Kenji KURISHIMA Hiroki NAKAJIMA Shoji YAMAHATA Takashi KOBAYASHI Yutaka MATSUOKA
This paper discusses crystal-growth and device-design issues associated with the development of high-performance InP/InGaAs heretostructure bipolar transistors (HBTs). It is shown that a highly Si-doped n+-subcollector in the HBT structure causes anomalous Zn redistribution during metalorganic vapor phase epitaxial (MOVPE) growth. A thermodynamical model of and a useful solution to this big problem are presented. A novel hybrid structure consisting of an abrupt emitter-base heterojunction and a compositionally-graded base is shown to enhance nonequilibrium base transport and thereby increase current gain and cutoff frequency fT. A double-heterostructure bipolar transistor (DHBT) with a step-graded InGaAsP collector can improve collector breakdown behavior without any speed penalty. We also elucidate the effect of emitter size shrinkage on high-frequency performance. Maximum oscillation frequency fmax in excess of 250 GHz is reported.
Yoshinao MIZUGAKI Koji NAKAJIMA Tsutomu YAMASHITA
We present a superconducting neural network which functions as an RS flip-flop. We employ a coupled-SQUID as a neuron, which is a combination of a single-junction SQUID and a double-junction SQUID. A resistor is used as a fixed synapse. The network consists of two neurons and two synapses. The operation of the network is simulated under the junction current density of 100 kA/cm2. The result shows that the network is operated as an RS flip-flop with clock speed capability up to 50 GHz.
Toshiyuki KIJIMA Masatoshi KOTERA Hirosi SUGA Yoshiaki NAKASE
A Monte Carlo method for the passage of electrons based on a single scattering model is developed. A code based on this method is operable on personal computers, and has been applied to analyze electron behavior in a layered system consisting of Ti (an accelerator window), air, cellulose triacetate (CTA) and backing material irradiated by 300 keV electrons. The energy spectra and the angular distributions of electrons on the CTA surface as well as depth distributions of energy deposition in the CTA for various backing materials have been obtained. Some of these results are compared with experiments, and show fairly good agreement.
Kou WADA Tsuneo OKUBO Satoshi TAZAWA Tetsuma SAKURAI Eisuke ARAI
A scalable and flexible ASIC CIM system distributed on UNIX workstations, ORCHARD , has been developed. It is designed from three viewpoints: (1) cost and TAT reduction in system construction, (2) flexibility in data management for quality control, and (3) precise and quick scheduling and effective lot tracking to control TAT for each lot. The concept of a "virtual machine" is introduced to connect equipment having various protocols to a host system. The virtual machine is automatically generated at an average automatic generation ratio of as high as 89%, which leads to a reduction in cost and TAT in system construction. Data for quality control is managed by changing flexibly the "data processing recipe." This recipe defines screen format, data collected from equipment, and data transfered from various databases. Precise scheduling of lots with various levels of priority is achieved by introducing a priority evaluation function, thereby reducing scheduling time to 1/20 that for manual scheduling.
Eisuke ARAI Shinji NAKAMURA Tetsuma SAKURAI Ayano KOJIMA
We propose a method for configuring LSI manufacturing lines so that they can not only be used to manufacture low-cost LSIs in bulk quantities but also can be used to manufacture small lots with ultra-short TAT. This is achieved by adding a relatively small amount of single-wafer processing equipment to a existing conventional processing line, and therefore involves minimum investment.
This paper describes an efficient slew rate enhancement technique especially suitable for an operational amplifier used in an LCD driver IC. This technique employs an input-dependent biasing without directly monitoring an input; instead, monitoring an output of the first stage of the amplifier. This enhancement technique is easily applied to a conventional two-stage operational amplifier and requires only 8 additional transistors to increase slew rates for both rising and falling edges. The bias currents of the first and the second stages are simultaneously controlled by this biasing. Experimental operational amplifiers with and without this enhancement have been fabricated to demonstrate the improvement of slew rate. Slew rates of 12.5V/µsec for the rising edge and 50V/µsec for the falling edge with a 100 pF load capacitance have been achieved by this technique, compared with slew rates of 0.3V/µsec for the rising edge and 5V/µsec for the falling edge in the conventional amplifier.
