Hiroshi OKADA Mao FUKINAKA Yoshiki AKIRA
Effects of Al thickness in Ti/Al/Ti/Au ohmic contact on AlGaN/GaN heterostructures are studied. Samples having Al thickness of 30, 90 and 120 nm in Ti/Al/Ti/Au have been investigated by electrical and X-ray photoelectron spectroscopy (XPS) depth profile analysis. It is found that thick Al samples show lower resistance and formation of Al-based alloy under the oxidized Al layer.
Akio WAKEJIMA Arijit BOSE Debaleen BISWAS Shigeomi HISHIKI Sumito OUCHI Koichi KITAHARA Keisuke KAWAMURA
A detailed investigation of DC and RF performance of AlGaN/GaN HEMT on 3C-SiC/low resistive silicon (LR-Si) substrate by introducing a thick GaN layer is reported in this paper. The hetero-epitaxial growth is achieved by metal organic chemical vapor deposition (MOCVD) on a commercially prepared 6-inch LR-Si substrate via a 3C-SiC intermediate layer. The reported HEMT exhibited very low RF loss and thermally stable amplifier characteristics with the introduction of a thick GaN layer. The temperature-dependent small-signal and large-signal characteristics verified the effectiveness of the thick GaN layer on LR-Si, especially in reduction of RF loss even at high temperatures. In summary, a high potential of the reported device is confirmed for microwave applications.
Yuji HASHIMOTO Koji NUIDA Goichiro HANAOKA
It is an important research area to construct a cryptosystem that satisfies the security for multi-user setting. In addition, it is desirable that such a cryptosystem is tightly secure and the ciphertext size is small. For IND-CCA public key encryption schemes for multi-user setting with constant-size ciphertexts tightly secure under the DH assumptions, in 2020, Y. Sakai and G. Hanaoka firstly proposed such a scheme (implicitly based on hybrid encryption paradigm) under the DDH assumption. More recently, Y. Lee et al. proposed such a hybrid encryption scheme (with slightly stronger security) where the assumption for the KEM part is weakened to the CDH assumption. In this paper, we revisit the twin-DH hashed ElGamal KEM with even shorter ciphertexts than those schemes, and prove that its IND-CCA security for multi-user setting is in fact tightly reducible to the CDH assumption.
Masaru SATO Yoshitaka NIIDA Atsushi YAMADA Junji KOTANI Shiro OZAKI Toshihiro OHKI Naoya OKAMOTO Norikazu NAKAMURA
This paper presents recent progress on high frequency and wide bandwidth GaN high power amplifiers (PAs) that are usable for high-data-rate wireless communications and modern radar systems. The key devices and design techniques for PA are described in this paper. The results of the state-of-the art GaN PAs for microwave to millimeter-wave applications and design methodology for ultra-wideband GaN PAs are shown. In order to realize high output power density, InAlGaN/GaN HEMTs were employed. An output power density of 14.8 W/mm in S-band was achieved which is 1.5 times higher than that of the conventional AlGaN/GaN HEMTs. This technique was applied to the millimeter-wave GaN PAs, and a measured power density at 96 GHz was 3 W/mm. The modified Angelov model was employed for a millimeter-wave design. W-band GaN MMIC achieved the maximum Pout of 1.15 W under CW operation. The PA with Lange coupler achieved 2.6 W at 94 GHz. The authors also developed a wideband PA. A power combiner with an impedance transformation function based on the transmission line transformer (TLT) technique was adopted for the wideband PA design. The fabricated PA exhibited an average Pout of 233 W, an average PAE of 42 %, in the frequency range of 0.5 GHz to 2.1 GHz.
The membership check of a group is an important operation to implement discrete logarithm-based cryptography in practice securely. Since this check requires costly scalar multiplication or exponentiation operation, several efficient methods have been investigated. In the case of pairing-based cryptography, this is an extended research area of discrete logarithm-based cryptography, Barreto et al. (LATINCRYPT 2015) proposed a parameter choice called subgroup-secure elliptic curves. They also claimed that, in some schemes, if an elliptic curve is subgroup-secure, costly scalar multiplication or exponentiation operation can be omitted from the membership check of bilinear groups, which results in faster schemes than the original ones. They also noticed that some schemes would not maintain security with this omission. However, they did not show the explicit condition of what schemes become insecure with the omission. In this paper, we show a concrete example of insecurity in the sense of subgroup security to help developers understand what subgroup security is and what properties are preserved. In our conclusion, we recommend that the developers use the original membership check because it is a general and straightforward method to implement schemes securely. If the developers want to use the subgroup-secure elliptic curves and to omit the costly operation in a scheme for performance reasons, it is critical to carefully analyze again that correctness and security are preserved with the omission.
