A new line simulator, SEMALIS has been developed. This simulator can handle complicated lot processings to maintain processing quality and efficient line operations to improve line performance. The current manufacturing line consists of five resource models: lot, process sequence, equipment, lot processing, and line operations. The parameters of these models are defined so as to accurately reflect the state of the line operations. From our simulation results, we confirmed that SEMALIS accurately identifies bottlenecks or starvations where equipment can be added or reduced to optimize equipment utilization through resource planning, and that SEMALIS can also be used to evaluate the long-term effects of line operating methods on the line performance of ASIC manufacturing lines.

A novel method has been developed to improve the dry etching selectivity of aluminum alloy with respect to photoresist by implanting ions into the patterned photoresist. The selectivity becomes 7.5, which is 5 times higher than that of the unimplanted case. Accordingly, this technology is very promising for fabricating multi-level interconnections in sub-half micron LSIs.

The realization of scientific manufacturing of ULSIs in the 21st century will require the development of a technical infrastructure of "Ultra Clean Technology" and the firm establishment of the three principles of high performance processes. Three principles are 1)Ultra Clean Si Wafer Surface, 2)Ultra Clean Processing Environment, and 3)Perfect Parameter controlled process. This paper describes the methods of resolving the problems inherent in Ultra Clean Technology, taking as examples issues in quarter-micron or more advanced semiconductor process and manufacturing equipment, particularly when faced with the challenges of plasma dry etching. Issues indispensable to the development of tomorrow's highly accurate and reliable plasma dry etching equipment are the development of technologies for the accurate measurement of plasma parameters, ultra clean gas delivery systems, chamber cleaning technology on an in-situ basis, and simulating the plasma chemistry.This paper also discusses the standardization of semiconductor manufacturing equipment, which is considered one of the ways to reduce the steep rise in production line construction costs. The establishment of Ultra Clean Technology also plays a vital role in this regard.

Estimating the macroscopic demand for telephones is essential to long-term planning construction of telecommunication networks facilities. Although there are several useful forecast equations, they need some types and/or vast amounts of data that are sometimes unavailable, especially in developing countries. This paper presents a sophisticated telephone demand estimation technique that is based on the demands of residential and business users. It uses several parameters to estimate the increase in telephone demand. A simplified equation is also presented that is a function of only one parameter: normalized gross domestic product (GDP) per capita. This simplified equation is shown to be useful by using data for more than ten countries.

A novel technique for evaluation of charge build-up in semiconductor wafer processing such as ion implantation, plasma etching and plasma enhanced chemical vapor deposition by using the breakdown of MOS capacitors with charge collecting electrodes (antenna) is proposed. The charge build-up during high beam current ion implantation is successfully evaluated by using this technique. The breakdown sensitivity of a MOS capacitor is improved by using a small area MOS capacitor with a large area antenna electrode. To estimate charge build-up on wafers quantitatively, the best combination of gate oxide thickness, substrate type, MOS capacitor area and antenna ratio should be carefully chosen for individual charge build-up situation. The optimum structured antenna MOS capacitors which relationship between QBD and stressing current density was well characterized give us very simple and quantitative charge build-up evaluation. This technique is very simple and useful to estimate charge build-up as compared with conventional technique by suing EEPROM devices or large area MOS capacitors.

An architecture for a high-density nonvolatile memory with ferroelectric capacitors is proposed and simulated. The architecture includes: (1) the operation procedure for DRAM-like memory cells with a Vcc/2 common plate, (2) commands and pin arrangement compatible with those of DRAMs. The resulting ferroelectric memory is expected to show, in addition to nonvolatility, high performance in terms of speed, active power dissipation, and read endurance. In addition, the memory can be handled in the same way as DRAMs. The proposed basic operations are confirmed by using circuit simulations, in which an equivalent circuit model for ferroelectirc capacitors is incorporated. A problem remaining with the architecture is low write endurance due to fatigue along with polarization switching. Designing the reference-voltage generator for 1T1C (one-transistor and one-capacitor) cells, while considering signal reduction along with fatigue, will be another issue for achieving high-density comparable to that of DRAMs.

