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2201-2217hit(2217hit)

  • Characterization of a Silicon Wafer after the Removal of Photoresist Layer Using Two Lasers of Different Wavelengths

    Akira USAMI  Hideki FUJIWARA  Takahisa NAKAI  Kazunori MATSUKI  Tsutomu TAKEUCHI  Takao WADA  

     
    PAPER

      Vol:
    E75-C No:9
      Page(s):
    978-985

    A laser/microwave method using two lasers of different wavelengths for carrier excitation is proposed to evaluate Si surfaces. These constitute a He-Ne laser (wavelength=633 nm, penetration depth=3 µm) and a YAG laser (wavelength=1060 nm, penetration depth=500 µm). Using a microwave probe, the amount of excited carriers can be detected. The carrier concentration is mainly dependent on the condition of the surface when carriers are excited by the He-Ne laser, as well as on the condition of the bulk region when carriers are excited by the YAG laser. Microwave intensities detected under the He-Ne and the YAG lasers illumination are referred to as the surface-recombination-velocity-related microwave intensity (SRMI) and the bulk-related microwave intensity (BRMI), respectively. The difference between SRMI and BRMI is called relateve SRMI (R-SRMI), and is closely related to the condition of the surface and surface active region. We evaluate the surfaces of the samples after plasma and wet etching to remove the photoresist layer. And we evaluate the surfaces of the samples after heat or HF treatment which is done to recover the damage introduced by plasma etching. It was found that the R-SRMI method is better suited to surface evaluation than conventional lifetime measurements.

  • Contactless Evaluation Using a Laser/Microwave Method for the Silicon-on-Insulator Made by Wafer Bonding

    Akira USAMI  Takahisa NAKAI  Hideki FUJIWARA  Shun-ichiro ISHIGAMI  Takao WADA  

     
    PAPER

      Vol:
    E75-C No:9
      Page(s):
    1043-1048

    In this study, we evaluate the electrical characteristics of the SOI layer made by the wafer bonding method using a laser/microwave method. We use a He-Ne laser pulse for the photoconductivity modulation method and a semiconductor laser diode for the photoconductivity decay method as the carrier injection light source. The detected signal intensity at the void area decreases as compared with that at the center area of the SOI layer where there are no voids. The positions of the voids revealed by the proposed method are in good agreement with those by X-ray topography. We also measure the lifetime by the photoconductivity decay method using a laser diode. The lifetime at the void area is much shorter than that at the center area. It is considered that the decrease in the detected signal intensity at the void area is due to reduction in the minority carrier lifetime.

  • A New Architecture for Flexible Private Networks--PBX/LAN Function Fusion--

    Jun YAMAGATA  Masayuki MIYAZAWA  Iwamasa NISHIKADO  Takafumi SAITO  

     
    PAPER

      Vol:
    E75-B No:7
      Page(s):
    585-593

    Over the past few years, the drive towards optimization and globalization of business activities has mandated the integration of various services, an increase in system scale, and the networking of a variety of systems. These requirements can only be satisfied by the introduction of systems that are able to accommodate and control multiple media and integrate LANs and PBXs synergistically. This paper proposes an architecture for next generation private networks called ANS (Areal Networking System) that is targeted at achieving flexible customization in an effort to meet a wide variety of user requirements as well as the ability to efficiently handle multimedia services. Based upon the clarification of various requirements on the ANS architecture, this paper defines two models for the ANS architecture. These models introduce modular building blocks in hierarchical structures that facilitate the custom design of networks. The key technologies for the ANS architecture are also discussed; for example, schemes for logically networking control functions by using virtual connections and a way to implement the LAN function.

  • Design of Three-Dimensional Digital Filters for Video Signal Processing via Decomposition of Magnitude Specifications

    Masayuki KAWAMATA  Takehiko KAGOSHIMA  Tatsuo HIGUCHI  

     
    PAPER-Design and Implementation of Multidimensional Digital Filters

      Vol:
    E75-A No:7
      Page(s):
    821-829

    This paper proposes an efficient design method of three-dimensional (3-D) recursive digital filters for video signal processing via decomposition of magnitude specifications. A given magnitude specification of a 3-D digital filter is decomposed into specifications of 1-D digital filters with three different (horizontal, vertical, and temporal) directions. This decomposition can reduce design problems of 3-D digital filters to design problems of 1-D digital filters, which can be designed with ease by conventional methods. Consequently, design of 3-D digital filters can be efficiently performed without complicated tests for stability and large amount of computations. In order to process video signal in real time, the 1-D digital filters with temporal direction must be causal, which is not the case in horizontal and vertical directions. Since the proposed method can approximate negative magnitude specifications obtained by the decomposition with causal 1-D R filters, the 1-D digital filters with temporal direction can be causal. Therefore the 3-D digital filters designed by the proposed method is suitable for real time video signal processing. The designed 3-D digital filters have a parallel separable structure having high parallelism, regularity and modularity, and thus is suitable for high-speed VLSI implementation.

