We have constructed a new concept device with combination of ferroelectric and ferromagnetic materials by a laser ablation technique. An ideal hetero-epitaxy can be obtained owing to the similar crystal structure of perovskite type ferroelectric Pb (Zr, Ti) O3; (so called PZT) and ferromagnetic (La, Sr) MnO3. The ferromagnetic (La, Sr) MnO3 compounds are well known for their colossal magnetoresistance (CMR) properties. The CMR effect is strongly affected by the lattice stress. The PZT, on the other hand, is famous for its large piezoelectrics. We can introduce the lattice stress easily by applying voltage for the piezoelectric compounds. In the heterostructured ferromagnetic/ferroelectric devices, there are remarkable interesting phenomena. Electric properties of the ferromagnetic material can be controlled by piezoelectric effect via distortion of crystal structure.

Scattering of a plane electromagnetic wave by a conducting wedge will be discussed. The former solution can not be applicable to all the transition regions when its parameter is constant. This study shows a new solution which consists of only one expression applicable to the shadow region, the illuminated region and the transition regions, and which has no parameter.

A simple method based on the pattern integration method for measuring the power absorption by human model in the vicinity of antennas is proposed. Good agreement between the measured and the numerical results is obtained conforming the validity of the present measurement method. The equipment is useful in the EMC measurement and research of the antennas for the portable telephone.

A detailed investigation of the electromagnetic field distributions inside waveguide circuits is useful for physical understanding, studies of electromagnetic coupling effects for EMC and EMI and for optimization of waveguide circuit designs. In this paper, we describe how to calculate and measure the two-dimensional electromagnetic field distributions inside waveguide-type planar circuits, making use of an analogy between H-plane waveguide- and trough-type surface-wave planar circuits. The measurement results are in good agreement with the results of the numerical analysis based on the normal mode expansion method.

A new numerical technique, termed the method of matrix-order reduction (MMOR), is developed for handling electromagnetic problems in this paper, in which the matrix equation resulted from a method-of-moments analysis is converted either to an eigenvalue equation or to another matrix equation with the matrix order in both cases being much reduced, and also, the accuracy of solution obtained by solving either of above equations is improved by means of a newly proposed generalized Jacobian iteration. As a result, this technique enjoys the advantages of less computational expenses and a relatively good solution accuracy as well. To testify this new technique, a number of wire antennas are examined and the calculated results are compared with those obtained by using the method of moments.

A hierarchical fault tracing method for VLSIs with bi-directional busses from CAD layout data in the CAD-linked electron beam test system is described. When fault tracing reaches at a cell connected to a bi-directional bus, our method is able to judge the direction of the signal flow, input or output, by using waveforms acquired by an EB tester, in a consistent manner independently of circuit functions as with a previously proposed tracing method for circuits without bi-directional busses.

A wireless tag system has been designed and developed for maintaining and managing outdoor communication facilities. This system employs an infrared (IR) beam and an electromagnetic wave with a radio frequency (RF), and is constructed using IR-RF tags, an IR commander, and an RF receiver. The IR command radiation with strong directivity enables a maintenance operator to recognize a target facility, and the RF response without directivity enables a management system to obtain data from within a large circular area. Solar and secondary batteries are also adopted as the power module in the tag to allow easy maintenance at long intervals. IR signal communication is possible up to a distance of 9 m, and RF signal communication is possible within a circle with a radius of 9 m.

The present paper describes a novel approach to interconnecting and assembling components of MEMS at room temperature. The main drawback of the conventional bonding methods is their rather high process temperatures. The new method, which is referred as the surface activated bonding (SAB), utilizes the phenomena of the adhesion between two atomically clean solid surfaces to enable the bonding at lower temperature or even at room temperature. In the bonding procedure, the surfaces to be bonded are merely brought into contact after sputter-cleaning by Ar fast atom in ultrahigh vacuum conditions. TEM observations of the bonded interfaces show that a direct bonding in atomic scale is achieved in the interface between the micro-components. Based on the concept of this new bonding technology, a micro-assembly system was developed. The micro-assembly system is operated by means of a virtual manipulation system in which 3D model of the micro-components are manipulated virtually in a computer graphics constructed in the world wide web (WWW) scheme. The micro-assembly system will provide a new design tool of three dimensional MEMS by combining the possibility of the flexible assembly and the intuitive operations.

