Recent progress on photoexcited process applications to fabricating of VLSI and flat panel devices in Japan has been reviewed. The excimer laser melt technique makes it possible to form large-grain poly-Si film on a glass substrate, improving TFT electrical characteristics, and to fill metals into high-aspect-ratio contact holes in VLSI metallization. Scanning of CW laser in poly-Si film led to growth of a single-crystal Si layer on SiO2 to fabricate 3-D (dimensional) devices successfully. Direct writing with pyrolytic reaction was put into practice for interconnection restructuring. In the photochemical process, lower temperature epitaxial growth of Si and dry cleaning of a Si wafer employing Hg lamp irradiation were noted. Directional etching was performed by sidewall film formation, while resolution of better than 0.5 µm was difficult to obtain due to diffraction limit. It was proposed that higher resolution would be obtained by introduction of a nonlinear process which enhanced pattern contrast.

In this paper, we investigate the discrepancy between a serial version and a parallel version of zero-knowledge protocols, and clarify the information "leaked" in the parallel version, which is not zero-knowledge unlike the case of the serial version. We consider two sides: one negative and the other positive in the parallel version of zero-knowledge protocols, especially of the Fiat-Shamir scheme.

A high resolution iterative algorithm for estimating the direction-of-arrival of multiple wide band sources is proposed in this paper. For equally spaced array structure, two Unitary Transform based approaches are proposed in frequency domain for signal subspace processing in both coherent multipath and incoherent environment. Given a priori knowledge of the initial estimates of DOA, with proper spatial prefiltering to separate multiple groups of closely spaced sources, our proposed algorithm is shown to have high resolution capability even in coherent multipath environment without reducing the angular resolution, compared with the use of subarray. Compared with the conventional algorithm, the performance by the proposed algorithm is shown by the simulations to be improved under low Signal to Noise Ratio (SNR) while the performance is not degraded under high SNR. Moreover the computation burden involved in the eigencomputation is largely reduced by introducing the Pesudo-Hermitian matrix approximation.

This paper describes a general interface system for speech input and output and a dialog management system, MASCOTS, which is a component of the interface system. The authors designed this interface system, paying attention to its generality; that is, it is not dependent on the problem-solving system it is connected to. The previous version of MASCOTS dealt with the dialog processing only for the speech input based on the SR-plans. We extend MASCOTS to cover the speech output to the user. The revised version of MASCOTS, named MASCOTS II, makes use of topic information given by the topic packet network (TPN) which models the topic transitions in dialogs. Input and output messages are described with the concept representation based on the case structure. For the speech input, prediction of user's utterance is focused and enhanced by using the TPN. The TPN compensates for the shortages of the SR-plan and improves the accuracy of prediction as to stimulus utterances of the user. As the dialog processing in the speech output, MASCOTS II extracts emphatic words and restores missing words to the output message if necessary, e.g., in order to notify the results of speech recognition. The basic mechanisms of the SR-plan and the TPN are shared between the speech input and output processes in MASCOTS II.

Optical interconnection is a rapidly expanding field of optical signal transmission, but it places some stringent requirements on optical devices. This paper introduces the current device characteristics of lasers and photodiodes and discusses the possibility of intra/inter wafer optical interconnection.

A new direct projection patterning technique of aluminum using synchrotron radiation (SR) is proposed. It is based on the thermal reaction control effect of SR excitation. In the case of the Si surface, pure thermal growth is possible at 200, however, this growth is suppressed perfectly by SR irradiation. On the other hand, Al growth on the SiO2 surface is impossible at the same temperature thermally, however, SR has an effect to initiate thermal reaction. Both new effects of SR, suppression and initiation, are clarified to be caused by atomic order level thin layers formed from CVD gases by SR excitation on the surfaces. By using these effects, the direct inverse and normal projection patterning of Al are successfully demonstrated.

