This paper describes small AlGaAs/GaAs HBT's for low-power and high-speed integrated circuits. The device fabrication is based on a new bridged base electrode technology that permits emitter width to be defined down to 1 µm. The new technology features oxygen-ion implantation for emitter-base junction isolation and zinc diffusion for extrinsic base formation. The oxygen-ion implanted emitter-base junction edge has been shown to provide a periphery recombination current much lower than that for the previous proton implanted edgs, the result being a much higher current gain particularly in small devices. The zinc diffusion offers high device yield and good uniformity in device characteristics even for a very thin (0.04 µm) base structure. An HBT with emitter dimensions of 12.4 µm2 yields an fT of 103 GHz and an fmax of 62 GHz, demonstrating that the new technology has a significant advantage in reducing the parasitic elements of small devices. Fabricated one-by-eight static frequency dividers and one-by-four/one-by-five two-modulus prescalers operate at frequencies over 10 GHz. The emitters of HBT's used in the divider are 12.4 µm2 in size, which is the smallest ever reported for AlGaAs/GaAs HBT IC's. These results indicate that the bridged base electrode technology is promising for developing a variety of high-speed HBT IC's.

The performance of a drift-diffusion device simulator using massively parallel processors is improved by modifying the preconditioner for the iterative solver and by improving the initial guess for the Newton loop. A grid-to-processor mapping scheme is presented to implement the partitioned natural ordering preconditioner on the CM-5. A new preconditioner called the block partitioned natural ordering, which may include fill-ins, improves performance in terms of CPU time and convergence behavior on the CM-5. A multigrid discretization to implement a block Newton initial guess routine is observed to decrease the CPU time by a factor of two. Extensions of the initial guess routine show further reduction in the final fine grid linear iterations.

A simulation model for arsenic diffusion in polycrystalline silicon has been developed considering dynamic dopant clustering and polysilicon grain growth kinetics tightly coupled with dopant diffusion and segregation. It was assumed that the polysilicon layer consists of column-like grains surrounded by thin grain-boundaries, so that one dimensional description is permissible for dopant diffusion. The dynamic clustering model was introduced for describing arsenic activation in polysilicon grains, considering the solubility limit increase for arsenic in a polysilicon. For a grain-growth calculation, a previous formula was modified to include a local concentration dependence. The simulation results show that these effects are significant for a high dose implantation case.

Recently, high-dose implantation and low temperature annealing have become one of the key techniques in shallow junction formation. To fabricate shallow junction in quarter-micron CMOS VLSIs, it is well known being important to evaluate the transient enhanced diffusion (TED) of implanted dopants at low temperature furnace annealing, which is caused by the damages of implantation. We have newly studied the TED phenomena by a compact empirical method. This approach has merits of simplicity and better physical intuition, because we can use only minimal parameters to describe the TED phenomena. The other purpose of this work is to evaluate two-dimensional transient enhanced diffusion focusing on phosphorus implant and furnace annealing. Firstly, we defined effective diffusivity of the TED and determined extraction procedure of the model parameters. Number of the TED model parameters is minimized to two, which describe effective enhanced diffusivity and its activation energy. The parameters have been extracted from SIMS profile data obtained from samples which range 1013-31015 cm-2 and 850-950 for phosphorus implanted dose and annealing temperature, respectively. Simulation results with the extracted transient enhanced diffusion parameters show good agreements well with the SIMS data within 2% RMS-error. Critical doses for phosphorus enhanced diffusion have been determined in 950 annealing condition. No transient enhanced diffusion is observed at 950 under the implant dose of 11013 cm-2. Also the transient enhanced diffusivity is leveled off over the dose of 11014 cm-2. It is seen that the critical dose in TED phenomena might be temperature dependent to a certain extent. We have also verified that two-dimensional effect of the TED phenomena experimentally. Two-dimensional phosphorus n- layer is chosen to verify the simulation. It was concluded that the TED has isotropic nature in phosphorus n- diffusion formation.

