Shimpei NISHIYAMA Kimihiko KATO Yongxun LIU Raisei MIZOKUCHI Jun YONEDA Tetsuo KODERA Takahiro MORI
We have proposed and demonstrated a device fabrication process of physically defined quantum dots utilizing electron beam lithography employing a negative-tone resist toward high-density integration of silicon quantum bits (qubits). The electrical characterization at 3.8K exhibited so-called Coulomb diamonds, which indicates successful device operation as single-electron transistors. The proposed device fabrication process will be useful due to its high compatibility with the large-scale integration process.
Katsunori MAKIHARA Tatsuya TAKEMOTO Shuji OBAYASHI Akio OHTA Noriyuki TAOKA Seiichi MIYAZAKI
We have fabricated two-tiered heterostructures consisting of phosphorus δ-doped Si quantum dots (Si-QDs) and undoped Si-QDs and studied their electron field emission properties. Electron emission was observed from the P-doped Si-QDs stack formed on the undoped Si-QDs stack by applying a forward bias of ∼6 V, which was lower than that for pure Si-QDs stack. This result is attributed to electric field concentration on the upper P-doped Si-QD layers beneath the layers of the undoped Si-QDs stack due to the introduction of phosphorus atom into the Si-QDs, which was positively charged due to the ionized P donor. The results lead to the development of planar-type electron emission devices with a low-voltage operation.
Chien-chung LIN Kai-Ling LIANG Wei-Hung KUO Hui-Tang SHEN Chun-I WU Yen-Hsiang FANG
In this paper, we introduce our latest progress in the colloidal quantum dot enhanced color conversion layer for micro LEDs. Different methods of how to deploy colloidal quantum dots can be discussed and reviewed. The necessity of the using color conversion layer can be seen and color conversion efficiency of such layer can be calculated from the measured spectrum. A sub-pixel size of 5 micron of colloidal quantum dot pattern can be demonstrated in array format.
Kazuki ISODA Ryuga YANAGIHARA Yoshitaka KITAMOTO Masahiko HARA Hiroyuki WADA
Copper sulfide nanoparticles were successfully prepared by laser ablation in liquid. CuS powders in deionized water were irradiated with nanosecond-pulsed laser (Nd:YAG, SHG) to prepare nanoparticles. Prepared nanoparticles were investigated by scanning electron microscopy (SEM), dynamic light scattering (DLS) and fluorospectrometer. According to the results of SEM and DLS, the primary and secondary particle size was decreased with the increase in laser fluence of laser ablation in liquid. The ratio of Cu and S of prepared nanoparticles were not changed. The absorbance of prepared copper sulfide nanoparticles in water was increased with the increase in laser fluence.
Yuto FUTAMURA Katsunori MAKIHARA Akio OHTA Mitsuhisa IKEDA Seiichi MIYAZAKI
We have fabricated multiple-stacked Si quantum dots (QDs) with and without Ge core embedded in a SiO2 network on n-Si(100) and studied their field electron emission characteristics under DC bias application. For the case of pure Si-QD stacks with different dot-stack numbers, the average electric field in dot-stacked structures at which electron emission current appeared reached minimum value at a stack number of 11. This can be attributed to optimization of the electron emission due to enhanced electric field concentration in the upper layers of the dot-stacked structures and reduction of the electron injection current from the n-Si substrate, with an increased stack number. We also found that, by introducing Ge core into Si-QDs, the average electric field for the electron emission can be reduced below that from pure Si-QDs-stacked structures. This result implies that the electric field is more concentrated in the upper Si-QDs with Ge core layers due to deep potential well for holes in the Ge core.
Yasutomo OTA Katsuyuki WATANABE Masahiro KAKUDA Satoshi IWAMOTO Yasuhiko ARAKAWA
We discuss our recent progress in photonic crystal nanocavity quantum dot lasers. We show how enhanced light matter interactions in the nanocavity lead to diverse and fascinating lasing phenomena that are in general inaccessible by conventional bulky semiconductor lasers. First, we demonstrate thresholdless lasing, in which any clear kink in the output laser curve does not appear. This is a result of near unity coupling of spontaneous emission into the lasing cavity mode, enabled by the strong Purcell effect supported in the nanocavity. Then, we discuss self-frequency conversion nanolasers, in which both near infrared lasing oscillation and nonlinear optical frequency conversion to visible light are simultaneously supported in the individual nanocavity. Owing to the tight optical confinement both in time and space, a high normalized conversion efficiency over a few hundred %/W is demonstrated. We also show that the intracavity nonlinear frequency conversion can be utilized to measure the statistics of the intracavity photons. These novel phenomena will be useful for developing various nano-optoelectronic devices with advanced functionalities.
