The quality of polycrystalline silicon films and electrical characteristics of polycrystalline silicon gate metal-oxide-semiconductor (MOS) capacitors were investigated under various processing conditions, including phosphorus doping. The stresses observed in Si films deposited in the amorphous phase show complex behavior during thermal treatment. The stresses in as-deposited Si films are compressive. They change to tensile with annealing at 800, and to compressive after an additional annealing at 900. The kind of charges trapped in the SiO2 film during the negative constant current stress in Polycrystalline silicon gate MOS capacitors differ with the maximum process temperature. The trapped charges of samples annealed at 800 were negative, while those of samples annealed at 900 were positive.

Isotope dilution secondary ion mass spectroscopy (ID-SIMS) using 30Si as a spike is investigated as a quantitative analysis method for trace amounts of Si. For a standard solution of Si, the relateve standard deviation of results using this method is 5% for 0.2 µg Si, and the determination lower limit is 18 ng. Using this method, the amount of Si deposited on the Ge(100) surface by the self-limited adsorption of SiH2Cl2 is determined to be about 1.00.2 monolayer.

The mechanism of UV-excited dry cleaning using photoexcited chlorine radicals has been investigated for removing iron and aluminum contamination on a silicon surface. The iron and aluminum contaminants with a surface concentration of 1013 atoms/cm2 were intentionally introduced via an ammonium-hydrogenperoxide solution. The silicon etching rates from the Uv-excited dry cleaning differ depending on the contaminants. Fe and Al can be removed in the same manner. The removal of Fe and Al is highly temperature dependent, and is little affected by the silicon etching depth. Both Fe and Al on the silicon surface were completely removed by UV-excited dry cleaning at a cleaning temperature of 170, and were decreased by two orders of magnitude from the initial level when the surface was etched only 2 nm deep.

There has been much interest in building corporate private communication networks. This aim requires a method that optimizes the economical aspect of network configurations. The authors propose a network design method supported by knowledge-base. This method is used to design a cost-effective corporate communication network, using leased lines. The knowledge-base description depends on the production rule. The network configuration is improved by introducing expert knowledge, after designing the network by a conventional algorithm. Design results show the advantages of the proposed method.

Extended form of interpolatory approximation is presented for tne n-dimensional (n-D) signals whose generalized spectrums have weighted norms smaller than a given positive number. The presented approximation has the minimum measure of approximation error among all the linear and the nonlinear approximations using the same generalized sample values.

Thermal desorption spectroscopy (TDS) is applied to analyze the oxidation reactions of hydrogen-terminated Si(100) surfaces in both the heating and cooling processes after hydrogen desorption. The oxidation reaction of oxygen and water with a silicon surface after hydrogen desorption shows hysteresis in the heating and cooling processes. In the cooling process, oxidation finishes when the silicon surface is adequately oxidized to about a 10 thickness. Oxidation continues to occur at lower temperatures when the total volume of oxygen and water is too small to saturate the bare silicon surface. The reaction of water with silicon releases hydrogen at more than 500. Hydrogen does not adsorb on the silicon oxide surface. A trace amount of oxygen, less than 110-6 Torr, roughens the surface.

A new Elastic-Block Matching Algorithm using bilinear space warping is proposed. In this scheme a convex quadrilateral, which minimizes a distortion measure against the current square block, is searched to compensate the shape deformation caused by a rigid body's 3 dimensional depth motion or rotation. The proposed algorithm gives a remarkable improvement in motion-compensated prediction compared with the conventional algorithm.

A fast scan-line algorithm for a raster-scan graphics display is proposed based on an observation that a sequence of successive image frames in animation mostly consists of still objects with relatively few moving objects. In the proposed algorithm, successive images are generated using the background image composed of still objects only, and moving image composed only of moving objects. The color of each pixel in the successive images is then determined by one, which is nearer from eye, between the two candidate pixels, where one is from the background image and the other is from the moving image. The background image is generated once in the whole process, while the moving image is generated for each time frame using an interpolation of two images generated at the start and end time of the given time interval. For the purpose of fast shadow generation, we classify the shadows into three groups, i.e., still shadows generated by still objects on still objects, moving shadows generated by moving objects on still objects, and composite shadows generated by both still objects and moving objects on moving objects. These shadows can be generated very quickly by utilizing the frame coherence. According to the experimental results, a speed up factor of 3.2 to 12.8, depending on the percentage of the moving objects among all objects, was obtained using our algorithm, compared to the conventional scheme not utilizing the frame-to-frame image coherence.

The encoding of high quality and super high definition images requires new approaches to the coding problem. The nature of such images and the applications in which they are used prohibits the introduction of perceptible degradation by the coding process. In this paper, we discuss techniques for the perceptually transparent coding of images. Although technically lossy methods, images encoded and reconstructed using these techniques appear identical to the original images. The reconstructed images can be postprocessed (e.g., enhanced via anisotropic filtering), due to the absence of structured errors, commonly introduced by conventional lossy methods. The compression, ratios obtained are substantially higher than those achieved using lossless means.

Lingas developed an NC algorithm for subgraph isomorphism for connected graphs of bounded separator and bounded valence. We present an NC algorithm for computing canonical forms of graphs of bounded separator by using the similar technique.

A layout system for mixed analog/digital standard cell LSI's is described. The system includes interactive floorplan and placement features and automatic global and channel router. In mixed analog/digital circuits, crosstalk noise causes chip performance degradation. Thus, the proposed global routing algorithm routes analog nets in areas that are free of digital nets as much as possible. The number of line crossovers, especially for analog nets, is minimized by both global and detailed routers, because these crossovers are the dominant factors in the crosstalk noise. Double width lines can be used to avoid unexpected voltage drops caused by parasitic resistances. A postprocess automatically puts up shield lines for very noise sensitive wirings to improve the S/N ratio. Experimental results show that the proposed algorithms are effective in reducing the number of crossovers and redundant vias.

It is known that the problem of finding a largest common subgraph is NP-hard for general graphs even if the number of input graphs is two. It is also known that the problem can be solved in polynomial time if the input is restricted to two trees. In this paper, a randomized parallel (an RNC) algorithm for finding a largest common subtree of two trees is presented. The dynamic tree contraction technique and the RNC minimum weight perfect matching algorithm are used to obtain the RNC algorithm. Moreover, an efficient NC algorithm is presented in the case where input trees are of bounded vertex degree. It works in O(log(n1)log(n2)) time using O(n1n2) processors on a CREW PRAM, where n1 and n2 denote the numbers of vertices of input trees. It is also proved that the problem is NP-hard if the number of input trees is more than two. The three dimensional matching problem, a well known NP-complete problem, is reduced to the problem of finding a largest common subtree of three trees.

Based on the semiclassical theory, we deduce the expressions of stimulated absorption, stimulated amplification and threshold by using density matrix equation in the Er3+-doped fibers. Meaningful results have been given and some phenomena occuring in experiments are explained theoretically.