  • Analysis of an Integrated Multiplexer with All Queueable and Fixed-Length Traffics in Intermediate Node

    Chung-Ju CHANG  Shyh-Yih WANG  

     
    PAPER-Communication Networks and Service

      Vol:
    E75-B No:7
      Page(s):
    657-664

    An integrated multiplexer in intermediate node is analyzed. The multiplexer is modeled as a system with multiple synchronous servers (channels) and having two kinds of customers. Between the two, one is wideband (WB) and the other is narrowband (NB); they are queueable with the same deterministic service time. The WB customer is given higher priority of channel access than the NB. To incorporate the delay constraint of WB, we use a simple instant discarding scheme for WB. As a result, the system states defined just after the beginning of a slot form an one-dimensional embedded Markov chain. This makes the analysis computationally tractable. The performance measures such as queue length distribution, average blocking probability, and average waiting time are obtained, particularly, the waiting time distribution. Some interesting numerical examples are discussed. Simulation results are also provided to help verify the validity of analysis.

  • Polynomial Time Inference of Unions of Two Tree Pattern Languages

    Hiroki ARIMURA  Takeshi SHINOHARA  Setsuko OTSUKI  

     
    PAPER

      Vol:
    E75-D No:4
      Page(s):
    426-434

    In this paper, we consider the polynomial time inferability from positive data for unions of two tree pattern languages. A tree pattern is a structured pattern known as a term in logic programming, and a tree pattern language is the set of all ground instances of a tree pattern. We present a polynomial time algorithm to find a minimal union of two tree pattern languages containing given examples. Our algorithm can be considered as a natural extension of Plotkin's least generalization algorithm, which finds a minimal single tree pattern language. By using this algorithm, we can realize a consistent and conservative polynomial time inference machine that identifies unions of two tree pattern languages from positive data in the limit.

  • Non-integer Exponents in Electronic Circuits: F-Matrix Representation of the Power-Law Conductivity

    Michio SUGI  Kazuhiro SAITO  

     
    PAPER-Analog Circuits and Signal Processing

      Vol:
    E75-A No:6
      Page(s):
    720-725

    The F-matrix expressions of inverted-L-type four-terminal networks, each involving an element with the power-law conductivity σ(ω)ωa (0a1) connected to a resistance R, an inductance L or a capacitance C, were derived using the standard procedures of Laplace transformation, indicating that the exponents of the complex angular frequency s, so far limited to the integers for the transmission circuits with finite elements, can be extended to the real numbers. The responses to a step voltage calculated show hysteretic behavior reflecting the resistance-capacitance ambivalent nature of the power-law conductivity.

  • Scheduling a Task Graph onto a Message Passing Multiprocessor System

    Tsuyoshi KAWAGUCHI  

     
    PAPER-Combinational/Numerical/Graphic Algorithms

      Vol:
    E75-A No:6
      Page(s):
    670-677

    In this paper we study the problem of scheduling parallel program modules onto an MPS (message passing multiprocessor system) so as to minimize the total execution time. Each node in the interconnection network of the MPS has buffers at its input ports to store messages waiting for the transmission. An algorithm for finding a route which minimizes the communication delay of a message to be sent between a processor-pair is first given. Next, we present heuristic algorithms for scheduling program modules onto the MPS. These algorithms use the above routing algorithm. The performances of the proposed algorithms are estimated by using simulation experiments.

  • Parallel VLSI Processors for Robotics Using Multiple Bus Interconnection Networks

    Bumchul KIM  Michitaka KAMEYAMA  Tatsuo HIGUCHI  

     
    PAPER-Robot Electronics

      Vol:
    E75-A No:6
      Page(s):
    712-719

    This paper proposes parallel VLSI processors for robotics based on multiple processing elements organized around multiple bus interconnection networks. The advantages of multiple bus interconnection networks are generality, simplicity of implementation and capability of parallel communications between processing elements, therefore it is considered to be suitable for parallel VLSI systems. We also propose the optimal scheduling formulated in an integer programming problem to minimize the delay time of the parallel VLSI processors.