This paper presents a new internal image representation, in which the scene is encoded into a three-intensity-level image. This representation is generated by Laplacian-Gaussian filtering followed by dual-thresholding. We refer to this imege as three-level broad-edge representation. It supresses the high frequency noise and shading in the image and encodes the sign of relative intensity of a pixel compared with surrounding region. Image model search based on cross correlation using this representation is as reliable as the one based on gray normalized correlation, while it reduces the computational cost by 50 times. We examined the reliability and realtime performance of this method when it is applied to an industrial object recognition task. Our prototype system achieves 3232 image model search from the 128128 pixel area in 2 milli-seconds with a 9 MHz pixel clock image processor. This speed is fast enough for searching and tracking a single object at video frame rate.

In VLSI or PCB layout, one often encounters a region that is either of rectilinear shape or can be approximated by a rectilinear region. Although many placement methods have been proposed, most of them are applicable only to rectangular regions. For these algorithms to be applied to a rectilinear region, two processing steps, region partitioning and rectangular region cell placement are necessary. Hence, the placement results are so far dependent on the locations of the regions partitioned and frequently become trapped in local minima. Recently, neural networks have been suggested as a new way to resolve the cell placement problem. This paper proposed a unified modeling method that uses a neural net model with additional calibration nodes to model rectilinear region cell placement. In this method, the ideal distance between cells is preserved to simultaneously minimize both the total wire length and the module overlap. Unlike traditional approaches, the proposed algorithm requires only a single processing step. Experiments have been conducted to verify the performance of the proposed algorithm. The total wire length obtained by our method is shorter than those generated by previous methods.

This work deals with thermal-noise modeling for silicon vertical bipolar junction transistors (BJTs) and relevant integrated circuits (ICs) operating at low currents. The two-junction BJT compact model is consistently derived from the thermal-noise generalization of the Shockley semiconductor equations developed in work which treats thermal noise as the noise associated with carrier velocity fluctuations. This model describes BJT with the Itô non-linear stochastic-differential-equation (SDE) system and is suitable for large-signal large-fluctuation analysis. It is shown that thermal noise in silicon p-n-junction diode contributes to "microplasma" noise. The above model opens way for a consistent-modeling-based design/optimization of bipolar device noise performance with the help of theory of Itô's SDEs.

Based on a simple model for the statistical error characteristics of range sensing, a numerical scheme called renormalization is presented for optimally fitting a planar surface to data points obtained by range sensing. The renormalization method has the advantage that not only an optimal fit is computed but also its reliability is automatically evaluated in the form of the covariance matrix. Its effectiveness is demonstrated by numerical simulation. A scheme for visualizing the reliability of computation by means of the primary deviation pair is also presented.

In order to estimate elasticity distribution of living soft tissue by ultrasonic pulse-echo method, we developed an algorithm by which we estimate 2-D displacement vector field from two successive rf echo data frames. The algorithm estimates a displacement vector iteratively by matching the phase characteristics of the local regions of two data frames. The estimation process is composed of coarse one and the fine one. In the coarse estimation process, the displacement is estimated by detecting the peak of the 2-D cross-correlation function. In the fine process, the displacement is estimated iteratively by shifting the 2nd frame data so that the phase characteristics matches with that of the 1st frame data. In each iterative step of both processes, the estimated displacement vector field is spatially smoothed. This proposed algorithm exhibits excellent performance in obtaining accurate and smooth distribution of displacement vector which is required to obtain strain distribution and finally shear modulus distribution. We conducted an experiment on an agar phantom which has inhomogeneous shear modulus distribution. Using the proposed method, we obtained 2-D displacement field with reasonable accuracy. We reconstructed a relative shear modulus map using axial strain assuming 1-D stress condition. The reconstructed map using the calculated axial strain through 2-D displacement estimation algorithm was satisfactory, and was clearly superior to the one through 1-D displacement estimation algorithm. The proposed 2-D displacement field estimation algorithm seems to be a versatile and powerful tool to measure strain distribution for the purpose of tissue elasticity estimation under various deformation conditions.

