Chemical structures of native oxides formed during wet chemical treatments of silicon surfaces were investigated using X-ray Photoelectron Spectroscopy (XPS) and Fourier Transformed Infrared. Attenuated Total Reflection (FT-IR-ATR). It was found that the amounts of Si-H bonds in native oxide and at native oxide/ silicon interface are negligibly small in the case of native oxides formed in H2SO4-H2O2 solution. Based on this discovery, it was found that native oxides can be characterized by the amount of Si-H bonds in the native oxide and the combination of various wet chemical treatments with the treatment in NH4OH-H2O2-H2O solution results in the drastic decrease in the amount of Si-H bonds in the native oxides.
Yasuhisa HAYASHI Satoshi KONDO Nobuyuki TAKASU Akio OGIHARA Shojiro YONEDA
This study proposes a new training method for hidden Markov model with separate vector quantization (SVQ-HMM) in speech recognition. The proposed method uses the correlation of two different kinds of features: cepstrum and delta-cepstrum. The correlation is used to decrease the number of reestimation for two features thus the total computation time for training models decreases. The proposed method is applied to Japanese language isolated dgit recognition.
Rinshi SUGINO Yoshiko OKUI Masaki OKUNO Mayumi SHIGENO Yasuhisa SATO Akira OHSAWA Takashi ITO
The mechanism of UV-excited dry cleaning using photoexcited chlorine radicals has been investigated for removing iron and aluminum contamination on a silicon surface. The iron and aluminum contaminants with a surface concentration of 1013 atoms/cm2 were intentionally introduced via an ammonium-hydrogenperoxide solution. The silicon etching rates from the Uv-excited dry cleaning differ depending on the contaminants. Fe and Al can be removed in the same manner. The removal of Fe and Al is highly temperature dependent, and is little affected by the silicon etching depth. Both Fe and Al on the silicon surface were completely removed by UV-excited dry cleaning at a cleaning temperature of 170, and were decreased by two orders of magnitude from the initial level when the surface was etched only 2 nm deep.
Hiroshi NOHIRA Yoshinari TAMURA Hiroki OGAWA Takeo HATTORI
The initial stages of SiO2/Si interface formation on a Si(111) surface were investigated at 300 in dry oxygen with a pressure of 133 Pa. It was found that the SiO2/Si interfacial transition layer is formed in three steps characterized by three different oxidation rates.
Jun YAMAGATA Masayuki MIYAZAWA Iwamasa NISHIKADO Takafumi SAITO
Over the past few years, the drive towards optimization and globalization of business activities has mandated the integration of various services, an increase in system scale, and the networking of a variety of systems. These requirements can only be satisfied by the introduction of systems that are able to accommodate and control multiple media and integrate LANs and PBXs synergistically. This paper proposes an architecture for next generation private networks called ANS (Areal Networking System) that is targeted at achieving flexible customization in an effort to meet a wide variety of user requirements as well as the ability to efficiently handle multimedia services. Based upon the clarification of various requirements on the ANS architecture, this paper defines two models for the ANS architecture. These models introduce modular building blocks in hierarchical structures that facilitate the custom design of networks. The key technologies for the ANS architecture are also discussed; for example, schemes for logically networking control functions by using virtual connections and a way to implement the LAN function.
Okihiko ISHIZUKA Zheng TANG Tetsuya INOUE Hiroki MATSUMOTO
We introduce a novel neural network called the T-Model and investigates the learning ability of the T-Model neural network. A learning algorithm based on the least mean square (LMS) algorithm is used to train the T-Model and produces a very good result for the T-Model network. We present simulation results on several practical problems to illustrate the efficiency of the learning techniques. As a result, the T-Model network learns successfully, but the Hopfield model fails to and the T-Model learns much more effectively and more quickly than a multi-layer network.