  • An Approximate Algorithm for Decision Tree Design

    Satoru OHTA  

     
    PAPER-Optimization Techniques

      Vol:
    E75-A No:5
      Page(s):
    622-630

    Efficient probabilistic decision trees are required in various application areas such as character recognition. This paper presents a polynomial-time approximate algorithm for designing a probabilistic decision tree. The obtained tree is near-optimal for the cost, defined as the weighted sum of the expected test execution time and expected loss. The algorithm is advantageous over other reported heuristics from the viewpoint that the goodness of the solution is theoretically guaranteed. That is, the relative deviation of the obtained tree cost from the exact optimum is not more than a positive constant ε, which can be set arbitrarily small. When the given loss function is Hamming metric, the time efficiency is further improved by using the information theoretical lower bound on the tree cost. The time efficiency of the algorithm and the accuracy of the solutions were evaluated through computational experiments. The results show that the computing time increases very slowly with an increase in problem size and the relative error of the obtained solution is much less than the upper bound ε for most problems.

  • Improvement of Contactless Evaluation for Surface Contamination Using Two Lasers of Different Wavelengths to Exclude the Effect of Impedance Mismatching

    Akira USAMI  Hideki FUJIWARA  Noboru YAMADA  Kazunori MATSUKI  Tsutomu TAKEUCHI  Takao WADA  

     
    PAPER-Semiconductor Materials and Devices

      Vol:
    E75-C No:5
      Page(s):
    595-603

    This paper describes a new evaluation technique for Si surfaces. A laser/microwave method using two lasers of different wavelengths for carrier injection is proposed to evaluate Si surfaces. With this evaluation system, the effect of impedance mismatching between the microwave probe and the Si wafer can be eliminated. These lasers used in this experiment are He-Ne (wavelength633 nm, penetration depth3 µm) and YAG lasers (wavelength1060 nm, penetration depth500 µm). Using a microwave probe, the amount of injected excess carriers can be detected. These carrier concentrations are mainly dependent on the condition of the surface, when carriers are excited by the He-Ne laser, and the condition of the bulk region, when carriers are excited by the YAG laser. We refer to microwave intensities detected by the He-Ne and YAG lasers as the surface-recombination-velocity-related microwave intensity (SRMI) and bulk-related microwave intensity (BRMI), respectively. We refer to the difference between SRMI and BRMI as relative SRMI (R-SRMI), which is closely related to the surface condition. A theoretical analysis is performed and several experiments are conducted to evaluate Si surfaces. It is found that the R-SRMI method is better suited to surface evaluation then conventional lifetime measurements, and that the rdliability and reproducibility of measurements are improved.

  • A Linear-Time Algorithm for Computing All 3-Edge-Connected Components of a Multigraph

    Satoshi TAOKA  Toshimasa WATANABE  Kenji ONAGA  

     
    PAPER

      Vol:
    E75-A No:3
      Page(s):
    410-424

    The subject of the paper is to propose a simple O(|V|+|E|) algorithm for finding all 3-edge-components of a given undirected multigraph G=(V, E). An 3-edge-connected component of G is defined as a maximal set of vertices such that G has at least three edge-disjoint paths between every pair of vertices in the set. The algorithm is based on the depth-first search (DFS) technique. For any fixed DFS-tree T of G, cutpairs of G are partitioned into two types: a type 1 pair consists of an edge of T and a back edge; a type 2 pair consists of two edges of T. All type 1 pairs can easily be determined in O(|V|+|E|) time. The point is that an edge set KE(T) in which any type 2 pair is included can be found in O(|V|+|E|) time. All 3-edge-components of G appear as connected components if we delete from G all edges contained in type 1 pairs or in the edge set KE(T).

  • Translucent Multiuser Interface for Realtime Collaboration

    Hiroshi ISHII  

     
    INVITED PAPER

      Vol:
    E75-A No:2
      Page(s):
    122-131

    The new notion of "multiuser interface", an interface for groups working together in a shared workspace, originated from the expansion of CSCW research and the spread of the groupware concept. This paper introduces a new multiuser interface design approach based on the translucent video overlay technique. This approach was realized in the multimedia desktop conference system Team WorkStation. Team WorkStation demonstrates that this translucent video overlay technique can achieve two different goals: (1) fused overlay for realizing the open shared workspace, and (2) selective overlay for effectively using limited screen space. This paper first describes the concept of open shared workspace and its implementation based on the fused overlay technique. The shared work window of Team-WorkStation is created by overlaying translucent individual workspace images. Each video layer is originally physically separated. However, because of the spatial relationships among marks on each layer, the set of overlaid layers provides users with sufficient semantics to fuse them into one image. The usefulness of this cognitive fusion was demonstrated through actual usage in design sessions. Second, the problem of screen space limitation is described. To solve this problem, the idea of ClearFace based on selective overlay is introduced. The ClearFace idea is to lay translucent live face video windows over a shared work window. Through the informal observations of experimental use in design sessions, little difficulty was experienced in switching the focus of attention between the face images and the drawing objects. The theory of selective looking accounts for this flexible perception mechanism. Although users can see drawn objects behind a face without difficulty, we found that users hesitate to draw figures or write text over face images. Because of this behavior, we devised the "movable" face window strategy.