We propose a distributed operation system platform for optical cable networks. This distributed platform is an extension of the previously proposed platform for a flexible cable network operation. The concept of the unit platform has been proposed for the distributed operation system platform. By using this concept, we discuss the system upgrade including the connection to other operation systems. We use an object-oriented software technology for designing the distributed operation system platform. The prototype system has been constructed using C++ programing language and the evaluated results are shown.

The authors have studied the demagnetization phenomenon which is observed in a conventional CoCrTa/CoZrNb double-layered (DL) perpendicular recording medium. The authors have also investigated the effects of an in-plane hard magnetic layer in a triple-layered (TL) perpendicular recording medium. The in-plane hard magnetic underlayer is made of CoSm or CoCrTa/Cr and is laid under the CoZrNb soft magnetic layer. In the DL medium, a demagnetization phenomenon i.e. decrease of the readback signal, is observed when the CoCrTa layer has a strong perpendicular orientation and the CoZrNb underlayer has a low coercivity. The amount of the signal decrease depends strongly on the accumulated disk revolutions. This demagnetization is considered to be caused by fact that the recorded magnetization in the CoCrTa layer is reduced by the magnetic field generated from the domain walls in the CoZrNb layer, since the CoZrNb layer is very sensitive to a magnetic environment such as geo-magnetism and domain walls move as the disk rotates. On the other hand in the TL medium, the hard magnetic layer has an effect of pinning the magnetic domain in the CoZrNb layer, by which the demagnetization problem is successfully prevented. The hard magnetic layer remarkably reduces the domain walls in the CoZrNb layer and contributes to medium noise reduction. Thus the TL medium presents a higher SN ratio than DL medium.

In this paper, a new optimum input encoding algorithm with m-out-of-2m code which is called Half-Hot Code is presented. By applying Half-Hot Code to the input encoding in PLA-based digital system, the logic functions of the system turn out to be unate functions, thus, the number of bit-lines of PLA may be reduced. The proposed method further reduces the number of product-lines of PLA optimally. In this code assignment procedure, computed Boolean subspaces satisfying suggeset two conditions are assigned to each partitioned subset of digital input variables which are obtained by disjoint minimization or other techniques. As an experiment to evaluate the method, the state assignment for finite state machines of two-lavel implementation is considered. Specifically, the proposed Half-Hot Code assignment is compared with arbitrary Half-Hot Code assignment. The results show that the optimum encoding is superior to an arbitrary assignment up to about 24% in the number of product-lines of PLA.

This paper is concerned with synthesizing VLSI array processors from iterative algorithms. Our primary objective is to obtain the highest processor efficiency but not the shortest completion time. Unlike most of the previous work that assumes the index space of the given iterative algorithm to be boundless, the proposed method takes into account the effects of the boundaries of the index space. Due to this consideration, the pseudo-dependence relations are excluded, and most of the independent computations can therefore be uniformly grouped. With the method described in this paper, the index space is partitioned into equal-size blocks and the corresponding computations are systematically and uniformly mapped into processing elements. The synthesized VLSI array processors possess the attractive feature of very high processor efficiency, which, in general, is superior to what is derived from the conventional linear transformation methods.