Takeshi FUKUDA Masatomo HISHINUMA Junya MAKI Hironao SASAKI
Nowadays, semiconductor quantum dots have attracted intense attention as emissive materials for light-emitting diodes, due to their high photoluminescence quantum yield and the controllability of their photoluminescence spectrum by changing the core diameter. In general, semiconductor quantum dots contain large amounts of organic ligands around the core/shell structure to obtain dispersibility in solution, which leads to solution processability of the semiconductor quantum dot. Furthermore, organic ligands, such as straight alkyl chains, are generally insulating materials, which affects the carrier transport in thin-film light-emitting diodes. However, a detailed investigation has not been performed yet. In this paper, we investigated the luminance characteristics of quantum-dot light-emitting diodes containing ZnCuInS2 quantum dots with different carbon chain lengths of alkyl thiol ligands as emitting layers. By evaluating the CH2/CH3 ratio from Fourier-transform infrared spectra and thermal analysis, it was found that approximately half of the oleylamine ligands were converted to alkyl thiol ligands, and the evaporation temperature increased with increasing carbon chain length of the alkyl thiol ligands based on thermogravimetric analysis. However, the photoluminescence quantum yield and the spectral shape were almost the same, even after the ligand-exchange process from the oleylamine ligand to the alkyl thiol ligand. The peak wavelength of the photoluminescence spectra and the photoluminescence quantum yield were approximately 610 nm and 10%, respectively, for all samples. In addition, the surface morphology of spin coated ZnCuInS2 quantum-dot layers did not change after the ligand-exchange process, and the root-mean-square roughness was around 1 nm. Finally, the luminance efficiency of an inverted device structure increased with decreasing carbon chain length of the alkyl thiol ligands, which were connected around the ZnCuInS2 quantum dots. The maximum luminance and current efficiency were 86 cd/m2 and 0.083 cd/A, respectively.
Kazuhiro KOMORI Takeyoshi SUGAYA Takeru AMANO Keishiro GOSHIMA
In this study, our recent research activities on nanophotonic devices with semiconductor quantum nanostructures are reviewed. We have developed a technique for nanofabricating of high-quality and high-density semiconductor quantum dots (QDs). On the basis of this core technology, we have studied next-generation nanophotonic devices fabricated using high-quality QDs, including (1) a high-performance QD laser for long-wavelength optical communications, (2) high-efficiency compound-type solar cell structures, and (3) single-QD devices for future applications related to quantum information. These devices are expected to be used in high-speed optical communication systems, high-performance renewable energy systems, and future high-security quantum computation and communication systems.
Takuma YASUDA Nobuhiko OZAKI Hiroshi SHIBATA Shunsuke OHKOUCHI Naoki IKEDA Hirotaka OHSATO Eiichiro WATANABE Yoshimasa SUGIMOTO Richard A. HOGG
We developed an electrically driven near-infrared broadband light source based on self-assembled InAs quantum dots (QDs). By combining emissions from four InAs QD ensembles with controlled emission center wavelengths, electro-luminescence (EL) with a Gaussian-like spectral shape and approximately 85-nm bandwidth was obtained. The peak wavelength of the EL was blue-shifted from approximately 1230 to 1200 nm with increased injection current density (J). This was due to the state-filling effect: sequential filling of the discrete QD electron/hole states by supplied carriers from lower (ground state; GS) to higher (excited state; ES) energy states. The EL intensities of the ES and GS emissions exhibited different J dependence, also because of the state-filling effect. The point-spread function (PSF) deduced from the Fourier-transformed EL spectrum exhibited a peak without apparent side lobes. The half width at half maximum of the PSF was 6.5 µm, which corresponds to the estimated axial resolution of the optical coherence tomography (OCT) image obtained with this light source. These results demonstrate the effectiveness of the QD-based device for realizing noise-reduced high-resolution OCT.
Naokatsu YAMAMOTO Kouichi AKAHANE Toshimasa UMEZAWA Tetsuya KAWANISHI
A quantum dot (QD) electro-absorption device was successfully developed with a highly stacked InAs/InGaAlAs QD structure. A 1.55-µm waveband electro-absorption effect and a quantum confined Stark effect of approximately 22 meV under the application of a 214-kV/cm reverse bias electric field are clearly observed in the developed QD device.
