Dislocation-free thin silicon layers are created on the three kinds of substrates such as oxide film, synthetic quartz glass and sapphire. They are bonded with silicon wafers using hydrogen bonding at room temperature but without any adhesive, and their bonding are changed into covalent bonding at elevated temperature. Thick (2 µm) silicon layers are first produced by surface grinding and polishing, and then thinned to 0.1 µm by plasma assisted chemical etching (PACE). A multiple repeated process of thinning the silicon layer and annealing the bonded silicon/quartz and silicon/sapphire interface is applied for tight bonding between a silicon wafer and a quartz wafer, and a silicon wafer and a sapphire wafer which have different thermal expansion coefficients. In case of bonding with sapphire, oxide with 200 in thickness plays an important role in the preventions of void formation and diffusion of interface contaminants into the silicon layer.

This paper discusses how to provide selective broadcast communication for a group of multiple entities in a distributed system by using high-speed communication networks. In the group communication, protocol data units (PDUs) sent by each entity have to be delivered atomically in some order to all the destinations in the group. In distributed applications, each entity sends a PDU only to a subset rather than all the entities, and each entity needs to receive all the PDUs destined to it from every entity in the same order as they are sent. We name such a broadcast service a selective order-preserving broadcast (SP) service. In this paper, we discuss how to design a distributed, asynchronous protocol which provides the SP service for entities.

This paper proposes a buried-LATID structure featuring a peaked vertical profile around gate edge for the n- drain unlike the reported conventional LATID structure. As compared to the conventional LATID FETs, the deep-submicron buried-LATID FETs achieve improved circuit speed by 7% (50% compared to LDD FETs) due to suppressed gate-to-drain capacitance and improved lifetime by 10 times (300 times compared to LDD FETs). The buried-LATID FETs are very promising for deep-submicron MOSFETs to achieve improved performance and hot-carrier reliability at the same time.

This paper presents a linear time algorithm for testing whether or not there is a path ,vm> of an undiercted tree T (|V(T)|n) that coincides with a string ss1sm (i.e., label(v1)label(vm)s1sm). Since any path of the tree is allowed, linear time substring matching algorithms can not be directly applied and a new method is developed. In the algorithm, O(n/m) vertices are selected from V(T) such that any path pf length more than m 2 must contain at least one of the selected vertices. A search is performed using the selected vertices as 'bases' and two tables of size O(m) are constructed for each of the selected vertices. A suffix tree, which is a well-known-data structure in string matching, is used effectively in the algorithm. From each of the selected vertices, a search is performed with traversing the suffix tree associated with s. Although the size of the alphabet is assumed to be bounded by a constant in this paper, the algorithm can be applied to the case of unbounded alphabets by increasing the time complexity to O(n log m).

A sequence of nonnegative integers S=(s1, s2, , sn) is graphical if there is a graph with vertices v1,v2, ,vn such that deg(vi)=si for each i=1, 2, , n. The graphical degree sequence problem is： Given a sequence of nonnegative integers, determine whether it is graphical or not. In this paper, we consider several variations of the graphical degree sequence problem and give efficient algorithms.

Junction leakage current of trench isolation devices is strongly influenced by trench configuration. The origin of the leakage current is the mechanical stress that is generated by the differential thermal expansion between the Si substrate and the SiO2 filled isolation trench during the isolation forming process. A two-dimensional mechanical stress simulation was used to analyze trench-isolated devices. The simulated distribution and magnitude of stress were found to agree with Raman spectroscopic measurements of actual devices. The stress in the deeper regions between deep trenches is likely to increase greatly as the size of devices diminishes, so it is important to reduce this stress and thus suppress junction leakage current.

This paper describes an implementation of the finite element method to examine the effects of actual lip shape on the sound radiation. A three-dimensional finite element approach by Galerkin method was used. The accuracy of the calculation of finite element method for the sound radiation was tested by comparing it with the exact solutions for a circular piston radiator on an infinite baffle. Using a set of finite element models of the vocal tract, we calculated the responses to a pure tone input and the sound fields over the frequency range of 100 Hz-7 kHz. The transfer functions are examined in detail for vowels /a/ and /i/ when the shape of the actual lips is simplified as a planeradiation surface. The effects of lip shape on the distribution of sound pressures are also shown in both the vocal tract and the surrounding space of the mouth opening.

A new mobility model dependent upon electron concentration is presented for studying the screening effect on ionized impurity scattering. By coupling this model with the drift-diffusion and Hartree models, the effects of self-consistent and quasi-equilibrium screening on carrier transport in heavily doped systems are revealed for first time. The transport mechanism is found to be dominated by the electron-concentration-dependent mobility, and transconductance is shown to be determined by effective mobility and changes from degraded to enhanced characteristics with electron concentration modulation.