With a view to applying to the active matrix displays, micromechanical electrostatic switches having Si-N both-ends-fixed beam of size 1.4 µm by 23 µm grown with LP-CVD on Si wafer were studied about its kinetic switching characteristics, especially its switching speed and hysteresis behavior. Electrostatic beam sticking problems were improved with the additional inverse polarity and short duration pulse following on the turn-on signal. The switching beam deflection of 0.16 µm with the switching time of less than 100 nsec. was measured by tightly focused laser interferometric method. Observed turn-on threshold voltages were more than 30 V, and the on/off hysteresis widths were from one third to two thirds of its threshold voltage. The memory function was experimented for the 2 msec. long holding period with the hold voltage of 25 V following on the writing pulse with the duration of 2 µsec. and the amplitude of 32 V. Now, planarization process has been considered to imtroduce the contact electrodes that were not built-in for these experiments. Although conductive actual switches were not tested, with the obtained results, it seems that the micromechanical electrostatic switch has the large potentials as an active matrix element in display panel especially in electro-luminescent devices or field-emission devices.

In this paper face feature detection and tracking are discussed, using methods called edge pixel counting and deformable circular template matching. Instead of utilizing color or gray scale information of the facial image, the proposed edge pixel counting method utilizes the edge information to estimate the face feature positions such as eyes, nose and mouth, using a variable size face feature template, the initial size of which is predetermined by using a facial image database. The method is robust in the sense that the detection is possible with facial images with different skin color and different facial orientations. Subsequently, by using a deformable circular template matching two iris positions of the face are determined and are used in the edge pixel counting, to track the features in the next frame. Although feature tracking using gray scale template matching often fails when inter frame correlation around the feature areas are very low due to facial expression change (such as, talking, smiling, eye blinking etc.), feature tracking using edge pixel counting can track facial features reliably. Some experimental results are shown to demonstrate the effectiveness of the proposed method.

One approach to develop software efficiently is to reuse existing software by modifying a part of it. However, modifying software will often introduce unexpected side effects into other parts of it. As a result, it costs much time and care to modify the software. So, in order to modify software efficiently, we have proposed a functional model to represent information about side effects caused by modification and a model based supporting system for modifying software. So far, however, an expert software developer must describe the entire functional model of the target software through the analysis of practical modifying processes. This will be an unnecessary burden on him. Moreover, the larger target software becomes, the harder the model construction becomes. Therefore, an automatic constructing method of the functional model is needed in order to solve this problem. So, this paper considers a method of acquiring useful interaction information by learning from training examples of modification. However, in our application domain, it seems that it is impossible to make complete domain theory and to prepare a large number or training examples in advance. Therefore, our learning method involves an integration of explanation-based learning (EBL) from positive examples of modification generated by the user and Similarity-based learning (SBL) from positive or negative examples generated by the user and the learning system. As a result, our method can acquire valid knowledge about the interaction from not so many examples under incomplete theory. Then, this paper presents a constructing method, in which our proposed learning method is incorporated, of a functional model. Finally, this paper demonstrates construction of the functional model in the domain of an event-driven queueing simulation program according to our learning method.

In this paper, mutual coupling S21 between RMSA (ring-shaped microstrip antenna) elements was estimated by the EMF method based on the cavity model. Then, the validity of the proposed method was tested by experiments. The experiments confirmed satisfactory agreement between the computed and experimental data for S21 in both E- and H-plane arrangements. In addition, a circularly polarized planar array composed of R-MSA elements was designed on the basis of the data of S21. The experimental results of such a planar array demonstrated high performance in radiation pattern as well as axial ratio property. Furthermore, the active reflection coefficient Γ in the R-MSA array was also investigated in both equilateral and square arrangements. The computed results of active reflection coefficient in the array demonstrated high performance in both arrangements.

This paper presents a theoretically best algorithm within the framework of our image noise model for reconstructing 3-D from two views when all the feature points are on a planar surface. Pointing out that statistical bias is introduced if the least-squares scheme is used in the presence of image noise, we propose a scheme called renormalization, which automatically removes statistical bias. We also present an optimal correction scheme for canceling the effect of image noise in individual feature points. Finally, we show numerical simulation and confirm the effectiveness of our method.