This paper was written for LSI engineers in order to demonstrate the effect of optical interconnections in LSIs to improve both the speed and power performances of 0.5 and 0.2 µm CMOS microprocessors. The feasibilities and problems regarding new micronsize optoelectronic devices as well as associated electronics are discussed. Actual circuit structures clocks and bus lines used for optical interconnection are discussed. Newly designed optical interconnections and the speed power performances are compared with those of the original electrical interconnection systems.

Breakdown fields and the charges to breakdown (QBD) of oxides increased after UV/Cl2 pre-oxidation cleaning. This is due to decreased residual metal contaminants on silicon surfaces in the bottom of the LOCOS region after wet cleaning. Treatment in NH4OH, H2O2 and H2O prior to UV/Cl2 cleaning suppressed increases in surface roughness and kept leakage currents through the oxides after UV/Cl2 cleaning as low as those after wet cleaning alone. The large junction leakage currents--caused by metal contaminants introduced during dry etching--decreased after UV/Cl2 cleaning which removes the contaminated layer.

A new optical interconnection system suitable for high-speed ICs using a novel complementary optical interconnection technique has been developed. This system uses paired light sources and photodetectors for optical complementary operation, and greatly lowers the power consumption compared with conventional systems. Analyses and experimental results indicate that this system can operate in the gigabit range, and reduces power consumption to less than 20% of that in conventional systems at 1 Gb/s.

This paper describes a task-oriented speech dialogue system based on spontaneous speech understanding and response generation (TOSBURG). The system has been developed for a fast food ordering task using speaker-independent keyword-based spontaneous speech understanding. Its purpose being to understand the user's intention from spontaneous speech, the system consists of a noise-robust keyword-spotter, a semantic keyword lattice parser, a user-initiated dialogue manager and a multimodal response generator. After noise immunity keyword-spotting is performed, the spotted keyword candidates are analyzed by a keyword lattice parser to extract the semantic content of the input speech. Then, referring to the dialogue history and context, the dialogue manager interprets the semantic content of the input speech. In cases where the interpretation is ambiguous or uncertain, the dialogue manager invites the user to confirm verbally the system's understanding of the speech input. The system's response to the user throughout the dialogue is multimodal; that is, several modes of communication (synthesized speech, text, animated facial expressions and ordered food items) are used to convey the system's state to the user. The object here is to emulate the multimodal interaction that occurs between humans, and so achieve more natural and efficient human-computer interaction. The real-time dialogue system has been constructed using two general purpose workstations and four DSP accelerators (520MFLOPS). Experimental results have shown the effectiveness of the newly developed speech dialogue system.

We indicate the existence of optimum expanded mode field diameters in thermally-diffused expanded core (TEC) fiber. The optimum ranges under our experimental conditions were from 14µm to 18µm for both 1.3µm-single-mode fiber and 1.55µm-dispersion-shifted fiber. By applying the TEC fiber fabricated in our experimental conditions to a multifiber connector, the connection loss can be reduced to less than 0.2dB without improving fiber and connector ferrule fabrication accuracy.

Given an integer N, it is easy to determine whether or not N is prime, because a set of primes is in LPP. Then given a composite number N, is it easy to determine whether or not N is of a specified form? In this paper, we consider a subset of odd composite numbers +1MOD4 (resp. +3MOD4), which is a subset of odd composite numbers consisting of prime factors congruent to 1 (resp. 3) modulo 4, and show that (1) there exists a four move (blackbox simulation) perfect ZKIP for the complement of +1MOD4 without any unproven assumption; (2) there exists a five move (blackbox simulation) perfect ZKIP for +1MOD4 without any unproven assumption; (3) there exists a four move (blackbox simulation) perfect ZKIP for +3MOD4 without any unproven assumption; and (4) there exists a five move (blackbox simulation) statistical ZKIP for the complement of +3MOD4 without any unproven assumption. To the best of our knowledge, these are the first results for a language L that seems to be not random self-reducible but has a constant move blackbox simulation perfect or statistical ZKIP for L and without any unproven assumption.