Taketoshi TANAKA Norikazu ITO Shinya TAKADO Masaaki KUZUHARA Ken NAKAHARA
TCAD simulation was performed to investigate the material properties of an AlGaN/GaN structure in Deep Acceptor (DA)-rich and Deep Donor (DD)-rich GaN cases. DD-rich semi-insulating GaN generated a positively charged area thereof to prevent the electron concentration in 2DEG from decreasing, while a DA-rich counterpart caused electron depletion, which was the origin of the current collapse in AlGaN/GaN HFETs. These simulation results were well verified experimentally using three nitride samples including buffer-GaN layers with carbon concentration ([C]) of 5×1017, 5×1018, and 4×1019 cm-3. DD-rich behaviors were observed for the sample with [C]=4×1019 cm-3, and DD energy level EDD=0.6 eV was estimated by the Arrhenius plot of temperature-dependent IDS. This EDD value coincided with the previously estimated EDD. The backgate experiments revealed that these DD-rich semi-insulating GaN suppressed both current collapse and buffer leakage, thus providing characteristics desirable for practical usage.
Hiraku MORITA Jacob C.N. SCHULDT Takahiro MATSUDA Goichiro HANAOKA Tetsu IWATA
In the ordinary security model for signature schemes, we consider an adversary that tries to forge a signature on a new message using only his knowledge of other valid message and signature pairs. To take into account side channel attacks such as tampering or fault-injection attacks, Bellare and Kohno (Eurocrypt 2003) formalized related-key attacks (RKA), where stronger adversaries are considered. In the RKA security model for signature schemes, we consider an adversary that can also manipulate the signing key and obtain signatures computed under the modified key. RKA security is defined with respect to the related-key deriving functions which are used by an adversary to manipulate the signing key. This paper considers RKA security of three established signature schemes: the Schnorr signature scheme, a variant of DSA, and a variant of ElGamal signature scheme. First, we show that these signature schemes are secure against a weak notion of RKA with respect to polynomial functions. Second, we demonstrate that, on the other hand, none of the Schnorr signature scheme, DSA, nor the ElGamal signature scheme achieves the standard notion of RKA security with respect to linear functions, by showing concrete attacks on these. Lastly, we show that slight modifications of the Schnorr signature scheme, (the considered variant of) DSA, and the variant of ElGamal signature scheme yield fully RKA secure schemes with respect to polynomial functions.
P. Pungboon PANSILA Kensaku KANOMATA Bashir AHMMAD Shigeru KUBOTA Fumihiko HIROSE
Gallium oxide is expected as a channel material for thin film transistors. In the conventional technologies, gallium oxide has been tried to be fabricated by atomic layer deposition (ALD) at high temperatures from 100--450$^{circ}$C, although the room-temperature (RT) growth has not been developed. In this work, we developed the RT ALD of gallium oxide by using a remote plasma technique. We studied trimethylgallium (TMG) adsorption and its oxidization on gallium oxide surfaces at RT by infrared absorption spectroscopy (IRAS). Based on the adsorption and oxidization characteristics, we designed the room temperature ALD of Ga$_{2}$O$_{3}$. The IRAS indicated that TMG adsorbs on the gallium oxide surface by consuming the adsorption sites of surface hydroxyl groups even at RT and the remote plasma-excited water and oxygen vapor is effective in oxidizing the TMG adsorbed surface and regeneration of the adsorption sites for TMG. We successfully prepared Ga$_{2}$O$_{3}$ films on Si substrates at RT with a growth per cycle of 0.055,nm/cycle.
Shingo HASEGAWA Shuji ISOBE Jun-ya IWAZAKI Eisuke KOIZUMI Hiroki SHIZUYA
Password-protected secret sharing (PPSS, for short) schemes were proposed by Bagherzandi, Jarecki, Saxena and Lu. In this paper, we consider another attack for PPSS schemes which is based on public parameters and documents. We show that the protocol proposed by Bagherzandi et al. is broken with the attack. We then propose an enhanced protocol which is secure against the attack.
In this letter, we formally present the definition of KDM-CCA1 security in public key setting, which falls in between the existing KDM-CPA and KDM-CCA2 security. We also prove that if a public key encryption scheme is CCA1 secure and has the properties of secret-key multiplication (or addition) homomorphism, and conditioned plaintext-restorability, then it is KDM-CCA1 secure w.r.t. two ensembles of functions that had been used in [15],[17], respectively. For concrete scheme, we show that the (tailored) Damgård's Elgamal scheme achieves this KDM-CCA1 security based on different assumptions.
In this paper, we examine additive homomorphic encryptions in the discrete logarithm setting. Recently, Wang et al. proposed an additive homomorphic encryption scheme by modifying the ElGamal encryption scheme [Information Sciences 181(2011) 3308-3322]. We show that their scheme allows only limited number of additions among encrypted messages, which is different from what they claimed.