The small-signal negative resistance of QWITT (Quantum Well Transit-Time) diodes is calculated including the effect of field-dependent diffusion coefficient in the frequency range of 10 to 300 GHz. The drift velocity transient effect is also included. The result is compared with those obtained by using constant diffusion coefficients at average electric fields.

Phosphorus-doped amorphous or polycrystalline silicon can yield a conformal, low resistance, thermallystable plug for the high-aspect-ratio, sub-half-micron contactholes found in current development prototypes of future 64 and 256 Mega-bit DRAMs. When directly contacted to a silicide layer, however, such as WSix found in polycide gate or bit line metallization/contact structures, the outdiffusion of phosphorus from the doped-silicon layer into the silicide can occur, resulting in an increase in resistance. The characteristics of both the doped-silicon and WSix layers influence the outdiffusion. The grain size of the doped silicon appears to control diffusion at the WSix/doped-silicon interface while the transition of WSix from an as-deposited amorphous to a post-annealed polycrystalline state appears to help cause uniform phosphorus diffusion throughout the silicide film. The results of phosphorus pre-doping of the silicide to reduce the effects of outdiffusion are dependent upon the relative material volumes and interfacial areas of the layers. Due to the effectiveness of the TiN barrier layer/Ti contact layer structure used in Al-based contacts, Ti and TiN were evaluated on their ability to prevent phosphorus outdiffusion. Ti reacts easily with doped silicon and to some extent with WSix, thereby allowing phosphorus to outdiffuse through the TiSix into the overlying WSix. TiN, however, is very effective in preventing phosphorus outdiffusion and preserving polycide interface smoothness. A WSix/TiN/Ti metallization layer on an in situ-doped (ISD) silicon layer with ISD silicon-plugged contactholes yields contact resistances comparable to P+-implanted or non-implanted WSix layers on similar ISD layers/plugs for contact sizes greater than approximately 0.5 µm but for contacts of 0.4 µm or below the trend in contact resistance is lowest for the polycide with TiN barrier/Ti contact interlayers. A 20 nm-thick TiN film retains its barrier characteristics even after a 4-hour 850 anneal and is applicable to the silicide-on-doped-silicon structures of future DRAM and other ULSI devices.

Improvement of fatigue behavior of a fusion spliced portion on a carbon-coated fiber is achieved by recoating carbon using a thermal-CVD process with a CO2 laser as a local heat source. The fatigue parameters, so-called n-values, of 121 and 94 are obtained on the non-spliced portion and the spliced portion, respectively. Assuming a life time prediction model, these high values have been proved to have an advantage in a long-term reliability and to be sufficient in a practical submarine cable use.

This paper describes a method for describing a three-dimensional (3-D) scene by integrating color and range data. Range data is obtained by a feature-based stereo method developed in our laboratory. A color image is segmented into uniform color regions. A plane is fitted to the range data inside a segmented region. Regions are classified into three types based on the range data. A certain types of regions are merged and the others remain unless the region type is modified. The region type is modified if the range data on a plane are selected by removing of the some range data. As a result, the scene is represented by planar surfaces with homogeneous colors. Experimental results for real scenes are shown.

Diffusion of phosphorus impurities from a polycrystalline silicon films into a silicon substrate was investigated as a function of the mean concentration of phosphorus in a polycrystalline silicon film at the first diffusion stage. We presented that good control of the redistribution of implanted phosphorus impurities was possible by optimizing the normalized dose, which is the value: [the total dose of phosphorus impurities]/[the polycrystalline silicon film thickness], in the case of samples both with and without an arsenic doped layers. In the range where the normalized dose was less than 1.52.51020 cm-3, deeper junctions were formed in samples with an arsenic doped layer. In the range where the normalized dose was more than 1.52.51020 cm-3, however, deeper junctions were formed in samples without any arsenic doped layer rather than in samples with an arsenic doped layer. These results mean that formation of the junction in the device structure where a high concentration phosphorus doped polysilicon layer is stacked on to the high concentration arsenic layer embeded at the surface of the substrate can be restricted by optimizing the normalized dose. Moreover, a trade-off relationship between suppressing phosphorus diffusion and maintaining low contact resistance against normalized doses was also observed.