Mitsuru NOMURA Isao FURUKAWA Tetsurou FUJII Sadayasu ONO
This paper discusses the bit-rate compression of super high definition still images with subband coding. Super high definition (SHD) images with more than 20482048 pixels or resolution are introduced as the next generation imaging system beyond HDTV. In order to develop bit-rate reduction algorithms, an image evaluation system for super high definition images is assembled. Signal characteristics are evaluated and the optimum subband analysis/synthesis system for the SHD images is clarified. A scalar quantization combined with run-length and Huffman coding is introduced as a conventional subband coding algorithm, and its coding performance is evaluated for SHD images. Finally, new coding algorithms based on block Huffman coding and entropy coded vector quantization are proposed. SNR improvement of 0.5 dB and 1.0 dB can be achieved with the proposed block Huffman coding and the vector quantization algorithm, respectively.
Tsuyosi TAKEBE Masatoshi MURAKAMI Koji HATANAKA Shinya KOBAYASHI
This paper treats the problem of realizing high speed 2-D denominator separable digital filters. Partitioning a 2-D data plane into square blocks, filtering proceeds block by block sequentially. A fast intra-block parallel processing method was developed using block state space realization, which allows simultaneous computation of all the next block states and the outputs of one block. As the block state matrix of the filter has high sparsity, the rows and columns are interchanged respectively to reduce the matrix size. The filter is implemented by a multiprocessor system, where for each matrix's row one processor is assigned to perform the row-column vector multiplication. All processors wirk in synchronized fashion. Number of processors of this implementation are equal to the number of rows of the reduced state matrix and throughput is raised with block lengths.
Kiyoshi NISHIKAWA Russell M. MERSEREAU
We present a successful method for designing 2-D circularly symmetric R lowpass filters with constant group delay. The procedure is based on a transformation of a 1-D prototype R filter with constant group delay, whose magnitude response is the 2-D cross-sectional response. The 2-D filter transfer function has a separable denominator and a numerator which is obtained from the prototype numerator by means of a series of McClellan transformations whose free parameters can be optimized by successive procedure. The method is illustrated by an example.
Based on the Fornasini-Marchesini second model, an efficient algorithm is developed to derive the characteristic polynomial and the inverse of the system matrix from the state-space parameters. As a result, the external description of the Fornasini-Marchesini second model is clarified. A technique for designing 2-D recursive digital filters in the frequency domain is then presented by using the Fornasini-Marchesini second model. The resulting filter approximates both magnitude and group delay specifications and its stability is always guaranteed. Finally, three design examples are given to illustrate the utility of the proposed technique.
The meaning of analogical reasoning in locally stratified logic programs are described by generalized stable model (GSM) semantics. Although studies on the theoretical aspects of analogical reasoning have recently been on the increase, there have been few attempts to give declarative semantics for analogical reasoning. This paper takes notice of the fact that GSM semantics gives meaning to the effect that the negated predicates represent exceptional cases. We define predicates that denote unusual cases regarding analogical reasoning; for example, ab(x)p(x)g(x), where p(s), q(s), p(t) are given. We also add rules with negated occurrences of such predicates into the original program. In this way, analogical models for original programs are given in the form of GSMs of extended programs. A proof procedure for this semantics is presented. The main objective of this paper is not to construct a practical analogical reasoning system, but rather to present a framework for analyzing characteristics of analogical reasoning.
Masayuki KAWAMATA Takehiko KAGOSHIMA Tatsuo HIGUCHI
This paper proposes an efficient design method of three-dimensional (3-D) recursive digital filters for video signal processing via decomposition of magnitude specifications. A given magnitude specification of a 3-D digital filter is decomposed into specifications of 1-D digital filters with three different (horizontal, vertical, and temporal) directions. This decomposition can reduce design problems of 3-D digital filters to design problems of 1-D digital filters, which can be designed with ease by conventional methods. Consequently, design of 3-D digital filters can be efficiently performed without complicated tests for stability and large amount of computations. In order to process video signal in real time, the 1-D digital filters with temporal direction must be causal, which is not the case in horizontal and vertical directions. Since the proposed method can approximate negative magnitude specifications obtained by the decomposition with causal 1-D R filters, the 1-D digital filters with temporal direction can be causal. Therefore the 3-D digital filters designed by the proposed method is suitable for real time video signal processing. The designed 3-D digital filters have a parallel separable structure having high parallelism, regularity and modularity, and thus is suitable for high-speed VLSI implementation.