Tadayoshi DEGUCHI Hideshi TOMITA Atsushi KAMADA Manabu ARAI Kimiyoshi YAMASAKI Takashi EGAWA
Current collapse of AlGaN/GaN heterostructure field-effect transistors (HFETs) formed on qualified epitaxial layers on Si substrates was successfully suppressed using graded field-plate (FP) structures. To improve the reproducibility of the FP structure manufacturing process, a simple process for linearly graded SiO2 profile formation was developed. An HFET with a graded FP structure exhibited a significant decrease in an on-resistance increase ratio of 1.16 even after application of a drain bias of 600 V.
Eiji MIYAZAKI Shigeru KISHIMOTO Takashi MIZUTANI
We performed the (NH4)2S surface treatments before Al2O3 deposition to improve the Al2O3/III-Nitride interface quality in Al2O3/AlGaN/GaN metal-oxide-semiconductor heterostructure field-effect transistors (MOSHFETs). Interface state density at the Al2O3/GaN interface was decreased by the (NH4)2S treatment. The hysteresis width in ID-VGS and gm-VGS characteristics of the Al2O3/AlGaN MOSHFETs with the (NH4)2S treatment was smaller than that without the (NH4)2S treatment. In addition, transconductance (gm) decrease at a large gate voltage was relaxed by the (NH4)2S treatment. We also performed ultraviolet (UV) illumination during the (NH4)2S treatment for further improvement of the Al2O3/III-Nitride interface quality. Interface state density of the Al2O3/GaN MOS diodes with the UV illumination was smaller than that without the UV illumination.
Maiko HATANO Norimasa YAFUNE Hirokuni TOKUDA Yoshiyuki YAMAMOTO Shin HASHIMOTO Katsushi AKITA Masaaki KUZUHARA
This paper describes high-temperature electron transport properties of AlGaN-channel HEMT fabricated on a free-standing AlN substrate, estimated at temperatures between 25 and 300. The AlGaN-channel HEMT exhibited significantly reduced temperature dependence in DC and RF device characteristics, as compared to those for the conventional AlGaN/GaN HEMT, resulting in larger values in both saturated drain current and current gain cutoff frequency at 300. Delay time analyses suggested that the temperature dependence of the AlGaN-channel HEMT was primarily dominated by the effective electron velocity in the AlGaN channel. These results indicate that an AlGaN-channel HEMT fabricated on an AlN substrate is promising for high-performance device applications at high temperatures.
Noboru NEGORO Masayuki KURODA Tomohiro MURATA Masaaki NISHIJIMA Yoshiharu ANDA Hiroyuki SAKAI Tetsuzo UEDA Tsuyoshi TANAKA
High output power AlGaN/GaN metal-insulator-semiconductor (MIS) hetero-junction field effect transistor (HFET) on Si substrate for millimeter-wave application has developed. High temperature chemical vapor deposition (HT-CVD) grown SiN as a gate insulator improves the breakdown characteristics which enables the operation at high drain voltage of 55 V. The device exhibits high drain current of 1.1 A/mm free from the current collapse and high RF gain of 10.4 dB. The amplifier module developed AlGaN/GaN MIS-HFET with the gate width of 5.4 mm exhibits an output power of 10.7 W and a linear gain of 4 dB at 26.5 GHz. The resultant high output power is very promising for long-distance communication at millimeter-wave in the future which would enable high speed and high density data transmission.
Masayuki ABE Noriaki KOGUSHI Kian Siong ANG René HOFSTETTER Kumar MANOJ Louis Nicholas RETNAM Hong WANG Geok Ing NG Chon JIN Dimitris PAVLIDIS
Novel thermopiles based on modulation doped AlGaAs/InGaAs and AlGaN/GaN heterostructures are proposed and developed for the first time, for uncooled infrared FPA (Focal Plane Array) image sensor application. The high responsivity with the high speed response time are designed to 4,900 V/W with 110 µs for AlGaAs/InGaAs, and to 460 V/W with 9 µs for AlGaN/GaN thermopiles, respectively. Based on integrated HEMT-MEMS technology, the AlGaAs/InGaAs 3232 matrix FPAs are fabricated to demonstrate its enhanced performances by black body measurement. The technology presented here demonstrates the potential of this approach for low-cost uncooled infrared FPA image sensor application.
