Three custom LSIs for EB60, a direct wafer exposure electron beam system, have been developed using 0.8 µm BiCMOS and SST bipolar technologies. The three LSIs are i) a shot cycle control LSI for controlling each exposure cycle time, ii) a linear matrix computation LSI for coordinate modification of the exposure pattern data, and iii) a position calculation LSI for determining the precise position of the wafer. These LSIs allow the deflection corrector block of the revised EB60 to be realized on a single board. A new adaptive pipeline control technique which optimizes each shot period according to the exposure data is implemented in the shot-cycle control LSI. The position calculation LSI implements a new, highly effective 2-level pipeline exposure technique, the levels refer to major-field-deflection and minor-field-deflection. The linear-matrix computation LSI is designed not only for the EB60 but also for a wide variety of parallel digital processing applications.

A new direct projection patterning technique of aluminum using synchrotron radiation (SR) is proposed. It is based on the thermal reaction control effect of SR excitation. In the case of the Si surface, pure thermal growth is possible at 200, however, this growth is suppressed perfectly by SR irradiation. On the other hand, Al growth on the SiO2 surface is impossible at the same temperature thermally, however, SR has an effect to initiate thermal reaction. Both new effects of SR, suppression and initiation, are clarified to be caused by atomic order level thin layers formed from CVD gases by SR excitation on the surfaces. By using these effects, the direct inverse and normal projection patterning of Al are successfully demonstrated.

This paper describes the linguistic procedure of our speech dialogue system. The procedure is composed of two processes, syntactic analysis using a finite state network, and discourse analysis using a plan recognition model. The finite state network is compiled from regular grammar. The regular grammar is described in order to accept sentences with various styles, for example ellipsis and inversion. The regular grammar is automatically generated from the skeleton of the grammar. The discourse analysis module understands the utterance, generates the next question for users and also predicts words which will be in the next utterance. For an extension number guidance task, we obtained correct recognition results for 93% of input sentences without word prediction and for 98% if prediction results include proper words.

We propose a new randomized version of DES in which a key-dependent swapping is used to strengthen DES and DES-like cryptosystems against differential cryptanalysis. This new scheme, called RDES, decreases the probability of success in differential attack by decreasing the characteristic probability. The characteristic is the effect of particular differences in plaintext pairs on the differences in the resultant ciphertext pairs. The characteristic probability for the n-round RDES is 2-n+1 times that for the n-round DES. As for the differential cryptanalysis based on characteristics, the 16-round RDES is as strong as the about 20-round DES. Encryption/decryption speed of n-round RDES is almost the same as that of the n-round DES.

This paper presents an efficient multi-precision modular-multiplication algorithm which minimizes the calculation RAM space required when implementing public-key schemes with software on general-purpose computers including smart cards and personal computers. Many modular-multiplication algorithms cannot be efficiently realized on small systems due to their high RAM consumption. The Montgomery algorithm, which can rapidly perform modular multiplication, has received a lot of attention. Unfortunately, the Montgomery algorithm is difficult to implement, especially in smart cards which have extremely limited RAM space. Furthermore, when the modulus of modular multiplication is frequently changed, or when the number of permissible repeated modular multiplications is small, pre- and post-processing operations such as conversion from/to the Montgomery space become wasteful. The proposed algorithm avoids these problems because it requires only half the RAM space and no pre- and post-processing operations. The algorithm is a radical extension to the approximation methods that use the most significant bits and our newly proposed lookahead determination method. This paper gives a proof of the completeness of this method, describes implementation results using a smart card, introduces a theory supported by the results, and considers the optimal technique to enhance the speed of this method.

A precise method for determining AlGaAs/GaAs HBT large-signal circuit parameters is presented. In this method, the parameters are extracted from noise parameters and small-signal S-parameters measured under various bias conditions. The measured noise parameters are fitted to the calculated noise parameters derived from an approximation of Hawkins' equations applied to the macroscopic equivalent circuit. The small-signal S-parameters help to determine the large-signal circuit parameters. The derived large-signal parameters were used to design an HBT oscillator. The simulated results using these parameters were in good agreement with the fabricated device performance.