Logarithmic number systems (LNS) provide a very fast computational method. Their exceptional speed has been demonstrated in signal processing and then in computer graphics. But the precision problem of LNS in computer graphics has not been fully examined. In this paper analysis is made for the problem of LNS in picture generation, in particular for circle drawing. Theoretical error analysis is made for the circle drawing. That is, some expressions are developed for the relative error variances. Then they are examined by simulation experiments. Some comparisons are also done with floating point arithmetic with equivalent word length and dynamic range. The results show that the theory and the experiments agree reasonably well and that the logarithmic arithmetic is superior to or at least comparable to the corresponding floating point arithmetic with equivalent word length and dynamic range. Those results are also verified by visual inspections of actually drawn circles. It also shows that the conversion error (from integer to LNS), which is inherent in computer graphics with LNS, does not make too much influence on the total computational error for circle drawing. But it shows that the square-rooting makes the larger influence.
Kazuhiro MOTEGI Shigeyoshi WATANABE
For the development of a practical device simulation, it is necessary to solve the large sparse linear equations with a high speed computation of direct solution method. The use of parallel computation methods to solve the linear equations can reduce the CPU time greatly. The Multi Step Diakoptics (MSD) algorithm, is proposed as one of these parallel computation methods with direct solution, which is based on Diakoptics, that is, a tearing-based parallel computation method for sparse linear equations. We have applied the MSD algorithm to device simulation. This letter describes the partition and connection schedules in the MSD algorithm. The evaluation of this algorithm is done using a massively parallel computer with distributed memory (AP1000).
Cha Keon CHEONG Kiyoharu AIZAWA Takahiro SAITO Mitsutoshi HATORI
In this paper, subband image coding with symmetric biorthogonal wavelet filters is studied. In order to implement the symmetric biorthogonal wavelet basis, we use the Laplacian Pyramid Model (LPM) and the trigonometric polynomial solution method. These symmetric biorthogonal wavelet basis are used to form filters in each subband. Also coefficients of the filter are optimized with respect to the coding efficiency. From this optimization, we show that the values of a in the LPM generating kernel have the best coding efficiency in the range of 0.7 to 0.75. We also present an optimal bit allocation method based on considerations of the reconstruction filter characteristics. The step size of each subband uniform quantizer is determined by using this bit allocation method. The coding efficiency of the symmetric biorthogonal wavelet filter is compared with those of other filters: QMF, SSKF and Orthonormal wavelet filter. Simulation results demonstrate that the symmetric biorthogonal wavelet filter is useful as a basic means for image analysis/synthesis filters and can give better coding efficiency than other filters.
Tatsuhiro YASAKA Masaru TAKAKURA Kenichi SAWARA Shigeo UENAGA Hiroshi YASUTAKE Seiichi MIYAZAKI Masataka HIROSE
Hydrogen termination of HF-treated Si surfaces and the oxidation kinetics have been studied by x-ray photoelectron spectroscopy (XPS) and Fourier Transform Infrared Spectroscopy (FT-IR) Attenuated Total Reflection (ATR). The oxidation of hydrogen-terminated Si in air or in pure water proceeds parallel to the surface presumably from step edges, resulting in the layer-by-layer oxidation. The oxide gryowth rate on an Si(100) surface is faster than (110) and (111) when the wafer is stored in pure water. This is interpreted in terms of the steric hindrance against molecular oxygen penetration throughth the (110) and (111) surfaces where the atom void size is equal to or smaller than O2 molecule. The oxide growth rate in pure water for heavily doped n-type Si is significantly high compared to that of heavily doped p-type Si. This is explained by the conduction electron tunneling from Si to absorbed O2 molecule to form the O2- state. O2- ions easily decompose and induce the surface electric field, enhancing the oxidation rate. It is found that the oxidation of heavily doped n-type Si in pure water is effectively suppressed by adding a small amount (1003600 ppm) of HCl.