Takeshi FUKUDA Tomokazu KURABAYASHI Hikari UDAKA Nayuta FUNAKI Miho SUZUKI Donghyun YOON Asahi NAKAHARA Tetsushi SEKIGUCHI Shuichi SHOJI
We report a real time method to monitor the chemical reaction in microdroplets, which contain an organic dye, 5(6)-carboxynaphthofluorescein and a CdSe/ZnS quantum dot using fluorescence spectra. Especially, the relationship between the droplet size and the reaction rate of the two reagents was investigated by changing an injection speed.
Katsunori MAKIHARA Mitsuhisa IKEDA Seiichi MIYAZAKI
We have succeeded in highly selective growth and positioning of Si- and SiGe-quantum-dots (QDs) on SiO2 patterns by controlling the reactive area, whose surface is terminated with OH bonds for Si nucleation in low-pressure chemical vapor deposition (LPCVD). The selective growth of QDs on thermally grown SiO2 line-patterns was demonstrated in LPCVD of SiH4 and GeH4 just after Si nucleation by controlling the early stages of Si2H6-LPCVD, which indicates effectively enhanced initial nucleation on OH-terminated SiO2 surface and suppression of the nucleation and growth of dots on as-grown SiO2 surface during Si2H6-LPCVD prior to SiH4-LPCVD.
Mitsuhisa IKEDA Katsunori MAKIHARA Seiichi MIYAZAKI
We have fabricated MOS capacitors with a hybrid floating gate (FG) consisting of Ni silicide nanodots (NiSi-NDs) and silicon-quantum-dots (Si-QDs) and studied electron transfer characteristics in the hybrid FG structures induced by the irradiation of 1310 nm light. The flat-band voltage shift due to the charging of the hybrid FG under light irradiation was lower than that in the dark. The observed optical response can be attributed to the shift of the charge centroid in the hybrid FG caused by the photoexcitation of electrons in NiSi-NDs and their transfer to Si-QDs. The photoexcited electron transfer from the NiSi-NDs to the Si-QDs in response to pulsed gate voltages was also evaluated from the increase in transient current caused by the light irradiation. The amount of transferred charge is likely to increase in proportion to pulse gate voltage.
Naokatsu YAMAMOTO Kouichi AKAHANE Tetsuya KAWANISHI Hideyuki SOTOBAYASHI Yuki YOSHIOKA Hiroshi TAKAI
The quantum dot optical frequency comb laser (QD-CML) is an attractive photonic device for generating a stable emission of fine multiple-wavelength peaks. In the present paper, 1.0-GHz and 10-ps-order short optical pulsation is successfully demonstrated from a hybrid mode-locked QD-CML with an ultrabroadband wavelength tuning range in the T+O band. In addition, 10-GHz high-repetition intensity-stable short optical pulse generation with a high S/N ratio is successfully demonstrated using an external-cavity QD-CML with a 10th-harmonic mode-locking technique.
Nobuhiko OZAKI Koichi TAKEUCHI Shunsuke OHKOUCHI Naoki IKEDA Yoshimasa SUGIMOTO Kiyoshi ASAKAWA Richard A. HOGG
We developed advanced techniques for the growth of self-assembled quantum dots (QDs) for fabricating a broadband light source that can be applied to optical coherence tomography (OCT). Four QD ensembles and strain reducing layers (SRLs) were grown in selective areas on a wafer by the use of a 90° rotational metal mask. The SRL thickness was varied to achieve appropriate shifts in the peak wavelength of the QD emission spectrum of up to 120 nm. The four-color QD ensembles were expected to have a broad bandwidth of more than 160 nm due to the combination of excited state emissions when introduced in a current-induced broadband light source such as a superluminescent diode (SLD). Furthermore, a desired shape of the SLD spectrum can be obtained by controlling the injection current applied to each QD ensemble. The broadband and spectrum shape controlled light source is promising for high-resolution and low-noise OCT systems.
Kiyoshi ASAKAWA Yoshimasa SUGIMOTO Naoki IKEDA Daiju TSUYA Yasuo KOIDE Yoshinori WATANABE Nobuhiko OZAKI Shunsuke OHKOUCHI Tsuyoshi NOMURA Daisuke INOUE Takayuki MATSUI Atsushi MIURA Hisayoshi FUJIKAWA Kazuo SATO
This paper reviews our recent activities on nanophotonics based on a photonic crystal (PC)/quantum dot (QD)-combined structure for an all-optical device and a metal/semiconductor composite structure using surface plasmon (SP) and negative refractive index material (NIM). The former structure contributes to an ultrafast signal processing component by virtue of new PC design and QD selective-area-growth technologies, while the latter provides a new RGB color filter with a high precision and optical beam-steering device with a wide steering angle.