  • Coupled Star Network: A New Configuration for Optical Local Area Network

    Takeshi OTA  

     
    PAPER-Communication Networks and Service

      Vol:
    E75-B No:2
      Page(s):
    67-75

    Theoretical network analysis of a network constructed of "Interconnectable Star Couplers" whose all diagonal elements of transmission matrix are zero is investigated. Under certain connection rules, Interconnectable Star Coupler can be connected each other without oscillation and ghost formation. The rules are: (1) Network should not contain any loop. (2)Only single port pair should be connected between neighbor star couplers. (3)Network shold not contain any usual star coulpler. "Coupled Star Network", which is constructed under the connection rules, is able to form Cascade Star topology, Stratified Star topology and their mixed topology. It is shown that the Coupled Star Network is equivalent to a large Interconnectable Star Coupler so that bidirectional communication, which can add confidentiality to the broadcasting bus and doubles communication capacity, is available. A new configuration of Coupled Star Network using passive Interconnectable Star Couplers and optical amplifiers is proposed. This network has two separated bidirectional communication channel which can be applied for so-called Multimedia LAN. As a result of comparison between Cascade Star topology and Stratifide Star topology, it is shown that the latter topology is superior to former topology, from the view point of signal degeneration and maximum round trip delay time. Cascade Star topology, however, is superior to Stratified Star topology from the angle of total fiber length. Accordingly, optimized network topology is thought to be mixed topology of these.

  • Polynomial-Time Identification of Strictly Regular Languages in the Limit

    Noriyuki TANIDA  Takashi YOKOMORI  

     
    PAPER

      Vol:
    E75-D No:1
      Page(s):
    125-132

    This paper concerns a subclass of regular languages, called strictly regular languages, and studies the problem of identifying the class of strictly regular languages in the limit from positive data. We show that the class of strictly regular languages (SRLs) is polynomial time identifiable in the limit from positive data. That is, there is an algorithm that, for any strictly regular language L, identifies a finite automaton accepting L, called a strictly deterministic finite automaton (SDFA) in the limit from positive data, satisfying the property that the time for updating a conjecture is bounded by O(mN2), where m is the cardinality of the alphabet for L and N is the sum of lengths of all positive data provided. This is in contrast with the fact that the class of regular languages is not identifiable in the limit from positive data.

  • Leaf Reduction Theorem on Time- and Leaf-Bounded Alternating Turing Machines

    Hiroaki YAMAMOTO  

     
    PAPER

      Vol:
    E75-D No:1
      Page(s):
    133-140

    There have been several studies related to a reduction of the amount of computational resources used by Turing machines. As consequences, Linear speed-up theorem", tape compression theorem" and reversal reduction theorem" have been obtained. In this paper, we discuss a leaf reduction theorem on alternating Turing machines. Recently, the result that one can reduce the number of leaves by a constant factor without increasing the space complexity was shown for space- and leaf-bounded alternating Turing machines. We show that for time- and leaf-bounded alternating Turing machines, the number of leaves can be reduced by a constant factor without increasing time used by the machine. Therefore, our result says that a constant factor on the leaf complexity does not affect the power of time- and leaf-bounded alternating Turing machines.

  • Optimal Grain Size Determination for Tree-Structured Parallel Programs

    Tsuyoshi KAWAGUCHI  

     
    PAPER

      Vol:
    E75-D No:1
      Page(s):
    35-43

    In this paper we study the problem of scheduling a tree-structured program on multiprocessors so as to minimize the total execution time, which includes communication delay between processors. It is assumed in the problem that a sufficiently large number of processors are available. It is known that if the program structures are restricted to be out-trees, the problem can be solved in O(n2) time, where n denotes the number of modules of a program. However, this problem is known to be NP-hard if the program structures are allowed to be in-trees. Up to now, no optimal algorithm, except an obvious one, was known for the latter case while some approximation algorithms were shown. We present an optimization algorithm with a nontrivial time bound O((1.52)nn log n) for the in-tree case.

2201-2217hit(2217hit)