Although electromagnetic analysis tools can provide good numerical data about the effects of electromagnetic interference, measurements are the method of choice for obtaining quantitative, accurate data on electromagnetic noise problems. Furthermore, since electromagnetic interference measurements often provide the only data accepted by most regulatory agencies, the measurements and their accuracies have recently become a very important issue in order to regulate and harmonize various electromagnetic compatibility emission and immunity standards. The measurement techniques and instrumentations of most use for making accurate electromagnetic interference measurements are presented in this paper.
This paper proposes an electronic retail payment system to provide flexible and efficient funds transfers with adequate security, reliability, circulativity, and anonymity even in large-scale applications. Funds are represented by a portable intelligent device called a card issued by a supervising organization, the system provider. Funds can be transferred from a card to another at an intelligent terminal called a mediator. To update the balance of each card, two digital signatures are generated by a three-party protocol conducted by the cards and mediator, and are encoded and appended to a write-once separate memory in the card. Old signatures are simultaneously nullified. Through a wired or radio non-real-time link, the generated signatures are periodically reported to the system provider to systemically manage possible abuses.
Kazuya HAYATA Hiroyuki HIGAKI Masanori KOSHIBA
Ultrashort pulsed-beam propagation in a Kerr-type bulk medium is studied theoretically through classical and quantum field solutions of a higher-order nonlinear Schrödinger equation, which is valid for transversely localized femtosecond pulses in an anomalous dispersion regime. Quantum-mechanical stability analysis via a Hartree approximation to interacting bosons shows that within a certain range of a parameter the solitary wave could be stabilized even in the three-dimensional transverse space-time. This feature admits of an exotic route to multidimensional solitons.
Junichi GOTO Masakazu YAMASHINA Toshiaki INOUE Benjamin S. SHIH Youichi KOSEKI Tadahiko HORIUCHI Nobuhisa HAMATAKE Kouichi KUMAGAI Tadayoshi ENOMOTO Hachiro YAMADA
A programmable clock generator, based on a phase-locked loop (PLL) circuit, has been developed with 0.5 µm CMOS triple-layer Al interconnection technology for use as an on-chip clock generator in a 300-MHz video signal processor. The PLL-based clock generator generates a clock signal whose frequency ranges from 50 to 350 MHz which is an integral multiple, from 2 to 16, of an external clock frequency. In order to achieve stable operation within this wide range, a voltage controlled oscillator (VCO) with selectable low VCO gain characteristics has been developed. Experimental results show that the clock generator generates a 297-MHz clock with a 27-MHz external clock, with jitter of 180 ps and power dissipation of 120 mW at 3.3-V power supply, and it can also oscillate up to 348 MHz with a 31.7-MHz external clock.
Atsuya YOSHIDA Takami YAMAGUCHI Kiyoyuki YAMAZAKI
The Hyper Hospital" is a novel medical care system which will be constructed on an electronic information network. The human interface of the Hyper Hospital based on the modern virtual reality technology is expected to enhance patients' ability to heal by providing computer-supported on-line visual consultations. In order to investigate the effects and features of on-line visual consultations in the Hyper Hospital, we conducted an experiment to clarify the influence of electronic interviews on the talking behavior of interviewees in the context of simulated doctor-patient interactions. Four types of distant-confrontation interviews were made with voluntary subjects and their verbal and non-verbal responses were analyzed from the behavioral point of view. The types of interviews included three types of electronic media-mediated interviews and one of a live face to face interview. There was a tendency in the media-mediated interviews that both the latency and the duration of interviewees' utterances in answering questions increased when they were compared with those of live face to face interviews. These results suggest that the interviewee became more verbose or talkative in the media-mediated interviews than in the live interviews. However, the interviewee's psychological tension was generally augmented in the media-mediated interviews, which was suggested by the delay of the initiation of conversations as compared to the conventional face-to-face interviews. We also discuss the applicability of media-mediated interviews by an electronic doctor which we are studying as a functional unit of our Hyper Hospital, a network based virtual reality space for medical care.