Hiroshi TAKAHASHI Nobukage IUCHI Yuzo TAKAMATSU
The single fault model is invalid in many cases. However, it is very difficult to generate tests for all multiple faults since an m-line circuit may have 3m --1 multiple faults. In this paper, we describe a method for generating tests for combinational circuits with multiple stuck-at faults. An input vector is a test for a fault on a target line, if it find the target line to be fault-free in the presence of undetected or undetectable lines. The test is called a robust test for fault on a target line. It is shown that the sensitizing input-pair for a completely single sensitized path can be a robust test-pair. The method described here consists of two procedures. We label these as SINGLE_SEN" procedure and DECISION" procedure. SINGLE_SEN generates a single sensitized path including a target line on it by using a PODEM-like method which uses a new seven-valued calculus. DECISION determines by utilizing the method proposed by H. Cox and J. Rajski whether the single sensitizing input-pair generated by the SINGLE_SEN is a robust test-pair. By using these two procedures the described method generates robust test-pairs for the combinational circuit with multiple stuck-at faults. Finally, we demonstrate by experimental results on the ISCAS85 benchmark circuits that SINGLE_SEN is effective for an algorithmic multiple fault test generation for circuits not including many XOR gates.
O Han KANG Soo Young YOON Hyun Soo YOON Jung Wan CHO
The main objective of this paper is to propose a new top-down subcube allocation scheme which has complete subcube recognition capability with quick response time. The proposed subcube allocation scheme, called Heuristic Subcube Allocation (HSA) strategy, is based on a heuristic and undirected graph, called Subcube (SC)-graph, whose vertices represent the free subcubes, and edge represents inter-relationships between free subcubes. It helps to reduce the response time and internal/external fragmentation. When a new subcube is released, the higher dimension subcube is generated by the cycle detection in the SC-graph, and the heuristic is used to reduce the allocation time and to maintain the dimension of the free subcube as high as possible. It is theoretically shown that the HSA strategy is not only statically optimal but also it has a complete subcube recognition capability in a dynamic environment. Extensive simulation results show that the HSA strategy improves the performance and significantly reduces the response time compared to the previously proposed schemes.
Spoken language systems such as speech-to-speech dialog translation systems have been gaining more attention in recent years. These systems require full integration of speech recognition and natural language understanding. This paper presents an efficient parsing algorithm that integrates the search problems of speech processing and language processing. The parsing algorithm we propose here is regarded as an extension of the finite-state-network directed, one-pass search algorithm to one directed by a context-free grammar with retention of the time-synchronous procedure. The extended search algorithm is used to find approximately globally optimal sentence hypotheses; it does not have overhead which exists in, for example, hierarchical systems based on the lattice parsing approach. The computational complexity of this search algorithm is proportional to the length of the input speech. As the search process in the speech recognition can directly take account of the predictive information in the sentence parsing, this framework can be extended to sopken language systems which deal with dynamically varying constraints in dialogue situations.
Nobutaka KUROKI Takanori NOMURA Masahiro TOMITA Kotaro HIRANO
A lossless image compression method based on two-dimensional (2D) linear prediction with variable coefficients is proposed. This method employs a space varying autoregressive (AR) model. To achieve a higher compression ratio, the method introduces new ideas in three points: the level conversion, the fast recursive parameter estimation, and the switching method for coding table. The level conversion prevents an AR model from predicting gray-level which does not exist in an image. The fast recursive parameter estimation algorithm proposed here calculates varying coefficients of linear prediction at each pixel in shorter time than conventional one. For encoding, the mean square error between the predicted value and the true one is calculated in the local area. This value is used to switch the coding table at each pixel to adapt it to the local statistical characteristics of an image. By applying the proposed method to "Girl" and "Couple" of IEEE monochromatic standard images, the compression ratios of 100 : 46 and 100 : 44 have been achieved, respectively. These results are superior to the best results (100 : 61 and 100 : 57) obtained by the approach under JPEG recommendations.