A new cleaning solution (FPM; HF-H2O2-H2O) was investigated in order to remove effectively metallic impurities on the silicon wafer surface. The removability of metallic impurities on the wafer surface and the concentrations of metallic impurities adsorbed on the wafer surface from each contaminated cleaning solution were compared between FPM and conventional cleaning solutions, such as HPM (HCl-H2O2-H2O), SPM (H2SO4-H2O2), DHF (HF-H2O) and APM (NH4OH-H2O2-H2O). This new cleaning solution had higher removability of metallic impurities than conventional ones. Adsorption of some kinds of metallic impurities onto the wafer surface was a serious problem for conventional cleaning solutions. This problem was solved by the use of FPM. FPM was important not only as a cleaning solution for metallic impurities, but also as an etchant. Furthemore, this new cleaning solution made possible to construct a simple cleaning system, because the concentrations of HF and H2O2 are good to be less than 1% for each, and it can be used at room temperature.

In this paper, we consider the polynomial time inferability from positive data for unions of two tree pattern languages. A tree pattern is a structured pattern known as a term in logic programming, and a tree pattern language is the set of all ground instances of a tree pattern. We present a polynomial time algorithm to find a minimal union of two tree pattern languages containing given examples. Our algorithm can be considered as a natural extension of Plotkin's least generalization algorithm, which finds a minimal single tree pattern language. By using this algorithm, we can realize a consistent and conservative polynomial time inference machine that identifies unions of two tree pattern languages from positive data in the limit.

The motion of particles in low-pressure chemical vapor deposition (LPCVD) (0.4 Torr) equipment has been investigated by a numerical simulation. The effects of wafer orientation, electrostatic forces, and thermophoresis were evaluated. Horizontal surface-down processing and vertical processing can reduce particulate contamination remarkably compared with horizontal surface-up processing. Static electricity control is essential. Weakly charged wafers (several V to several 10 V) can significantly increase submicron particle deposition. In the absence of electrical forces, thermophoresis prevents deposition of particles in the size range 0.03 µmDp0.6 µm, when the temperature difference between the wafer surface and the gas inlet temperature exceeds 100. Deposition of particles smaller than 0.03 µm still occurs by diffusion.

This letter describes the waveform relaxation algorithm with the dynamic circuit partitioning technique based on the operation point of bipolar devices. Finally, we verify its availability for the simulation of the digital bipolar transistor circuit.

Spoken language systems such as speech-to-speech dialog translation systems have been gaining more attention in recent years. These systems require full integration of speech recognition and natural language understanding. This paper presents an efficient parsing algorithm that integrates the search problems of speech processing and language processing. The parsing algorithm we propose here is regarded as an extension of the finite-state-network directed, one-pass search algorithm to one directed by a context-free grammar with retention of the time-synchronous procedure. The extended search algorithm is used to find approximately globally optimal sentence hypotheses; it does not have overhead which exists in, for example, hierarchical systems based on the lattice parsing approach. The computational complexity of this search algorithm is proportional to the length of the input speech. As the search process in the speech recognition can directly take account of the predictive information in the sentence parsing, this framework can be extended to sopken language systems which deal with dynamically varying constraints in dialogue situations.

Syntax-directed editors have several advantages in editing programs because programming is guided by the syntax and free from syntax errors. Nevertheless, they are less popular than text editiors. One of the reason is that they force a priori specified editing structures on the user and do not allow him to use his own structure. ACE (Algorithmically Customizable syntax-directed Editor) provides a solution for this problem by using a technique of machine learning; ACE has a special function of customizing the grammar algorithmically and interactively based on the learning method for grammars from examples and queries. The grammar used in the editor is customized through interaction with the user so that the user can edit his program in a more familiar structure. The customizing function has been implemented based on the methods for learning of context-free grammars from structural examples, for which the correctness and the efficiency are proved formally. This guarantees the soundness and the efficiency of customization. Furthermore, ACE can be used as an algorithmic and interactive tool to design grammars, which is required for several purposes such as compiler design and pretty-printer design.

In general, a two-dimensional display is defined by two orthogonal unit vectors. In developing the display, discriminant analysis has a shortcoming that the extracted axes are not orthogonal in general. First, in order to overcome the shortcoming, we propose discriminant analysis which provides an orthonormal system in the transformed space. The transformation preserves the discriminatory ability in terms of the Fisher criterion. Second, we present a necessary and sufficient condition that discriminant analysis in the original space provides an orthonormal system. Finally, we investigate the relationship between orthogonal discriminant analysis and the Karhunen-Loeve expansion in the original space.