When we design a human interface of a computer-mediated communication (CMC) system, it is important to take a socio-behavioral approach for understanding the nature of the human communication. From this point of view, we conducted experimental observations and post-experimental questionnaires to investigate communicative characteristics in a teleconference using Fujitsu Habitat" visual telecommunication software. We experimentally held the following three kinds of small-group conferences consisting of five geographically distributed participants: (a) teleconference using a visual telecommunication system (Fujitsu Habitat"), (b) teleconference using a real-time keyboard telecommunication system of NIFTY-Serve and (c) live face to face physical conference. Analyses were made on (1) effects of the media on utterance behaviors of conference members, and (2) satisfaction of conference members with communicative functions of the media. Satisfaction was measured by a seven-level rating scale. We found that participants in a telconference held by using Habitat showed significant differences in contents of utterances and the rating of satisfaction with nine communicative functions compared with those of conferences held by using a real-time keyboard telecommunication system and a live face-to-face conference. These results suggest some features that could facilitate multi-participant on-line electronic conferences and conversations.
In this paper, the influences of the cross-sectional deformation on the coplanar waveguide (CPW) characteristics for the use of Ti: LiNbO3optical modulator are presented based on quasi-static analysis. In particular, the influences of the changes in the thickness of Ti: LiNbO3 substrate and the cross-sectional shape of electrodes are studied in detail by using the finite element method proposed previously. As a result, it is found that the propagation characteristics of the dominant mode change significantly with the thickness of LiNbO3 substrate when it is less than 100 µm. It is also shown that an inverted trapezoidal deformation of the electrode cross section is promising because a wider electrode gap and thinner electrodes are available in the design of optical modulators.
Shigeru YOSHIMORI Masanori SUEYOSHI Ryuichi TAKANO Akiko FUJIWARA Mitsuo KAWAMURA
Precise measurements of temperature dependence of the Andreev reflection current for the N–I–S junctions were carried out. Au and Pb were used as N (normal metal) and S (superconducting material), respectively. The experimental results agreed with the analyses based on the Arnold theory.
Takeshi AOKI Yasuhisa NISHIMURA
Electromechanical devices such as relays, switches, connectors and printed wiring boards have shown quick growth along with remarkable progress of electronic products in a recent few decades. For the present, outstanding tasks common to these devices are further downsizing, higher density and broading of bandwidth, on the assumption of keeping high performance and high reliability. These tasks are realized by part production improvement for higher precision and automatic assemblies, development of constituent materials and development of breakthrough structural technologies such as a surface mount technology and an active assembly ferrule technology in optical connectors and so on. In this paper, the technical trends as well as the motive technologies are overviewed for each device.
Hideo ITOZAKI Saburo TANAKA Tatsuoki NAGAISHI Hisashi KADO
A multi-channel high temperature superconducting interference device (high Tc SQUID) system with high magnetic field resolution has been developed. Step edge junctions were employed as weakly coupled Josephson junctions for the SQUID. These junctions worked well and their I-V curves fit the resistively shunted junction (RSJ) model. The SQUID design was investigated to improve magnetic field resolution. The size of the SQUID's center hole was investigated, and we found the optimized size of the hole to be about 25 µm. Meissner effect of superconductor was used in order to concentrate magnetic fluxes. A large washer SQUID and a flux concentrating plate was developed to concentrate magnetic flux to the SQUID center hole. The magnetic field resolution became 370 fT/Hz at 10 Hz and 220 fT/Hz at 10 kHz. This field resolution was enough to detect biomagnetic signals such as magnetocardiac signals. The SQUID was mounted on a special chip carrier and was sealed with epoxy resin for protection from humidity. We have designed and developed a 4-channel and a 16-channel high Tc SQUID system. We used them in a magnetically shielded room to measure magnetic signals of the human heart. We obtained clear multi-channel magnetocardiac signals, which showed clear so called QRS and T wave peaks. A clear isofield contour map of magnetocardiac signals was also obtained. These data indicated that high Tc SQUID is feasible for these biomagnetic applications.