A high resolution iterative algorithm for estimating the direction-of-arrival of multiple wide band sources is proposed in this paper. For equally spaced array structure, two Unitary Transform based approaches are proposed in frequency domain for signal subspace processing in both coherent multipath and incoherent environment. Given a priori knowledge of the initial estimates of DOA, with proper spatial prefiltering to separate multiple groups of closely spaced sources, our proposed algorithm is shown to have high resolution capability even in coherent multipath environment without reducing the angular resolution, compared with the use of subarray. Compared with the conventional algorithm, the performance by the proposed algorithm is shown by the simulations to be improved under low Signal to Noise Ratio (SNR) while the performance is not degraded under high SNR. Moreover the computation burden involved in the eigencomputation is largely reduced by introducing the Pesudo-Hermitian matrix approximation.

Progress of speech recognition based on the hidden Markov model has made it possible to realize man-machine dialogue systems capable of operating in real time. In spite of considerable effort, however, few systems have been successfully developed because of the lack of appropriate dialogue models. This paper reports on some of technology necessary to develop a dialogue system with which one can converse comfortably. The emphasis is placed on the following three points: how a human converses with a machine; how errors of speech recognition can be recovered through conversation; and what it means for a machine to be cooperative. We examine the first problem by investigating dialogues between human speakers, and dialogues between a human speaker and a simulated machine. As a consideration in the design of dialogue control, we discuss the relation between efficiency and cooperativeness of dialogue, the method for confirming what the machine has recognized, and dynamic adaptation of the machine. Thirdly, we review the research on the friendliness of a natural language interface, mainly concerning the exchange of initiative, corrective and suggestive answers, and indirect questions. Lastly, we describe briefly the current state of the art in speech recognition and synthesis, and suggest what should be done for acceptance of spontaneous speech and production of a voice suitable to the output of a dialogue system.

A system is constructed for the processing of question-answer dialogue as a subsystem of the speech response device. In order to increase the adaptability to dialogue topics, rules for dialogue processing are classified into three groups; universal rules, topic-dependent rules and task-dependent rules, and example-based description is adopted for the second group. The system is disigned to operate only with information on the content words of the user input. As for speech synthesis, a function is included in the system to control the focal position. Introduction and guidance of ski areas are adopted as the dialogue domain, and a prototype system is realized on a computer. The dialogue example performed with the prototype indicates the propriety of our method for dialogue processing.

Optical fiber transmission systems have advanced rapidly with the advent of highly advanced electronic and optical devices. This paper introduces several IC technologies required for ultra-high-speed optical transmission and overviews current IC technologies used for the existing and developing optical fiber trunk transmission systems. Future trends in device technologies are also discussed.

In this paper, we investigate the round complexity of zero-knowledge interactive proof systems of possession of knowledge, and mainly show that if a relation R has a three move blackbox simulation zero-knowledge interactive proof system of possession of knowledge, then there exists a probabilistic polynomial time algorithm that on input x{0,1}*, outputs y such that (x,y)R with overwhelming probability if xdom R, and outputs "" with probability 1 if x dom R. The result above can not be generalized to zero-knowledge interactive proof systems of possession of knowledge with more than four moves, because it is known that there exists a "four" move blackbox simulation perfect zero-knowledge interactive proof system of possession of knowledge for a nontrivial relation R.

Recent progress on photoexcited process applications to fabricating of VLSI and flat panel devices in Japan has been reviewed. The excimer laser melt technique makes it possible to form large-grain poly-Si film on a glass substrate, improving TFT electrical characteristics, and to fill metals into high-aspect-ratio contact holes in VLSI metallization. Scanning of CW laser in poly-Si film led to growth of a single-crystal Si layer on SiO2 to fabricate 3-D (dimensional) devices successfully. Direct writing with pyrolytic reaction was put into practice for interconnection restructuring. In the photochemical process, lower temperature epitaxial growth of Si and dry cleaning of a Si wafer employing Hg lamp irradiation were noted. Directional etching was performed by sidewall film formation, while resolution of better than 0.5 µm was difficult to obtain due to diffraction limit. It was proposed that higher resolution would be obtained by introduction of a nonlinear process which enhanced pattern contrast.