Optical fiber cable systems are being developed in many countries for subscriber loops as the infrastructure to realize B-ISDN (Broadband Integrated Services Digital Network). The present systems are DLC (Digital Loop Carrier) systems which provide leased lines, POTS (Plain Old Telephone Services), and N-ISDN (Narrowband ISDN) services. Before FTTH (Fiber To The Home) networks can be implemented, their construction cost must be lowered to the level of the current metallic network. The FTTH network must also be easy to operate and maintain. In this paper, we describe optical fiber cables, splicing, and testing technologies used in the NTT cable networks, and introduce the technologies being developed to construct FTTH networks.

A Ge/Si structure grown by chemical vapor deposition (CVD) is angle-lapped and characterized by the micro-Raman spectroscopy. Near the interface, the phonon mode due to the Si-Ge bond is clearly observed, which indicates that a SiGe alloy is formed by the solid-phase interdiffusion at the interface. The thickness of the interfacial alloy layer is about 0.2 µm. Amount of residual strain is estimated by comparing the measured phonon frequencies with those predicted from the composition profie, but the shift due to the residual strain is not appreciable. Both the interdiffusion at the interface and the nearly complete relaxation of the lattice mismatch are attributed to the high growth temperature of the CVD sample.

The increase of surface microroughness on Si substrate degrades the electrical characteristics such as the dielectric breakdown field intensity (EBD) and charge to break-down (QBD) of thin oxide film. It has been found that the surface microroughness increases in the wet chemical process, particularly in NH4OH-H2O2-H2O cleaning (APM cleaning). It has been revealed that the surface microroughness does not increase at all if the NH4OH mixing ratio in NH4OH-H2O2-H2O solution is reduced from the conventional level of 1:1:5 to 0.05:1:5, and the room temperature ultrapure water rinsing is introduced right after the APM cleaning. At the same time, the APM cleaning with NH4OH-H2O2-H2O mixing ratio of 0.05:1:5 has been very effective to remove particles and metallic impurities from the Si surface. The surface microroughness dominating the electrical properties of very thin oxide films is strictly influenced by the wafer quality. The increase of surface microroughness due to the APM cleaning has varied among the wafer types such as Cz, FZ and epitaxial (EPI) wafers. The increase of surface microroughness in EPI wafer was very much limited, while the surface microroughness of FZ and Cz wafers gradually increase. As a result of investigating the amount of diffused phosphorus atoms into these wafers, the increase of the surface microroughness in APM cleaning has been confirmed to strongly depend on the silicon vacancy cluster concentration in wafer. The EPI wafer having low silicon vacancy concentration is essentially revealed superior for future sub-half-micron ULSI devices.

In recent years, ion implantation has become one of the key techniques in semiconductor fabrication. The annealing of the damage produced during implantation is, however, not fully understood. Ion implantation at high temperatures allows the time-resolved study of implantation-enhanced diffusion. During the process, point defects are generated by the ion implantation and consumed by recombination in the bulk as well as by diffusion to the surface and recombination there. With increasing temperatures, the recombination of point defects, which are acting as diffusion vehicles, results in reduced effective diffusion. Profiles processed above 900 show marked uphill diffusion at the surface caused by large gradients of the point defect concentrations. This uphill diffusion affirms the generally accepted pair diffusion theories. Since the point defects are in steady state even after process times which are short compared to the total process time, we are able to give a qualitative analysis of the dose dependence of the diffusion. By extensive numerical simulations, we could estimate the product of bulk recombination rate and equilibrium concentrations of self-interstitials and vacancies as well as the interface recombination velocity for the self-interstitials. The results obtained are in qualitative agreement with previous work of others. The results demonstrate, in fact, clearly the advantages of the method presented. But due to experimental problems concerning the temperature measurement, which have not been fully resolved up to now, the results have to be considered as crude estimates.