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Cheng-Yu HU Katsutoshi NAKATANI Hiroji KAWAI Jin-Ping AO Yasuo OHNO
To improve the high voltage performance of AlGaN/GaN heterojunction field effect transistors (HFETs), we have fabricated AlGaN/GaN HFETs with p-GaN epi-layer on sapphire substrate with an ohmic contact to the p-GaN (p-sub HFET). Substrate bias dependent threshold voltage variation (VT-VSUB) was used to directly determine the doping concentration profile in the buffer layer. This VT-VSUB method was developed from Si MOSFET. For HFETs, the insulator is formed by epitaxially grown and heterogeneous semiconductor layer while for Si MOSFETs the insulator is amorphous SiO2. Except that HFETs have higher channel mobility due to the epitaxial insulator/semiconductor interface, HFETs and Si MOSFETs are basically the same in the respect of device physics. Based on these considerations, the feasibility of this VT-VSUB method for AlGaN/GaN HFETs was discussed. In the end, the buffer layer doping concentration was measured to be 21017 cm-3, p-type, which is well consistent with the Mg concentration obtained from secondary ion mass spectroscopy (SIMS) measurement.
Shih-Dao WU Guo-Wei HUANG Kun-Ming CHEN Hua-Chou TSENG Tsun-Lai HSU Chun-Yen CHANG
RF MOSFET's are usually measured in common source configuration by a 2-port network analyzer, and the common gate and common drain S-parameters cannot be directly measured from a conventional 2-port test structure. In this work, a 4-port test structure for on-wafer measurement of RF MOSFET's is proposed. Four-port measurements for RF MOSFET's in different dimensions and the de-embedded procedures are performed up to 20 GHz. The S-parameters of the RF MOSFET in common source (CS), common gate (CG), and common drain (CD) configurations are obtained from a single DUT and one measurement procedure. The dependence of common source S-parameters of the device on substrate bias are also shown.
Hidetoshi IKEDA Kawori TAKAKUBO Hajime TAKAKUBO
A CMOS voltage reference circuit based on a voltage at the zero-temperature-coefficient point of drain current is proposed. The output voltage of the proposed circuit is variable by a substrate bias. The proposed circuit is simulated with a standard 0.8-µm CMOS technology. The output voltage keeps 800 mV, and its fractional temperature coefficient is 9.94 ppm/ over the temperature range from -100 to 150 at a zero-bias. The PSRR of the output voltage is -42.55 dB at 100 Hz. The minimum power-supply voltage is 2.1 V. The output voltage can be shifted down to 670 mV while maintaining its temperature-insensitivity.
Akira MOCHIZUKI Takahiro HANYU
A new multiple-valued current-mode (MVCM) logic circuit using substrate bias control is proposed for low-power VLSI systems at higher clock frequency. Since a multi-level threshold value is represented as a threshold voltage of an MOS transistor, a voltage comparator is realized by a single MOS transistor. As a result, two basic components, a comparator and an output generator in the MVCM logic circuit can be merged into a single MOS differential-pair circuit where the threshold voltages of MOS transistors are controlled by substrate biasing. Moreover, the leakage current is also reduced using substrate bias control. As a typical example of an arithmetic circuit, a radix-2 signed-digit full adder using the proposed circuit is implemented in a 0.18- µm CMOS technology. Its dynamic and static power dissipations are reduced to about 79 percent and 14 percent, respectively, in comparison with those of the corresponding binary CMOS implementation at the supply voltage of 1.8 V and the clock frequency of 500 MHz.
Tadahiro KURODA Tetsuya FUJITA Fumitoshi HATORI Takayasu SAKURAI
This paper describes a Variable Threshold-voltage CMOS technology (VTCMOS) which controls the threshold voltage (VTH) by means of substrate bias control. Circuit techniques to combine a switch circuit for an active mode and a pump circuit for a standby mode are presented. Design considerations, such as latch-up immunity and upper limit of reverse substrate bias, are discussed. Experimental results obtained from chips fabricated in a 0.3 µm VTCMOS technology are reported. VTH controllability including temperature dependence and influence on short channel effect, power penalty caused by the control circuit, substrate current dependence at low VTH, and substrate noise influence on circuit performance are investigated. A scaling theory is also presented for use in the discussion of future possibilities and problems involved in this technology.
Rimon IKENO Hiroshi ITO Kunihiro ASADA
We have been studying on subthreshold characteristics of SOI (Silicon-On-Insulator) MOSFET's in terms of substrate bias dependence using a one-dimensional subthreshold device simulator based on Poisson equation in an SOI multilayer structure for estimating structural parameters of real devices. Here, we consider the quantum mechanical effects in the electron inversion layer of thin SOI MOSFET's, such as the two-dimensionally quantized electron states and transports, with a self-consistent solver of Poisson and Schrodinger equations and a mobility model by the relaxation time approximation. From results of simulations, we found a significant difference between this model and the classical model and concluded that the quantum mechanical effects need to be considered in analizing thin-film SOI devices.
Hitoshi SUMIDA Atsuo HIRABAYASHI
The static and dynamic characteristics of the lateral IGBT on the SOI film when the collector voltage of the IGBT is applied to the substrate are invesigated for its application to the high side switch. The measurements on the blocking capability and the switching characteristics under an inductive load are carried out with varying the thickness of the SOI film. The 260 V IGBT can be fabricated on the 5 µm thick SOI film without the special device structure. It is confirmed that the switching speed depends strongly on the SOI film thickness, not on the substrate bias. The dynamic latch-up current during the turn-off transient increases with the decrease in the SOI film thickness. This is caused by the large transient substrate current. This paper exhibits that applying the collector voltage of the IGBT to the substrate makes it possible to improve the characteristics of the IGBT on the thin SOI film.