In this paper, we propose an extended LR parsing algorithm, called LR parsing with a category reachability test (the LR-CRT algorithm). The LR-CRT algorithm enables a parser to efficiently recognize those sentences that belong to a specified grammatical category. The key point of the algorithm is to use an augmented LR parsing table in which each action entry contains a set of reachable categories. When executing a shift or reduce action, the parser checks whether the action can reach a given category using the augmented table. We apply the LR-CRT algorithm to improve a speech recognition system based on two-level LR parsing. This system uses two kinds of grammars, inter- and intra-phrase grammars, to recognize Japanese sentential speech. Two-level LR parsing guides the search of speech recognition through two-level symbol prediction, phrase category prediction and phone prediction, based on these grammars. The LR-CRT algorithm makes possible the efficient phone prediction based on the phrase category prediction. The system was evaluated using sentential speech data uttered phrase by phrase, and attained a word accuracy of 97.5% and a sentence accuracy of 91.2%

We define the communication complexity of a perfect zero-knowledge interactive proof (ZKIP) as the expected number of bits communicated to achieve the given error probabilities (of both the completeness and the soundness). While the round complexity of ZKIPs has been studied greatly, no progress has been made for the communication complexity of those. This paper shows a perfect ZKIP whose communication complexity is 11/12 of that of the standard perfect ZKIP for a specific class of Quadratic Residuosity.

Reduction in the illumination wavelength for exposure leads to higher resolution while keeping the depth of focus. Thus, KrF excimer laser lithography has been positioned as the next generation lithography tool behind g/i-line optical lithography, and many studies have been investigated. In the early days, the excimer laser lithography had many inherent problems, such as inadequate reliability, difficult maintainability, high operating cost, and low resolution and sensitivity of resist materials. However, the performance of the excimer laser stepper has been improved and chemical amplification resists have been developed for the past decade. At present, KrF excimer lithography has reached the level of trial manufacturing of lower submicron ULSI devices beyond 64 Mbit DRAMs.

In this paper a recursive form of Welch-Berlekamp (W-B) algorithm is provided which is a novel and fast decoding algorithm.

We have demonstrated the successful fabrication of the monolithic integration of a GaAs metalsemiconductor field-effect transistor (MESFET), an AlGaAs/InGaAs laser and a p-n photodetector grown on a SiO2 backcoated p-Si substrate using selective regrowth by metalorganic chemical vapor deposition (MOCVD). The use of SiO2 backcoated Si substrate is effective in suppressing unintentional Si autodoping and obtaining a good pinch-off GaAs MESFET. The MESFET with 2.5400 µm2 gate exhibited a transconductance of 90 mS/mm and a threshold voltage of 2.2 V. The reliability of the laser on the Si substrate can be improved by the strain-relieved AlGaAs/InGaAs laser with the InGaAs intermediate layer. The longest lifetime of the laser is 8 h at 27. During the GaAs layer growth, the p-n photodetector is formed near the surface of the p-Si substrate by diffusing the As atoms.

This paper discusses the problems facing spoken dialogue processing and the prospects for future improvements. Research on elemental topics like speech recognition, speech synthesis and language understanding has led to improvements in the accuracy and sophistication of each area of study. First, in order to handle a spoken dialogue, we show the necessity for information exchanges between each area of processing as seen through the analysis of spoken dialogue characteristics. Second, we discuss how to integrate those processes and show that the memory-basad approach to spontaneous speech interpretation offers a solution to the problem of process integration. The key to this is setting up a mental state affected by both speech and linguistic information. Finally, we discuss how those mental states are structured and a method for constructing them.

We studied the manner of clarification and verification in real dialogs and developed a spoken dialog system that can cope with the disambiguation of meanings of user input utterances. We analyzed content, query types and responses of human clarification queries. In human-human communications, ten percent of all sentences are concerned with meaning clarification. Therefore, in human-machine communications, we believe it is important that the machine verifies ambiguities occurring in dialog processing. We propose an architecture for a dialog system with this capability. Also, we have investigated the source of ambiguities in dialog processing and methods of dialog clarification for each part of the dialog system.

Given an integer N, it is easy to determine whether or not N is prime, because a set of primes is in LPP. Then given a composite number N, is it easy to determine whether or not N is of a specified form? In this paper, we consider a subset of odd composite numbers +1MOD4 (resp. +3MOD4), which is a subset of odd composite numbers consisting of prime factors congruent to 1 (resp. 3) modulo 4, and show that (1) there exists a four move (blackbox simulation) perfect ZKIP for the complement of +1MOD4 without any unproven assumption; (2) there exists a five move (blackbox simulation) perfect ZKIP for +1MOD4 without any unproven assumption; (3) there exists a four move (blackbox simulation) perfect ZKIP for +3MOD4 without any unproven assumption; and (4) there exists a five move (blackbox simulation) statistical ZKIP for the complement of +3MOD4 without any unproven assumption. To the best of our knowledge, these are the first results for a language L that seems to be not random self-reducible but has a constant move blackbox simulation perfect or statistical ZKIP for L and without any unproven assumption.