The increase of surface microroughness on Si substrate degrades the electrical characteristics such as the dielectric breakdown field intensity (EBD) and charge to break-down (QBD) of thin oxide film. It has been found that the surface microroughness increases in the wet chemical process, particularly in NH4OH-H2O2-H2O cleaning (APM cleaning). It has been revealed that the surface microroughness does not increase at all if the NH4OH mixing ratio in NH4OH-H2O2-H2O solution is reduced from the conventional level of 1:1:5 to 0.05:1:5, and the room temperature ultrapure water rinsing is introduced right after the APM cleaning. At the same time, the APM cleaning with NH4OH-H2O2-H2O mixing ratio of 0.05:1:5 has been very effective to remove particles and metallic impurities from the Si surface. The surface microroughness dominating the electrical properties of very thin oxide films is strictly influenced by the wafer quality. The increase of surface microroughness due to the APM cleaning has varied among the wafer types such as Cz, FZ and epitaxial (EPI) wafers. The increase of surface microroughness in EPI wafer was very much limited, while the surface microroughness of FZ and Cz wafers gradually increase. As a result of investigating the amount of diffused phosphorus atoms into these wafers, the increase of the surface microroughness in APM cleaning has been confirmed to strongly depend on the silicon vacancy cluster concentration in wafer. The EPI wafer having low silicon vacancy concentration is essentially revealed superior for future sub-half-micron ULSI devices.

The effects of changing system parameters on job scheduling policies are studied for load balancing of multi-class jobs in a distributed computer system that consists of heterogeneous host computers connected by a single-channel communications network. A job scheduling policy decides which host should process the arriving jobs. We consider two job scheduling policies. The one is the overall optimal policy whereby jobs are scheduled so as to minimize the overall mean job response time. Tantawi and Towsley obtained the algorithm that gives the solution of the policy in the single class job environment and Kim and Kameda extended it to the multiple job class environment. The other is the individually optimal policy whereby jobs are scheduled so that every job may feel that its own expected response time is minimized. We can consider three important system parameters in a distributed computer system: the communication time of the network, the processing capacity of each node, and the job arrival rate of each node. We examine the effects of these three parameters on the two load balancing policies by numerical experiment.

Logarithmic number systems (LNS) provide a very fast computational method. Their exceptional speed has been demonstrated in signal processing and then in computer graphics. But the precision problem of LNS in computer graphics has not been fully examined. In this paper analysis is made for the problem of LNS in picture generation, in particular for circle drawing. Theoretical error analysis is made for the circle drawing. That is, some expressions are developed for the relative error variances. Then they are examined by simulation experiments. Some comparisons are also done with floating point arithmetic with equivalent word length and dynamic range. The results show that the theory and the experiments agree reasonably well and that the logarithmic arithmetic is superior to or at least comparable to the corresponding floating point arithmetic with equivalent word length and dynamic range. Those results are also verified by visual inspections of actually drawn circles. It also shows that the conversion error (from integer to LNS), which is inherent in computer graphics with LNS, does not make too much influence on the total computational error for circle drawing. But it shows that the square-rooting makes the larger influence.

This study proposes a new training method for hidden Markov model with separate vector quantization (SVQ-HMM) in speech recognition. The proposed method uses the correlation of two different kinds of features: cepstrum and delta-cepstrum. The correlation is used to decrease the number of reestimation for two features thus the total computation time for training models decreases. The proposed method is applied to Japanese language isolated dgit recognition.

The initial stages of SiO2/Si interface formation on a Si(111) surface were investigated at 300 in dry oxygen with a pressure of 133 Pa. It was found that the SiO2/Si interfacial transition layer is formed in three steps characterized by three different oxidation rates.

There has been much interest in building corporate private communication networks. This aim requires a method that optimizes the economical aspect of network configurations. The authors propose a network design method supported by knowledge-base. This method is used to design a cost-effective corporate communication network, using leased lines. The knowledge-base description depends on the production rule. The network configuration is improved by introducing expert knowledge, after designing the network by a conventional algorithm. Design results show the advantages of the proposed method.

Plasmaless etching using ClF3 gas has been investigated on nitride films with different composition. For the sputter deposited and thermally grown silicon nitride films containing no hydrogen, the etch rate increases and the activation energy decreases with increase of the composition ratio of silicon to nitrogen between 0.75 and 1.3. This fact indicates that the etching is likely to proceed through the reaction between Si and ClF3. The native oxide on the silicon-nitride films can also be removed with ClF3 gas. Ultra-violet light irradiation from a low pressure mercury lamp remarkably accelerates the removal of the native oxide and the etch rate of the thermally grown silicon-nitride films. For the plasma deposited films, the etch rate is strongly accelerate with increasing hydrogen content in the films, but the activation energy hardly depends on the bounded hydrogen in the films, consistent with the results for Si etching.

