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Akira YAMAZAKI Fukashi MORISHITA Naoya WATANABE Teruhiko AMANO Masaru HARAGUCHI Hideyuki NODA Atsushi HACHISUKA Katsumi DOSAKA Kazutami ARIMOTO Setsuo WAKE Hideyuki OZAKI Tsutomu YOSHIHARA
The voltage margin of an embedded DRAM's sense operation has been shrinking with the scaling of process technology. A method to estimate this margin would be a key to optimizing the memory array configuration and the size of the sense transistor. In this paper, the voltage margin of the sense operation is theoretically analyzed. The accuracy of the proposed voltage margin model was confirmed on a 0.13-µm eDRAM test chip, and the results of calculation were generally in agreement with the measured results.
Takeshi FUJINO Akira YAMAZAKI Yasuhiko TAITO Mitsuya KINOSHITA Fukashi MORISHITA Teruhiko AMANO Masaru HARAGUCHI Makoto HATAKENAKA Atsushi AMO Atsushi HACHISUKA Kazutami ARIMOTO Hideyuki OZAKI
A low power 16 Mb embedded DRAM (eDRAM) macro is fabricated using 0.15 µm logic -based embedded DRAM process technology. A 0.5 µm2 CUB (