This paper describes Japanese spoken sentence recognition using hybrid language modeling, which combines the advantages of both syntactic and stochastic language models. As the baseline system, we adopted the HMM-LR speech recognition system, with which we have already achieved good performance for Japanese phrase recognition tasks. Several improvements have been made to this system aimed at handling continuously spoken sentences. The first improvement is HMM training with continuous utterances as well as word utterances. In previous implementations, HMMs were trained with only word utterances. Continuous utterances are included in the HMM training data because coarticulation effects are much stronger in continuous utterances. The second improvement is the development of a sentential grammar for Japanese. The sentential grammar was created by combining inter- and intra-phrase CFG grammars, which were developed separately. The third improvement is the incorporation of stochastic linguistic knowledge, which includes stochastic CFG and a bigram model of production rules. The system was evaluated using continuously spoken sentences from a conference registration task that included approximately 750 words. We attained a sentence accuracy of 83.9% in the speaker-dependent condition.

This paper briefly reviews recent studies on free-space photonic switches, and discusses classifications, applications and technical issues to be solved. The free-space photonic switch is a switch that uses light beam interconnections based on free-space optics instead of guided-wave optics. A feature of the free-space switch is its high-density three-dimensional structure that enables compact large-scale switches to be created. In this paper, the free-space switches are classified by their various attributes such as logical network configuration, path-establishment method, number of physical stages, signal-waveform transmission form, interconnection optics and so on. The logical network configuration (topological geometry or topology) is strongly related to the advantages of the free-space switches over the guided-wave switches. The path-establishment method (path-shifting/branching-and-gating) and the number of physical stages (single-stage/multistage) are related to physical switching characteristics. Signal-waveform transmission form (analog/digital) is related to switch application. Interconnection optics (imaging system/micro-beam system) is related to the density and volume of the switching fabric. Examples of the free-space switches (single-stage, analog multistage, digital multistage and photonic ATM switches) are described. Possible applications for analog switches are subscriber-line concentrators, inter-module connectors, and switching networks for parallel or distributed computer systems. Those for digital switches include multistage space-division switches in time-division circuit-switching or packet switching systems (including asynchronous transfer mode [ATM] switching system) for both communications switching systems and parallel/distributed computer systems. Technical issues of the free-space switches (system, device, assembly technique) must be solved before creating practical systems. In particular, the assembly technique is a key issue of the free-space switches.

Central switches are expected to operate at the rate of Terabit per second in high speed networks, like the B-ISDN. Photonic switches using lightwave technology based on wavelength division multiplexing (WDM) and frequency division multiplexing (FDM) are promising ones for high speed switching. Such lightwave networks are mainly divided into two groups, according to the number of hops required for packets to arrive at their destinations: single-hop networks such as networks using star coupler and multihop networks such as Manhattan Street Network and ShuffleNet. In this paper we focus our attention on multihop networks and propose a mesh network, referred to as RookNet, for high speed communication. The average transmission delay time and maximum throughput of RookNet is approximately analyzed. It is shown that, as the number of nodes goes to infinity, the maximum throughput aproaches 0.433 and 0.485 when each node is equipped with no internal buffer and internal buffers of infinite capacity for relayed packets, respectively.

A software package has been developed for simulating complex silicon and heterostructure devices in 3D. Device geometries are input with a mouse-driven geometric modeler, thus simplifying the definition of complex 3D shapes. Single components of the device are assembled through boolean operations. Tetrahedra are used for grid generation, since any plane-faced geometry can be tessellated with tetrahedra, and point densities can be adapted locally. The use of a novel octree-like data structure leads to oriented grids where desirable. Bad angles that prevent the convergence of the control volume integration scheme are eliminated mostly through topological transformations, thus avoiding the insertion of many redundant grid points. The discretized drift-diffusion equations are solved with an iterative method, using either a decoupled (or Gummel) scheme, or a fully coupled Newton scheme. Alternatively, generated grids can be submitted to a Laplace solver in order to calculate wire capacitances and resistances. Several examples of results illustrate the flexibility and effectiveness of this approach.

A fully three-dimensional simulation tool for modeling the ion implantation in arbitrarily complex three-dimensional structures is described. The calculation is based on the Monte Carlo (MC) method. For MC simulations of realistic three-dimensional structures the key problem is the CPU-time consumption which is primarily caused by two facts. (1) A large number of ion trajectories (about 107) has to be simulated to get results with reasonable low statistical noise. (2) The point location problem is very complex in the three-dimensional space. Solutions for these problems are given in this paper. To reduce the CPU-time for calculating the numerous ion trajectories a superposition method is applied. For the point location (geometry checks) different possibilities are presented. Advantages and disadvantages of the conventional intersection method and a newly introduced octree method are discussed. The octree method was found to be suited best for three-dimensional simulation. Using the octree the CPU-time required for the simulation of one ion trajectory could be reduced so that it only needs approximately the same time as the intersection method in the two-dimensional case. Additionally, the data structure of the octree simplifies the coupling of this simulation tool with topography simulators based on a cellular method. Simulation results for a three-dimensional trench structure are presented.