This paper describes a method of evaluating operations effort for fiber optic subscriber loops, such as the Central Terminal/Remote Terminal (CT/RT) system, which can economically provide a variety of telecommunication services. Four system configurations with different operation procedures are evaluated by simulation. By evaluating the operating costs associated with service provisioning, it is shown that automatic distributing frames are cost effective in subscriber loops with CT/RT systems. Moreover, the most economical operation strategies for installing and extending subscriber boards are discussed in terms of facility and operations cost.

This paper treats the problem of realizing high speed 2-D denominator separable digital filters. Partitioning a 2-D data plane into square blocks, filtering proceeds block by block sequentially. A fast intra-block parallel processing method was developed using block state space realization, which allows simultaneous computation of all the next block states and the outputs of one block. As the block state matrix of the filter has high sparsity, the rows and columns are interchanged respectively to reduce the matrix size. The filter is implemented by a multiprocessor system, where for each matrix's row one processor is assigned to perform the row-column vector multiplication. All processors wirk in synchronized fashion. Number of processors of this implementation are equal to the number of rows of the reduced state matrix and throughput is raised with block lengths.

In this paper, subband image coding with symmetric biorthogonal wavelet filters is studied. In order to implement the symmetric biorthogonal wavelet basis, we use the Laplacian Pyramid Model (LPM) and the trigonometric polynomial solution method. These symmetric biorthogonal wavelet basis are used to form filters in each subband. Also coefficients of the filter are optimized with respect to the coding efficiency. From this optimization, we show that the values of a in the LPM generating kernel have the best coding efficiency in the range of 0.7 to 0.75. We also present an optimal bit allocation method based on considerations of the reconstruction filter characteristics. The step size of each subband uniform quantizer is determined by using this bit allocation method. The coding efficiency of the symmetric biorthogonal wavelet filter is compared with those of other filters: QMF, SSKF and Orthonormal wavelet filter. Simulation results demonstrate that the symmetric biorthogonal wavelet filter is useful as a basic means for image analysis/synthesis filters and can give better coding efficiency than other filters.

For the development of a practical device simulation, it is necessary to solve the large sparse linear equations with a high speed computation of direct solution method. The use of parallel computation methods to solve the linear equations can reduce the CPU time greatly. The Multi Step Diakoptics (MSD) algorithm, is proposed as one of these parallel computation methods with direct solution, which is based on Diakoptics, that is, a tearing-based parallel computation method for sparse linear equations. We have applied the MSD algorithm to device simulation. This letter describes the partition and connection schedules in the MSD algorithm. The evaluation of this algorithm is done using a massively parallel computer with distributed memory (AP1000).

This paper designs and evaluates highly parallel VLSI processors for real time 2-D state-space digital filters using hierarchical behavioral description language and synthesizer. The architecture of the 2-D state-space digital filtering system is a linear systolic array of homogeneous VLSI processors, each of which consists of eight processing elements (PEs) executing 1-D state-space digital filtering with multi-input and multi-output. Hierarchical behavioral description language and synthesizer are adopted to design and evaluate PE's and the VLSI processors. One 16 bit fixed-point PE executing a (4, 4)-th order 2-D state-space digital filtering is described on the basis of distributed arithmetic in about 1,200 steps by the description language and is composed of 15 K gates in terms of 2 input NAND gate. One VLSI processor which is a cascade connection of eight PEs is composed of 129 K gates and can be integrated into one 1515 [mm2] VLSI chip using 1 µm CMOS standard cell. The 2-D state-space digital filtering system composed of 128 VLSI processors at 25 MHz clock can execute a 1,0241,024 image in 1.47 [msec] and thus can be applied to real-time conventional video signal processing.

In this paper, we deal with inductive inference of an indexed family of recursive languages. We give two sufficient conditions for inductive inferability of an indexed family from positive data, each of which does not depend on the indexing of the family. We introduce two notions of finite cross property for a class of languages and a pair of finite tell-tales for a language. The former is a generalization of finite elasticity due to Wright and the latter consists of two finite sets of strings one of which is a finite tell-tale introduced by Angluin. The main theorem in this paper is that if any language of a class has a pair of finite tell-tales, then the class is inferable from positive data. Also, it is shown that any language of a class with finite cross property has a pair of finite tell-tales. Hence a class with finite cross property is inferable from positive data. Further-more, it is proved that a language has a finite tell-tale if and only if there does not exist any infinite cross sequence of languages contained in the language.