Photovoltaic devices capable of generating more than 200 volts with an area of 1 cm2 have been developed for directly driving microactuators such as piezoelectric or electrostatic actuators. The micro-devices interconnect 285 micro cells (unit cell size: about 0.5 mm 2.0 mm) in series, and have an open circuit voltage (Voc) of 207 volts, a short circuit current (Isc) of 36.6 µA, a maximum output power (Pmax) of 4.65 mW and a fill factor (F.F.) of 0.615 under AM (Air Mass) 1.5 and 100 mW/cm2 illumination. This voltage is the highest in the world for the area of 1 cm2. The series connection is precisely processed by a focused laser beam, thereby significantly reducing the area needed for device connections. It has been confirmed that a piezoelectric polymer can be directly driven by the electrical output in evaluating the potential of the devices to be used as a microactuator's power source.

This paper describes the fabrication of micro-pipes and their applications to splicing parts and optical switches using single-mode fibers. Micro-pipes having almost the same inner diameter of bare fiber (125 µm) and lengths of around 5 mm are successfully mass-produced by using micromachining technology. We fabricate various kinds of metal pipes such as Au, Cu, Ni, and an FeNi alloy by selecting the appropriate electro-plating bath. We use an Au micro-pipe having a small slitted portion running along its axis (slitted micro-pipe) to splice single-mode fibers. We also use an FeNi alloy micro-pipe to construct a single-mode fiber switch. These new single-mode fiber devices employing micro-pipes show excellent optical and mechanical characteristics. Splicing losses are in the range of 0.2-0.4 dB. The developed 1 2 latching type single-mode fiber switches exhibit a low insertion loss of 0.35 dB, a minimum switching speed of 2 ms with a driving power of 9 mW, and stable operation for more than 108 switchings without damage. A practical application of the developed switch for testing optical devices is also demonstrated.

We propose an nn optical switch that is suitable for flexible and reliable optical access networks and for reconfigurable optical inter-module connections in large-scale processing systems. The switch consists of an intersecting waveguide matrix, matching oil, and microactuators. Switching is based on the movement of oil due to capillary pressure, which is controlled by the microactuator. The necessary switching conditions were calculated and the results showed that both the oil volume and the microactuator position must be controlled. A trial optical switch was fabricated to test the switching principle, and switching and self-holding were both confirmed. These results show the feasibility of a very small self-holding nn optical switch that uses a waveguide matrix and microactuators made by using microfabrication technologies.

Micromechanisms and actuators which are 10-100 micrometers in size are studied by research groups in universities, national research institutes, and private industries in Japan. Some of them belong to a "Micromachine Technology" project lead by MITI (Ministry of International Trade and Industries). Microfabrication technologies based on both IC-compatible processes and mechanical machining are under development. Application-oriented devices in automobile, communication and information industries are also investigated. The research goal is to build a smart micro system through the integration of moving mechanisms, sensors and electronics on a chip; this is the fusion of mechanics and electronics in the microscopic world. This paper reviews recent activities in MEMS research in Japan.

A new silicon capacitive pressure sensor with center clamped diaphragm is presented. The sensor has a silicon-glass structure and is fabricated by batch-fabrication processes. Since deformed diaphragm has a doughnut-shape, parallel-like displacement is realized and therefore better linearity of 0.7% which is half of the conventional flat diaphragm sensor is obtained. It is clarified both analytically and experimentally that the capacitive pressure sensor with center clamped diaphragm is advantageous in terms of linearity.

The growing availability of commercial foundry processes allows easy implementation of micro-opto-electro-mechanical systems (MOEMS) for a variety of applications. Such applications go beyond single devices to include whole optical systems on a chip, consisting of mirrors, gratings, Fresnel lenses and shutters, for example. Hinged and rotating structures, combined with powerful and compact thermal actuators, provide the means for positioning and operating these optical components. This paper presents examples of such systems built in a commercial polycrystalline silicon surface-micromachining process, the ARPA-sponsored Multi-User MEMS ProcesS (MUMPS). Examples range from optical sub-components to large mirror arrays, communication components, and micro-interferometers. Using the examples discussed in this paper, a designer can take advantage of commercially available surface-micromachining processes to design and develop MOEMS without the need for extensive in-house micromachining capabilities.