We compare interfaces of Nb/AlOx-Al/Nb and Nb/ZrOx-Zr/Nb junctions using secondary ion mass spectroscopy and cross-sectional transmission electron microscopy. We have clarified that an interface of the Nb/AlOx-Al/Nb junction is drastically different from that of the Nb/ZrOxZr/Nb junction. An adsorbed water vapor layer plays an important role in suppressing grain boundary diffusion between Nb and Al at the interface of the Nb/AlOxAl/Nb junction. In depositing Nb and Al at low power and cooling the substrate, it is important to control the formation of the adsorbed water vapor layer for fabricating Nb/AlOx-Al/Nb junctions exhibiting excellent current-voltage characteristics.
Seiichi ARITOME Riichiro SHIROTA Koji SAKUI Fujio MASUOKA
The data retention characteristics of a Flash memory cell with a self-aligned double poly-Si stacked structure have been drastically improved by applying a bi-polarity write and erase technology which uses uniform Fowler-Nordheim tunneling over the whole channel area both during write and erase. It is clarified experimentally that the detrapping of electrons from the gate oxide to the substrate results in an extended retention time. A bi-polarity write and erase technology also guarantees a wide cell threshold voltage window even after 106 write/erase cycles. This technology results in a highly reliable EEPROM with an extended data retention time.
Masao MIZUKAMI Yoichi SATOH Takahiko KOZAKI Yasuo MIKAMI
This paper describes CMOS embedded RAMs we developed utilizing 1.3 µm and 0.8 µm process technologies. Our goal was to achieve high-performance switching for digital communication systems. Because such switching can best be obtained by using high-performance embedded RAMs, we used 0.8 µm process technology and developed a 4 kW9 b single-port embedded RAM with 5 ns access time and 100 mW power dissipation during32 MHz operation, and a 1 kW9 b dual-port embedded RAM with 3.7 ns access time and 100 mW power dissipation during 40 MHz operation. We implemented these RAMs on one chip in developing three time-switch VLSIs, one buffer memory VLSI for ATM switches, and two cross-connect switch VLSIs.
Shuichi NAGASAWA Shuichi TAHARA Hideaki NUMATA Yoshihito HASHIMOTO Sanae TSUCHIDA
A polarity-convertible driver is necessary as a basic component of several Josephson random access memories. This driver must be able to inject a current having positive or negative polarity into a load transmission line such as a word or bit line of the RAM. In this paper, we propose a resistor coupled Josephson polarity-convertible driver which is highly sensitive to input signals and has a wide operating margin. The driver consists of several Josephson junctions and several resistors. The input signal is directly injected to the driver through the resistors. The circuit design is discussed on the operating principle of the driver. The driver is fabricated by 1.5 µm Nb technology with Nb/AlOx/Nb Josephson junctions, two layer Nb wirings, an Nb ground plane, Mo resistors, and SiO2 insulators. The Nb/AlOx/Nb Josephson junctions are fabricated using technology refined for sub-micron size junctions. The insulators between wirings are formed using bias sputtering technique to obtain good step coverage. The driver circuit size is 53 µm34 µm. Measurements are carried out at 10 kHz to quasistatically test the polarity-convertible function and the operating margin of the driver. Proper polarity-convertible operation is confirmed for a large operating bias margin of 70% at a fairly small input current of 0.3 mA.