Md. Mottaleb HOSSAIN Md. Abdullah-AL HUMAYUN Md. Tanvir HASAN Ashraful Ghani BHUIYAN Akihiro HASHIMOTO Akio YAMAMOTO
This paper reports on a theoretical study and modeling of a 1.55 µm quantum dot heterostructure laser using InN as a promising candidate for the first time. Details of design and theoretical analysis of probability distribution of the optical transition energy, threshold current density, modal gain, and differential quantum efficiency are presented considering a single layer of quantum dots. Dependence of threshold current density on the RMS value of quantum dot size fluctuations and the cavity length is studied. A low threshold current density of ∼51 Acm-2 is achieved at room temperature for a cavity length of 640 µm. An external differential efficiency of ∼65% and a modal gain of ∼12.5 cm-1 are obtained for the proposed structure. The results indicate that the InN based quantum dot laser is a promising one for the optical communication system.
Masakazu MURAGUCHI Yukihiro TAKADA Shintaro NOMURA Tetsuo ENDOH Kenji SHIRAISHI
We have revealed that the electronic states in the electrodes give a significant influence to the electron transport in nano-electronic devices. We have theoretically investigated the time-evolution of electron transport from a two-dimensional electron gas (2DEG) to a quantum dot (QD), where 2DEG represents the electrode in the nano-electronic devices. We clearly showed that the coherent electron transport is remarkably modified depending on the initial electronic state in the 2DEG. The electron transport from the 2DEG to the QD is strongly enhanced, when the initial state of the electron in the 2DEG is localized below the QD. We have proposed that controlling the electronic state in the electrodes could realize a new concept device function without modifying the electrode structures; that achieves a new controllable state in future nano-electronic devices.
Katsunori MAKIHARA Mitsuhisa IKEDA Akira KAWANAMI Seiichi MIYAZAKI
Silicon-quantum-dots (Si-QDs) with an areal density as high as 1012 cm - 2 were self-assembled on thermally-grown SiO2 by low pressure CVD using Si2H6, in which OH-terminated SiO2 surface prior to the Si CVD was exposed to GeH4 to create nucleation sites uniformly. After thermal oxidation of Si-QDs surface, two-dimensional electronic transport through the Si-QDs array was measured with co-planar Al electrodes evaporated on the array surface. Random telegraph signals were clearly observed at constant applied bias conditions in dark condition and under light irradiation at room temperature. The result indicates the charging and discharging of a dot adjacent to the percolation current path in the dots array.
Katsunori MAKIHARA Mitsuhisa IKEDA Seiichiro HIGASHI Seiichi MIYAZAKI
Multiply-stacked structures of Si quantum dots (Si-QDs) in gate oxide are attracting much attention because of their potential importance to improve retention characteristics in a high density charge storage. In this work, we have fabricated 6-fold stacked Si-QDs with 2 nm-thick SiO2 interlayers, whose areal dot density and average dot size were 5.71011 cm-2 in each dot layer and 5 nm in height, and studied progress on electron distribution in 6-fold stacked Si-QDs with 2 nm-thick SiO2 interlayers from the measurements of temporal changes in the surface potential after electron charging and discharging locally at room temperature using an AFM/Kelvin probe technique in clean room air. First, by scanning an area of 22 µm2 with the AFM tip biased at +3 V with respect to the substrate in a tapping mode, the area was negatively charged due to electron injection from the substrate to the dot through the bottom tunnel oxide and subsequently, the central part of 100100 nm2 in the pre-charged area was scanned with the tip biased at -3 V to emit the electrons from the Si-QDs to the substrate. As a result, the negative charging level was markedly reduced in the central part in comparison to its peripheral region. And then, the surface potential of the negatively-charged peripheral region was decay monotonously with time as a result of progressive electron tunneling to the substrate. In contrast to this, the temporal change in the surface potential of the central part shows that the electron charging proceeds with time until the surface potential becomes almost the same as that in the peripheral region. This result can be interpreted in terms of lateral spreading of electrons stored in the Si-QDs layer due to the potential difference between the central part and its peripheral region more negatively charged.