A unified model for frequency-dependent characteristics of transconductance and output resistance is presented that incorporates the dynamics of quasi-Fermi levels. Using this model, multiple-frequency dispersion and pulse-narrowing phenomena in GaAs MESFETs are demonstrated based on the drift-diffusion transport theory and a Schockley-Read-Hall-type deep trap model, where rate equations for multiple trapping processes are analyzed self-consistently. It is shown that the complex frequency dependence is due to both spatial and temporal effects of multiple traps.

This paper presents a view on coming photonic network in which machines are potential customer to the network. The network will be providing unlimited number of virtual free spaces in which point to point and broadcasting modes of information interchanges are taking place simultaneously. It is also pointed out that the Asynchronous Transfer Mode (ATM) should be evolved to support this type of network by using true photonic switching technology.

This paper describes a new free-space optical switch structure based on cascaded beam shifters (each consists of a liquid-crystal polarization controller array and a birefringent plate). This structure comprises 2-input, 2-output switching elements that are locally connected by links. It is applicable to a variety of switching networks, such as a Clos network. The switching network based on this structure is an analog switch that is transparent to signal format, bit rate, and modulation type, so it can handle various types of optical signals. Theoretical feasibility studies indicate that compact large-scale switches (i.e., 100-1000 ports) with relay lens systems can be implemented using beam shifters with a 0.4-dB insertion loss and a 30-dB extinction ratio. Experimental feasibility studies indicate that a 1024-cell beam shifter module with a 0.5-dB insertion loss and a 23-dB extinction ratio is possible at present. An alignment-free assembly technique using precise alignment guides is also confirmed. An experimental 8-stage, 1024-input 256-output concentrator shows low insertion loss characteristics (6.8dB on average) owing to the low-loss beam shifters and the alignment-free assembly technique. Practical switching networks mainly require the improvement of the extinction ratio of the beam shifter module and the development of a fiber pig-tailing technique. This switch structure is applicable to transparent switching networks such as subscriber line concentrators and inter-module connectors.

This paper describes the use of optical interconnections in switching systems and discusses our recent achievements in this area. Switching system interconnections are classified based on their application layers. The evolution of optical interconnections in switching systems in discussed in terms of such system requirements as cost, size, and throughput. Recent achievements are discussed: an optical inter-module connector, a free-space digital switch, and a large-capacity optically intra-connected ATM switch.

This paper proposes a new combined fast algorithm for transversal adaptive filters. The fast transversal filter (FTF) algorithm and the normalized LMS (NLMS) are combined in the following way. In the initialization period, the FTF is used to obtain fast convergence. After converging, the algorithm is switched to the NLMS algorithm because the FTF cannot be used for a long time due to its numerical instability. Nonstationary environment, that is, time varying unknown system for instance, is classified into three categories: slow time varying, fast time varying and sudden time varying systems. The NLMS algorithm is applied to the first situation. In the latter two cases, however, the NLMS algorithm cannot provide a good performance. So, the FTF algorithm is selected. Switching between the two algorithms is automatically controlled by using the difference of the MSE sequence. If the difference exceeds a threshold, then the FTF is selected. Other wise, the NLMS is selected. Compared with the RLS algorithm, the proposed combined algorithm needs less computation, while maintaining the same performance. Furthermore, compared with the FTF algorithm, it provides numerically stable operation.

Non-homogeneous Poisson Processes (NHPP's) can be applied for analyzing reliability growth models for hardware and/or software. Evaluating the Mean Time Between Failures (MTBF's) for such processes, we can evaluate the present status (the degree of improvement). However, it is difficult to evaluate the MTBF's for such processes analytically except the simplest cases. The so-called instantaneous MTBF's which can be easily evaluated are applied in practice instead of the exact MTBF's. In this paper, we discuss both MTBF's analytically, and derive the conditions for the existence of both exact and instantaneous MTBF's. We further illustrate both MTBF's for the Weibull process and S-shaped reliability growth model numerically.

This paper points out that there are two types of claw free families with respect to a level of claw freeness. We formulate them as weak claw free families and strong claw free families. Then, we present sufficient conditions for each type of claw free families. (A similar result is known for weak claw free families.) They are represented as some algebraic forms of one way functions. A new example of strong claw free families is also given.