Preliminary experiments on non-destructive quantitative analysis of water vapor density in halogen lamps have been carried out. A working curve showing a relation between absorbance and water vapor density was successfully obtained by using frequency-stabilized InGaAsP/InP semiconductor laser spectrometric system.

A circularly polarized omnidirectional antenna consisting of a vertical sleeve dipole and three pairs of titled parasitic elements set around it is proposed. The antenna is useful to mobile communication because the use of circular polarization allows us to suppress the effect of multi-path reflection waves (inverse rotation) caused by building walls and surface of the ground. The antenna with an omnidirectional pattern has a simple structure without a feeding network for radiating circular polarization. To understand the radiation characteristics of the proposed antenna, an approximation theory using the induced electromotive force method is introduced. As an example, using a fixed spacing of a quarter wave-length between the vertical dipole and the parasitic elements, the possibility of generation of circular polarization is examined. Then the computational results of the axial ratio and the input impedance are compared with the results of the numerical analysis using the moment method and the experimental result. The radiation characteristics of the antenna can be understood by using the approximation theory introduced here. As a summary of the study, the contour map of the axial ratio of circular polarization is depicted using the moment method. For practical design of this antenna, a small correction factor should be multiplied to the calculated results. From the experimental results, the proposed antenna has a gain of 2 dBi and 3 dB band-width with an axial ratio of about 8%.

Time-domain characteristics of the signal of an open-loop fiber optic gyroscope were analyzed. The waveform moments of the gyroscope signal were dependent upon the rotation-induced Sagnac phase, just as the signal frequency spectra are. The peak positions of the time signal also varied with the supplied rotation, and the Sagnac phase could be read out, with optimum sensitivity, from the intervals between peaks. To demonstrate the time-domain measurement technique, the gyroscope signal was transferred to lower frequencies and the signal period was lengthened. This equivalent-time scheme lowered the operational speed requirement on the signal processing electronics and improved measurement resolution.

A new application of the factorization method is reported for 3-D shape reconstruction from endoscope image sequences. The feasibility of the method is verified with some theoretical considerations and results of extensive experiments. This method was developed by Tomasi and Kanade, and improved by Poelman and Kanade, with the aim of achieving accurate shape reconstruction by using a large number of points and images, and robustly applying well-understood matrix computations. However, the latter stage of the method, called normalization, is not as easily understandable as the use of singular value decomposition in the first stage. In fact, as shown in this report, many choices are possible for this normalization and a variety of results have been obtained depending on the choice. This method is easy to understand, easy to implement, and provides sufficient accuracy when the approximation used for the optical system is reasonable. However, the details of the theoretical basis require further study.

The structure of an SST Viterbi decoder for general rate (n-1)/n convolutional codes is investigated in the light of syndrome decoding. Since the input to the main decoder is expressed as S(H-1)T (S: syndrome, H: dual encoder of G) for a general non-systematic convolutional code G if the inverse encoder G-1 is used as a pre-decoder, SST Viterbi decoding can be regarded as searching for the most likely error sequence through an extended syndrome trellis. We show that searching based on the extended syndrome trellis is equivalent to the original syndrome decoding by applying the invariant-factor theorem.

The principles and design of current sense amplifiers for low-voltage MOS memories are described. The low input impedance of current sense amplifiers is explained using a simple model consisting of negative and positive resistance. A description of the model realized by a common-gate MOS amplifier employing transconductance enhancing techniques is also given. Some current sensing schemes for low-voltage ROM's and/or SRAM's are shown. For SRAM application, a current sensing scheme employing large-gain inverter-type amplifiers is proposed. A test chip including SRAM macrocells was designed and fabricated with 3.3-V 0.5-µm CMOS technology. An SRAM using current sense amplifiers was able to demonstrate that current sensing suppressed bitline delay to half that in conventional current-mirror types. The current sense amplifier had the same operating limit as the current-mirror type for low supply voltages. The measured operating limit of the STSM in this work was 1.3-V for threshold voltages of 0.55-V(n-channel) and -0.65-V(p-channel).