum mesh spacings in the FD-TD method when the three mesh spacings are different.

An accurate numerical solution is presented for the electromagnetic scattering from a double strip grating, where the strip planes are each supported by a dielectric slab. This structure is a model of polarization diplexers. The direction of propagation and the polarization of the incident plane wave are arbitrary. We derive a set of singular integral equations and solve it by the moment method, where the Chebyshev polynomials are successfully used as the basis and the testing functions. By numerical computations we examine the dependence of the diplexing properties on grating parameters in detail. The cross-polarization characteristics at skew incidence are also referred. From these results we construct an algorithm for the design of polarization diplexers.