In this work we propose a recursive electric circuit which has a fractal structure composed of resistances and capacitors. It is first confirmed in practice that such a device, which is referred as fractance, possesses a novel characteristics between the constituent elements, or the resistance and the capacitance. That is, the absolute value of the impedance shows such a characteristics as |Z|ω-1/2, whereas the phase angle does such a constant phase property as θ=-π/4 independent of the frequency. As an application of the presently proposed fractance device, we constructed a fractional integral circuit as well as a fractional differential circuit, and confirmed that the observed output wave forms agree well with those derived from a computer simulation.

Separability is a valuable property of nonlinear mappings. By exploiting this property, computational complexity of many numerical algorithms can be substantially reduced. In this letter, a new algorithm is presented that detects the separability of nonlinear mappings using the concept of "computational graph". A hybrid algorithm using both the top-down search and the bottom-up search is proposed. It is shown that this hybrid algorithm is advantageous in detecting the separability of nonlinear simultaneous functions.

We analyzed vergence change by moving both the target and the subject toward depth direction simultaneously. It has been suggested that the command for vergence movement caused by depth-direction-head-movement and that caused by target movement are generated separately, then combined in the oculomotor system.

Video service is slated to be a major application of emerging high-speed communications networks of the future. In particular, full-motion video is designed to take advantage of the high bandwidths that will become affordably available with the advent of B-ISDN. A salient feature of compressed video sources is that they give rise to autocorrelated traffic streams, which are difficult to model with traditional modeling techniques. In this paper, we describe a new methodology, called TES (Transform-Expand-Sample) , for modeling general autocorrelated time series, and we apply it to traffic modeling of compressed video. The main characteristic of this methodology is that it can model an arbitrary marginal distribution and approximate the autocorrelation structure of an empirical sample such as traffic measurements. Furthermore, the empirical marginal (histogram) and leading autocorrelations are captured simultaneously. Practical TES modeling is computationally intensive and is effectively carried out with software support. A computerized modeling environment, called TEStool, is briefly reviewed. TEStool supports a heuristic search approach for fitting a TES model to empirical time series. Finally, we exemplify our approach by two examples of TES video source models, constructed from empirical codec bitrate measurements: one at the frame level and the other at the group-of-block level. The examples demonstrate the efficacy of the TES modeling methodology and the TEStool modeling environment.

This paper proposes a new circuit configuration for realizing a type 1 mutator using two current conveyor (CCIIs) and a network with a suitable current transfer function. The advantage of the proposed circuit configuration is that any impedance functions which are proportional to the realizable current transfer function can be simulated.

This paper describes the higher-order moment analysis of superposed Markov jumping processes. A superposed Markov jumping process is defined as a linear superposition of a finite number of piecewise constant real valued stochastic process whose value changes are associated with state transitions in an underlying descrete state continuous time Markov process. Some phenomena are modeled well by the process such as membrane current fluctuations observed at bio-membranes or load fluctuations in electrical power systems. Theoretical formula of the moment function of any order k is derived and the parameter estimation problem utilizing higher-order moment functions is discussed. A new method of estimating the kinetic parameters of membrane current fluctuations is proposed as a possible application.

We fabricated mixed-signal ICs (MSICs) using wafer-bonded SOI devices with a film several microns thick. We found the MOSFETs on wafer-bonded SOI had characteristics as good as those on a conventional wafer provided the active Si layer is more than 2 µm thick. We fabricated a 16-bit SOI-CMOS delta-sigma A/D converter that suppressed digital noise interference via the substrate. We also fabricated a rectifier-merged SOI-BiCMOS circuit. The resulting characteristics were good, and not possible using conventional junction isolation. Our results suggest that SOI-based isolation is a key technology in integrating devices and systems on a single chip.

Stability property of an optically injection-locked semiconductor laser taking account of gain saturation is discussed. Numerical analysis shows that stable locking region is broadened due to gain saturation. This is because of rapid damping of relaxation oscillation due to gain saturation. It is also found that stable locking region is also broadened with increasing injection current since damping of relaxation oscillation becomes strong with increasing injection current. Numerical calculations of lasing spectrum show that the magnitude of sidepeaks appeared at harmonics of relaxation oscillation frequency under unstable locking condition are suppressed due to gain saturation.