Yusuke IKAWA Yorihide YUASA Cheng-Yu HU Jin-Ping AO Yasuo OHNO
Drain collapse in AlGaN/GaN HFET is analyzed using a two-dimensional device simulator. Two-step saturation is obtained, assuming hole-trap type surface states on the AlGaN surface and a short negative-charge-injected region at the drain side of the gate. Due to the surface electric potential pinning by the surface traps, the negative charge injected region forms a constant potential like in a metal gate region and it acts as an FET with a virtual gate. The electron concentration profile reveals that the first saturation occurs by pinch-off in the virtual gate region and the second saturation occurs by the pinch-off in the metal gate region. Due to the short-channel effect of the virtual gate FET, the saturation current increases until it finally reaches the saturation current of the intrinsic metal gate FET. Current collapses with current degradation at the knee voltage in the I-V characteristics can be explained by the formation of the virtual gate.
Cheng-Yu HU Katsutoshi NAKATANI Hiroji KAWAI Jin-Ping AO Yasuo OHNO
To improve the high voltage performance of AlGaN/GaN heterojunction field effect transistors (HFETs), we have fabricated AlGaN/GaN HFETs with p-GaN epi-layer on sapphire substrate with an ohmic contact to the p-GaN (p-sub HFET). Substrate bias dependent threshold voltage variation (VT-VSUB) was used to directly determine the doping concentration profile in the buffer layer. This VT-VSUB method was developed from Si MOSFET. For HFETs, the insulator is formed by epitaxially grown and heterogeneous semiconductor layer while for Si MOSFETs the insulator is amorphous SiO2. Except that HFETs have higher channel mobility due to the epitaxial insulator/semiconductor interface, HFETs and Si MOSFETs are basically the same in the respect of device physics. Based on these considerations, the feasibility of this VT-VSUB method for AlGaN/GaN HFETs was discussed. In the end, the buffer layer doping concentration was measured to be 21017 cm-3, p-type, which is well consistent with the Mg concentration obtained from secondary ion mass spectroscopy (SIMS) measurement.
Novel thermopiles based on modulation doped AlGaAs/InGaAs, AlGaN/GaN, and ZnMgO/ZnO heterostructures are proposed and designed for the first time, for uncooled infrared image sensor application. These devices are expected to offer high performances due to both the superior Seebeck coefficient and the excellently high mobility of 2DEG and 2DHG due to high purity channel layers at the heterojunction interface. The AlGaAs/InGaAs thermopile has the figure-of-merit Z of as large as 1.110-2/K (ZT = 3.3 over unity at T = 300 K), and can be realized with a high responsivity R of 15,200 V/W and a high detectivity D* of 1.8109 cmHz1/2/W with uncooled low-cost potentiality. The AlGaN/GaN and the ZnMgO/ZnO thermopiles have the advantages of high sheet carrier concentration due to their large polarization charge effects (spontaneous and piezo polarization charges) as well as of a high Seebeck coefficient due to their strong phonon-drag effect. The high speed response time τ of 0.9 ms with AlGaN/GaN, and also the lower cost with ZnMgO/ZnO thermopiles can be realized. The modulation-doped heterostructure thermopiles presented here are expected to be used for uncooled infrared image sensor applications, and for monolithic integrations with other photon detectors such as InGaAs, GaN, and ZnO PiN photodiodes, as well as HEMT functional integrated circuit devices.
Masanobu HIROKI Narihiko MAEDA Naoteru SHIGEKAWA
We investigated the influence of the thickness of the AlN interlayer for InAlN/GaN and InAlN/AlGaN/GaN heterostructures. The AlN thickness strongly affects the surface morphology and electron mobility of the InAlN/GaN structures. The rms roughness of the surface increases from 0.35 to 1.2 nm with increasing AlN thickness from 0 to 1.5 nm. Large pits are generated when the AlN is thicker than 1 nm. The highest electron mobility of 1470 cm2/VS is obtained for a 0.75-nm-thick AlN interlayer. The mobility, however, becomes lower with increasing deviation from 0.75 nm. It is only 200 cm2/VS for the 0-nm thick AlN. Inserting AlGaN between AlN and InAlN suppresses the influence of the AlN interlayer thickness. A smooth surface with rms roughness of 0.35 nm is obtained for all samples with 0-1.5-nm-thick AlN. The electron mobility ranges from 1000 to 1690 cm2/VS. The variation is smaller than that for InAlN/GaN. We fabricated field effect transistors (FETs) with gate length of 2 µm. The electron mobility in the access region affects the transconductance (gm) of FETs. As a results, the influence of the AlN thickness for InAlN/GaN FETs is larger than that for InAlN/AlGaN/GaN FETs, which reduces gate leakage current. The transconductance varies from 93 to 235 mS/mm for InAlN/GaN FETs. In contrast, it varies from 180 to 230 mS/mm for InAlN/AlGaN/GaN FETs. These results indicate that the InAlN/AlGaN/GaN heterostructures could lead to the development of GaN-based FETs.